ATE551533T1 - Statorscheibe für turbomolekularpumpe - Google Patents

Statorscheibe für turbomolekularpumpe

Info

Publication number
ATE551533T1
ATE551533T1 AT06009899T AT06009899T ATE551533T1 AT E551533 T1 ATE551533 T1 AT E551533T1 AT 06009899 T AT06009899 T AT 06009899T AT 06009899 T AT06009899 T AT 06009899T AT E551533 T1 ATE551533 T1 AT E551533T1
Authority
AT
Austria
Prior art keywords
stator disc
turbomolecular pump
vane
disc
radial rod
Prior art date
Application number
AT06009899T
Other languages
English (en)
Inventor
Tobias Stoll
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE551533T1 publication Critical patent/ATE551533T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2230/00—Manufacture
    • F05B2230/10—Manufacture by removing material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
AT06009899T 2005-06-11 2006-05-13 Statorscheibe für turbomolekularpumpe ATE551533T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005027097A DE102005027097A1 (de) 2005-06-11 2005-06-11 Statorscheibe für Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
ATE551533T1 true ATE551533T1 (de) 2012-04-15

Family

ID=36997487

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06009899T ATE551533T1 (de) 2005-06-11 2006-05-13 Statorscheibe für turbomolekularpumpe

Country Status (5)

Country Link
US (1) US20060280595A1 (de)
EP (1) EP1731766B1 (de)
JP (1) JP2006348935A (de)
AT (1) ATE551533T1 (de)
DE (1) DE102005027097A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB0917317D0 (en) * 2009-10-02 2009-11-18 Bladon Jets Ltd Rotary structures
EP2653728B1 (de) * 2010-12-14 2021-12-29 Edwards Japan Limited In einer absaugpumpe verwendbare feste lamelle und absaugpumpe damit
DE102012222230A1 (de) * 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
EP3051140B1 (de) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Statorscheibe für eine vakuumpumpe
JP7049052B2 (ja) * 2016-09-27 2022-04-06 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる固定円板
JP6834612B2 (ja) * 2017-03-07 2021-02-24 株式会社島津製作所 真空ポンプの製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS5990796A (ja) * 1982-11-12 1984-05-25 Shimadzu Corp タ−ボ分子ポンプ
JPS62258187A (ja) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ用静翼板の成形方法
JPS6319094U (de) * 1986-07-21 1988-02-08
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH01219393A (ja) * 1988-02-29 1989-09-01 Daikin Ind Ltd 分子式真空ポンプ
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
FR2850714B1 (fr) * 2003-02-03 2005-04-29 Cit Alcatel Pompe turbomoleculaire a entretoises multietagees de stator
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ

Also Published As

Publication number Publication date
US20060280595A1 (en) 2006-12-14
EP1731766A2 (de) 2006-12-13
EP1731766A3 (de) 2010-06-23
DE102005027097A1 (de) 2006-12-14
EP1731766B1 (de) 2012-03-28
JP2006348935A (ja) 2006-12-28

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