US20060280595A1 - Stator disc for a turbomolecular pump - Google Patents

Stator disc for a turbomolecular pump Download PDF

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Publication number
US20060280595A1
US20060280595A1 US11/415,805 US41580506A US2006280595A1 US 20060280595 A1 US20060280595 A1 US 20060280595A1 US 41580506 A US41580506 A US 41580506A US 2006280595 A1 US2006280595 A1 US 2006280595A1
Authority
US
United States
Prior art keywords
vanes
discs
disc
stator
stator disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/415,805
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English (en)
Inventor
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Assigned to PFEIFFER VACUUM GMBH reassignment PFEIFFER VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: STOLL, TOBIAS
Publication of US20060280595A1 publication Critical patent/US20060280595A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2230/00—Manufacture
    • F05B2230/10—Manufacture by removing material

Definitions

  • the present invention relates to a stator disc for a turbomolecular pump and having a plurality of vanes curved out of the disc plane and having their opposite ends connected with the outer and inner rings of the disc.
  • stator and stator discs are alternatively arranged, with the rotor discs being arranged on a rapidly rotatable shaft.
  • the stator discs are fixedly secured in the pump housing. Both types of discs have vanes, and their cooperation, together with a rapid rotation, produces the pumping effect. It is known to produce the vanes of both types of discs by milling them out of solid discs. This process is time-consuming and expensive. That is why stamped stator discs are used.
  • Such discs are disclosed, e.g., in German Laid-Open Application DE-0S 37 22 164.
  • solid discs are stamped out of sheet metal.
  • radial slots are stamped out in the discs.
  • the regions between the slots are set so that disc material is squeezed out of the disc plane so that vanes are formed. The regions, which are not set in inner and outer regions remain as rings.
  • a further drawback of the known process consists in that the process requires use of obsolete and, therefore, very expensive tools.
  • the object of the invention is to eliminate these drawbacks of the state of the art, to provide for use of cost-effective manufacturing tools, and to achieve a high precision of stator discs.
  • Another object of the invention is to eliminate the high degree of the deformation.
  • stator disc in which the vanes extending between the inner and outer rings have in connection regions of the vanes with the inner and outer rings, respective radial webs a circumferential width of which is smaller than a vane width.
  • the inventive stator disc has a smaller deformable material region which, moreover, requires a smaller degree of deformation.
  • stresses in the component are reduced, which eliminates straightening costs.
  • a higher precision of the disc measurements can be achieved.
  • cheaper tools can be used. The portion of the tool costs within overall manufacturing costs is reduced, which makes adaptation of the stator disc to the vacuum-technical requirements economical.
  • the use of the inventive stator disc in a turbomolecular pump results in reduction of the clearances within the pumps and, thereby, in improvement of the pumping action.
  • semi-circular disc members with substantially radial slots are produced by stamping or laser cutting.
  • circumferential slots are formed at opposite ends of the radial slots.
  • the material between the radial slots is curved out so that it is squeezed out of planes of the discs in such a way that vanes with a web between a respective vane and at least one of the outer and inner disc edges are formed.
  • the maximum width of the web in the circumferential direction or the circumferential width of the web is limited by the fact that deformation and material stresses are increased with an increased width.
  • the minimum width is limited by the required strength and heat transfer. The strength should insure that the web is able to withstand the mechanical loads applied to the web as a result, e.g., by an increased pressure drop across the stator disc.
  • the web has to have an appropriate cross-section that would insure a satisfactory heat transfer.
  • the ratio of the web width to the vane width is selected within a range from one/tenth to one/second.
  • a further manufacturing advantage results from forming the stator disc of a plurality of identical disc sections. In this case, only a single form for the disc section is necessary. This also facilitates assembly as the disc sections cannot be mixed and/or improperly combined.
  • a further manufacturing advantage is achieved by forming the vanes in a single step, all at once, curving simultaneously all of the vanes of a disc out of the disc plane. This permits to significantly reduce the operational time.
  • FIG. 1 a cross-sectional view of a turbomolecular pump with stator discs according to the present invention
  • FIG. 2 a plan view of a stator disc according to the present invention.
  • FIG. 3 a perspective view of a section of a stator disc according to the present invention, with the cut-out showing a web between a vane and an outer disc.
  • a turbomolecular pump 10 which is shown in FIG. 1 , has a housing 11 with a flange 12 for connecting the pump 10 with a pumped-out recipient.
  • the flange 12 contains a suction region 13 .
  • the turbomolecular pump 10 has an outlet 14 from which the compressed gas is expelled.
  • the turbomolecular pump 10 has a rotor shaft 15 which is supported in bearings 17 and is driven, with high speed, by a drive 18 .
  • the rotor shaft 15 carries a plurality of discs 16 , each carrying vanes.
  • Stator discs 1 which are likewise provided with vanes, are arranged between the rotor discs 16 and are fixedly secured in the housing 11 .
  • the stator discs 1 are hold at a distance from each other by spacer rings 19 .
  • the pumping action produced by a rapid rotation of the rotor discs 16 and their cooperation with the stator discs 1 .
  • the stator disc 1 which is used in the turbomolecular pump 10 and a plan view of which is shown in FIG. 2 , is formed of two half-discs 6 and 7 which are mounted about the rotor shaft from opposite sides upon assembly of the turbomolecular pump.
  • the stator disc 1 has an outer ring 4 with which it is held in the housing of the turbomolecular pump, and an inner ring 3 . Between the outer ring 4 and the inner ring 3 , there are arranged a plurality of vanes 2 .
  • the vanes are formed upon formation, in a solid material, substantially radial slots 8 and slots 9 in the circumferential direction.
  • webs 5 are formed in connection regions between the outer and inner rings and the vanes.
  • the circumferential width of the webs is designated with S, and the vane width is designated with T.
  • the vane width T is greater than the web depth S.
  • FIG. 3 shows a perspective view of a cut-out of the stator disc 1 that clarifies how the vanes are formed in a disc plane.
  • the web 5 is formed in the connection region between the outer ring 4 and the vane 2 , the plane of which is inclined relative to the disc plane.
  • the web With the web, the circumferential width S of which is smaller than the vane width T, the amount of the to-be-deformed material is reduced.
  • the radial dimension of the web is designated with R.
  • the deformation region along the circumference is as large as the depth T. At a large inclination of the vane relative to the disc plane, a very significant deformation of the material takes place, with the above-discussed drawbacks.
  • the deformation is essentially limited to the shorter region S, which permits to obtain the above-discussed advantages.
  • the dimensions S and R cannot be made arbitrary small.
  • the geometrical dimensions of the web are selected based on a load carrying ability and a maximum possible heat transfer.
  • a large amount of heat is generated as a result of compression and friction of the compressed gasses.
  • Another source of heat is the drive which operates not without losses. This heat is transferred from the rotor to the stator discs by radiation, and it should be able to be removed by the webs.
  • a ratio of S to T of 1:10 to 1:2 proved itself to be favorable and practical.
  • first, semi-circular discs with the substantially radial slots 8 are produced by stamping or laser cutting.
  • the further treatment is carried out in such a way that at the ends of the radial slots, further slots 9 in the circumferential direction, are produced, so that a web 5 is formed between the vane 2 and at least the inner ring 3 or the outer ring 4 .
  • the material between the radial slots is so curved that it is squeezed out of the disc plane in such a way that a vane 2 is formed.
  • the disc e.g., is placed between upper and lower forms, with the two forms being pressed against each other.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US11/415,805 2005-06-11 2006-05-01 Stator disc for a turbomolecular pump Abandoned US20060280595A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005027097.2 2005-06-11
DE102005027097A DE102005027097A1 (de) 2005-06-11 2005-06-11 Statorscheibe für Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
US20060280595A1 true US20060280595A1 (en) 2006-12-14

Family

ID=36997487

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/415,805 Abandoned US20060280595A1 (en) 2005-06-11 2006-05-01 Stator disc for a turbomolecular pump

Country Status (5)

Country Link
US (1) US20060280595A1 (de)
EP (1) EP1731766B1 (de)
JP (1) JP2006348935A (de)
AT (1) ATE551533T1 (de)
DE (1) DE102005027097A1 (de)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080317590A1 (en) * 2007-06-21 2008-12-25 Shimadzu Corporation Production method of stator blade and turbo-molecular pump with the stator blade
US20100226765A1 (en) * 2009-03-09 2010-09-09 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
US20120213639A1 (en) * 2009-10-02 2012-08-23 Bladon Jets Holdings Limited Rotary structures
CN103850949A (zh) * 2012-12-04 2014-06-11 普发真空有限公司 真空泵
US20140205431A1 (en) * 2013-01-22 2014-07-24 Shimadzu Corporation Vacuum pump
CN105840525A (zh) * 2015-01-29 2016-08-10 普发真空有限公司 定子盘
CN109690089A (zh) * 2016-09-27 2019-04-26 埃地沃兹日本有限公司 真空泵以及真空泵所具备的固定圆板

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2653728B1 (de) * 2010-12-14 2021-12-29 Edwards Japan Limited In einer absaugpumpe verwendbare feste lamelle und absaugpumpe damit
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
JP6834612B2 (ja) * 2017-03-07 2021-02-24 株式会社島津製作所 真空ポンプの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
US4832564A (en) * 1987-07-04 1989-05-23 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Pumps
US5158426A (en) * 1990-02-16 1992-10-27 Varian Associates, Inc. Stator assembly for a turbomolecular pump
US6334754B1 (en) * 1998-06-23 2002-01-01 Seiko Instruments Inc. Turbomolecular pump
US20080317590A1 (en) * 2007-06-21 2008-12-25 Shimadzu Corporation Production method of stator blade and turbo-molecular pump with the stator blade

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990796A (ja) * 1982-11-12 1984-05-25 Shimadzu Corp タ−ボ分子ポンプ
JPS62258187A (ja) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ用静翼板の成形方法
JPS6319094U (de) * 1986-07-21 1988-02-08
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH01219393A (ja) * 1988-02-29 1989-09-01 Daikin Ind Ltd 分子式真空ポンプ
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
FR2850714B1 (fr) * 2003-02-03 2005-04-29 Cit Alcatel Pompe turbomoleculaire a entretoises multietagees de stator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
US4832564A (en) * 1987-07-04 1989-05-23 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Pumps
US5158426A (en) * 1990-02-16 1992-10-27 Varian Associates, Inc. Stator assembly for a turbomolecular pump
US6334754B1 (en) * 1998-06-23 2002-01-01 Seiko Instruments Inc. Turbomolecular pump
US20080317590A1 (en) * 2007-06-21 2008-12-25 Shimadzu Corporation Production method of stator blade and turbo-molecular pump with the stator blade

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080317590A1 (en) * 2007-06-21 2008-12-25 Shimadzu Corporation Production method of stator blade and turbo-molecular pump with the stator blade
US8257033B2 (en) * 2007-06-21 2012-09-04 Shimadzu Corporation Production method of stator blade and turbo-molecular pump with the stator blade
US20100226765A1 (en) * 2009-03-09 2010-09-09 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
US8221098B2 (en) 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
US20120213639A1 (en) * 2009-10-02 2012-08-23 Bladon Jets Holdings Limited Rotary structures
JP2014111939A (ja) * 2012-12-04 2014-06-19 Pfeiffer Vacuum Gmbh 真空ポンプ
CN103850949A (zh) * 2012-12-04 2014-06-11 普发真空有限公司 真空泵
US20140205431A1 (en) * 2013-01-22 2014-07-24 Shimadzu Corporation Vacuum pump
US10161403B2 (en) * 2013-01-22 2018-12-25 Shimadzu Corporation Vacuum pump
CN105840525A (zh) * 2015-01-29 2016-08-10 普发真空有限公司 定子盘
CN109690089A (zh) * 2016-09-27 2019-04-26 埃地沃兹日本有限公司 真空泵以及真空泵所具备的固定圆板
US20190249676A1 (en) * 2016-09-27 2019-08-15 Edwards Japan Limited Vacuum pump and stator disk to be installed in vacuum pump
US11009028B2 (en) * 2016-09-27 2021-05-18 Edwards Japan Limited Vacuum pump and stator disk to be installed in vacuum pump

Also Published As

Publication number Publication date
EP1731766A3 (de) 2010-06-23
JP2006348935A (ja) 2006-12-28
ATE551533T1 (de) 2012-04-15
EP1731766A2 (de) 2006-12-13
DE102005027097A1 (de) 2006-12-14
EP1731766B1 (de) 2012-03-28

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Legal Events

Date Code Title Description
AS Assignment

Owner name: PFEIFFER VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:STOLL, TOBIAS;REEL/FRAME:017861/0118

Effective date: 20060425

STCB Information on status: application discontinuation

Free format text: ABANDONED -- AFTER EXAMINER'S ANSWER OR BOARD OF APPEALS DECISION