JP2006348935A - ターボ分子ポンプ用ステータ・ディスク - Google Patents

ターボ分子ポンプ用ステータ・ディスク Download PDF

Info

Publication number
JP2006348935A
JP2006348935A JP2006115643A JP2006115643A JP2006348935A JP 2006348935 A JP2006348935 A JP 2006348935A JP 2006115643 A JP2006115643 A JP 2006115643A JP 2006115643 A JP2006115643 A JP 2006115643A JP 2006348935 A JP2006348935 A JP 2006348935A
Authority
JP
Japan
Prior art keywords
disk
stator disk
stator
web
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006115643A
Other languages
English (en)
Japanese (ja)
Inventor
Tobias Stoll
トビアス・シュトール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of JP2006348935A publication Critical patent/JP2006348935A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2230/00—Manufacture
    • F05B2230/10—Manufacture by removing material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2006115643A 2005-06-11 2006-04-19 ターボ分子ポンプ用ステータ・ディスク Pending JP2006348935A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005027097A DE102005027097A1 (de) 2005-06-11 2005-06-11 Statorscheibe für Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
JP2006348935A true JP2006348935A (ja) 2006-12-28

Family

ID=36997487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006115643A Pending JP2006348935A (ja) 2005-06-11 2006-04-19 ターボ分子ポンプ用ステータ・ディスク

Country Status (5)

Country Link
US (1) US20060280595A1 (de)
EP (1) EP1731766B1 (de)
JP (1) JP2006348935A (de)
AT (1) ATE551533T1 (de)
DE (1) DE102005027097A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014111939A (ja) * 2012-12-04 2014-06-19 Pfeiffer Vacuum Gmbh 真空ポンプ
JP2016142268A (ja) * 2015-01-29 2016-08-08 プファイファー・ヴァキューム・ゲーエムベーハー ステーターディスク
JP2018145917A (ja) * 2017-03-07 2018-09-20 株式会社島津製作所 真空ポンプおよび真空ポンプの製造方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB0917317D0 (en) * 2009-10-02 2009-11-18 Bladon Jets Ltd Rotary structures
EP2653728B1 (de) * 2010-12-14 2021-12-29 Edwards Japan Limited In einer absaugpumpe verwendbare feste lamelle und absaugpumpe damit
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
JP7049052B2 (ja) * 2016-09-27 2022-04-06 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる固定円板

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990796A (ja) * 1982-11-12 1984-05-25 Shimadzu Corp タ−ボ分子ポンプ
JPS6319094U (de) * 1986-07-21 1988-02-08
JPH01219393A (ja) * 1988-02-29 1989-09-01 Daikin Ind Ltd 分子式真空ポンプ
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS62258187A (ja) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ用静翼板の成形方法
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
FR2850714B1 (fr) * 2003-02-03 2005-04-29 Cit Alcatel Pompe turbomoleculaire a entretoises multietagees de stator
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990796A (ja) * 1982-11-12 1984-05-25 Shimadzu Corp タ−ボ分子ポンプ
JPS6319094U (de) * 1986-07-21 1988-02-08
JPH01219393A (ja) * 1988-02-29 1989-09-01 Daikin Ind Ltd 分子式真空ポンプ
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014111939A (ja) * 2012-12-04 2014-06-19 Pfeiffer Vacuum Gmbh 真空ポンプ
JP2016142268A (ja) * 2015-01-29 2016-08-08 プファイファー・ヴァキューム・ゲーエムベーハー ステーターディスク
JP2018145917A (ja) * 2017-03-07 2018-09-20 株式会社島津製作所 真空ポンプおよび真空ポンプの製造方法

Also Published As

Publication number Publication date
EP1731766A3 (de) 2010-06-23
US20060280595A1 (en) 2006-12-14
ATE551533T1 (de) 2012-04-15
EP1731766A2 (de) 2006-12-13
DE102005027097A1 (de) 2006-12-14
EP1731766B1 (de) 2012-03-28

Similar Documents

Publication Publication Date Title
JP4935527B2 (ja) 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
US9664055B2 (en) Impeller and rotary machine provided with the same
EP4067680A1 (de) Folienluftdrucklager
JPH03184726A (ja) １枚以上の羽根を有するタービンポンプ用インペラ又は回転子を放電加工を用いて製造する方法及びそれにより製造された装置
JP2020511615A (ja) ターボマシンの駆動軸のためのベアリング装置、およびこのようなベアリング装置を備えたターボマシン
JP2008507652A (ja) 増大した流量を有する軸流インペラ
JP2014141964A (ja) 回転真空ポンプ
JP2011196188A (ja) 軸流圧縮機
US20060280595A1 (en) Stator disc for a turbomolecular pump
JP6241223B2 (ja) 真空ポンプ
JP6834612B2 (ja) 真空ポンプの製造方法
US10502215B2 (en) Blower assembly kit, device kit and associated method
JP6351654B2 (ja) 真空ポンプのローター
JP6236806B2 (ja) 真空ポンプ
JP6166296B2 (ja) ステータディスク
JP4517724B2 (ja) ターボ分子ポンプ
JP2002161889A (ja) ターボ分子ポンプ用ディスク
JP2016156365A (ja) 遠心ファン
JP2006291794A (ja) 真空ポンプのロータ
JP6125059B2 (ja) ステーターディスク
EP3845763A1 (de) Zylindrische montagehülse mit einem länglichen vorsprung an einer innenfläche
US8398362B2 (en) Turbomolecular pump
JP2004360697A (ja) 真空ポンプ用固定翼の製造方法およびそれにより得られる固定翼
JP6027601B2 (ja) ステータディスク
JP6118829B2 (ja) ステータディスク

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090317

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110728

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110801

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20110915

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20111031

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20111104

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20111201

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20120601