BE872083A - Composition "photoresist" resistant a la chaleur et procede de preparation de celle-ci - Google Patents

Composition "photoresist" resistant a la chaleur et procede de preparation de celle-ci

Info

Publication number
BE872083A
BE872083A BE191780A BE191780A BE872083A BE 872083 A BE872083 A BE 872083A BE 191780 A BE191780 A BE 191780A BE 191780 A BE191780 A BE 191780A BE 872083 A BE872083 A BE 872083A
Authority
BE
Belgium
Prior art keywords
photoresist
resistant
preparing
composition
heat
Prior art date
Application number
BE191780A
Other languages
English (en)
Original Assignee
Asahi Chemical Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Ind filed Critical Asahi Chemical Ind
Publication of BE872083A publication Critical patent/BE872083A/fr

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/14Polyamide-imides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387Polyamides or polyimides

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymerisation Methods In General (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
BE191780A 1977-11-17 1978-11-17 Composition "photoresist" resistant a la chaleur et procede de preparation de celle-ci BE872083A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13725677A JPS6054666B2 (ja) 1977-11-17 1977-11-17 耐熱性フオトレジスト組成物およびその製造法

Publications (1)

Publication Number Publication Date
BE872083A true BE872083A (fr) 1979-05-17

Family

ID=15194402

Family Applications (1)

Application Number Title Priority Date Filing Date
BE191780A BE872083A (fr) 1977-11-17 1978-11-17 Composition "photoresist" resistant a la chaleur et procede de preparation de celle-ci

Country Status (2)

Country Link
JP (1) JPS6054666B2 (fr)
BE (1) BE872083A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3683464D1 (de) * 1985-12-05 1992-02-27 Ibm Photoresistzusammensetzungen mit vermindertem loesungsgrad in basischen entwicklern, auf basis von durch diazochinon sensibilisierter polyamidsaeure.
JPH0646302B2 (ja) * 1987-06-22 1994-06-15 株式会社日立製作所 耐熱感光性重合体組成物
JPH02162170A (ja) * 1988-12-15 1990-06-21 Daihatsu Motor Co Ltd 自動車の車体後部構造
JP2006342335A (ja) * 2005-05-11 2006-12-21 Hitachi Chem Co Ltd ポリアミドイミドおよび樹脂組成物

Also Published As

Publication number Publication date
JPS5470820A (en) 1979-06-07
JPS6054666B2 (ja) 1985-11-30

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: ASAHI KASEI KOGYO K.K.

Effective date: 19951130