BE872083A - Composition "photoresist" resistant a la chaleur et procede de preparation de celle-ci - Google Patents
Composition "photoresist" resistant a la chaleur et procede de preparation de celle-ciInfo
- Publication number
- BE872083A BE872083A BE191780A BE191780A BE872083A BE 872083 A BE872083 A BE 872083A BE 191780 A BE191780 A BE 191780A BE 191780 A BE191780 A BE 191780A BE 872083 A BE872083 A BE 872083A
- Authority
- BE
- Belgium
- Prior art keywords
- photoresist
- resistant
- preparing
- composition
- heat
- Prior art date
Links
- 229920002120 photoresistant polymer Polymers 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/14—Polyamide-imides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0387—Polyamides or polyimides
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Medicinal Chemistry (AREA)
- Organic Chemistry (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymerisation Methods In General (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Macromonomer-Based Addition Polymer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13725677A JPS6054666B2 (ja) | 1977-11-17 | 1977-11-17 | 耐熱性フオトレジスト組成物およびその製造法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE872083A true BE872083A (fr) | 1979-05-17 |
Family
ID=15194402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE191780A BE872083A (fr) | 1977-11-17 | 1978-11-17 | Composition "photoresist" resistant a la chaleur et procede de preparation de celle-ci |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS6054666B2 (fr) |
| BE (1) | BE872083A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3683464D1 (de) * | 1985-12-05 | 1992-02-27 | Ibm | Photoresistzusammensetzungen mit vermindertem loesungsgrad in basischen entwicklern, auf basis von durch diazochinon sensibilisierter polyamidsaeure. |
| JPH0646302B2 (ja) * | 1987-06-22 | 1994-06-15 | 株式会社日立製作所 | 耐熱感光性重合体組成物 |
| JPH02162170A (ja) * | 1988-12-15 | 1990-06-21 | Daihatsu Motor Co Ltd | 自動車の車体後部構造 |
| JP2006342335A (ja) * | 2005-05-11 | 2006-12-21 | Hitachi Chem Co Ltd | ポリアミドイミドおよび樹脂組成物 |
-
1977
- 1977-11-17 JP JP13725677A patent/JPS6054666B2/ja not_active Expired
-
1978
- 1978-11-17 BE BE191780A patent/BE872083A/fr not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5470820A (en) | 1979-06-07 |
| JPS6054666B2 (ja) | 1985-11-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RE | Patent lapsed |
Owner name: ASAHI KASEI KOGYO K.K. Effective date: 19951130 |