CA1059242A - Method of selectively etching aiiibv semiconductor materials - Google Patents

Method of selectively etching aiiibv semiconductor materials

Info

Publication number
CA1059242A
CA1059242A CA250,662A CA250662A CA1059242A CA 1059242 A CA1059242 A CA 1059242A CA 250662 A CA250662 A CA 250662A CA 1059242 A CA1059242 A CA 1059242A
Authority
CA
Canada
Prior art keywords
etching
terized
charac
redox system
gallium arsenide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA250,662A
Other languages
English (en)
French (fr)
Inventor
Rudolf P. Tijburg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA1059242A publication Critical patent/CA1059242A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching
    • H10P50/646—Chemical etching of Group III-V materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H10D64/0116—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group III-V semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details

Landscapes

  • Weting (AREA)
  • Led Devices (AREA)
CA250,662A 1975-05-01 1976-04-21 Method of selectively etching aiiibv semiconductor materials Expired CA1059242A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7505134A NL7505134A (nl) 1975-05-01 1975-05-01 Werkwijze voor het vervaardigen van een half- geleiderinrichting.

Publications (1)

Publication Number Publication Date
CA1059242A true CA1059242A (en) 1979-07-24

Family

ID=19823678

Family Applications (1)

Application Number Title Priority Date Filing Date
CA250,662A Expired CA1059242A (en) 1975-05-01 1976-04-21 Method of selectively etching aiiibv semiconductor materials

Country Status (9)

Country Link
US (1) US4049488A (2)
JP (1) JPS51134576A (2)
CA (1) CA1059242A (2)
DE (1) DE2616907C2 (2)
FR (1) FR2309977A1 (2)
GB (1) GB1543737A (2)
IT (1) IT1059016B (2)
NL (1) NL7505134A (2)
SE (1) SE409259B (2)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4145478A (en) * 1977-07-28 1979-03-20 Desoto, Inc. Calcium oxide or hydroxide to improve the charge acceptance of electrographic dielectric resins
GB1602498A (en) * 1978-05-31 1981-11-11 Secr Defence Fet devices and their fabrication
GB1603260A (en) * 1978-05-31 1981-11-25 Secr Defence Devices and their fabrication
GB1601059A (en) * 1978-05-31 1981-10-21 Secr Defence Fet devices and their fabrication
JPS55146934A (en) * 1979-05-02 1980-11-15 Agency Of Ind Science & Technol Processing of surface shape of group 3-5 compound semiconductor
JPS55153338A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Surface treatment of semiconductor substrate
GB2145558A (en) * 1983-08-23 1985-03-27 Standard Telephones Cables Ltd Field effect transistor
DE3416991C1 (de) * 1984-05-09 1986-01-30 Philips Patentverwaltung Gmbh, 2000 Hamburg AEtzloesung und Verfahren zum AEtzen von ferrimagnetischen Granatverbindungen
GB2160823B (en) * 1984-06-28 1987-05-28 Stc Plc Semiconductor devices and their fabrication
US4923564A (en) * 1989-08-24 1990-05-08 American Telephone And Telegraph Company Selective etching process
FR2667724B1 (fr) * 1990-10-09 1992-11-27 Thomson Csf Procede de realisation des metallisations d'electrodes d'un transistor.
US5110765A (en) * 1990-11-30 1992-05-05 At&T Bell Laboratories Selective etch for GaAs-containing group III-V compounds

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3772100A (en) * 1971-06-30 1973-11-13 Denki Onkyo Co Ltd Method for forming strips on semiconductor device
US3801391A (en) * 1972-09-25 1974-04-02 Bell Telephone Labor Inc Method for selectively etching alxga1-xas multiplier structures
US3833435A (en) * 1972-09-25 1974-09-03 Bell Telephone Labor Inc Dielectric optical waveguides and technique for fabricating same
US3954534A (en) * 1974-10-29 1976-05-04 Xerox Corporation Method of forming light emitting diode array with dome geometry

Also Published As

Publication number Publication date
IT1059016B (it) 1982-05-31
FR2309977A1 (fr) 1976-11-26
DE2616907A1 (de) 1976-11-11
SE409259B (sv) 1979-08-06
FR2309977B1 (2) 1982-08-20
SE7604891L (sv) 1976-11-02
NL7505134A (nl) 1976-11-03
JPS5642134B2 (2) 1981-10-02
US4049488A (en) 1977-09-20
JPS51134576A (en) 1976-11-22
DE2616907C2 (de) 1983-04-14
GB1543737A (en) 1979-04-04

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Legal Events

Date Code Title Description
MKEX Expiry

Effective date: 19960724