CA1280929C - Salle blanche - Google Patents
Salle blancheInfo
- Publication number
- CA1280929C CA1280929C CA000525873A CA525873A CA1280929C CA 1280929 C CA1280929 C CA 1280929C CA 000525873 A CA000525873 A CA 000525873A CA 525873 A CA525873 A CA 525873A CA 1280929 C CA1280929 C CA 1280929C
- Authority
- CA
- Canada
- Prior art keywords
- air
- region
- floor
- clean room
- ceiling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003749 cleanliness Effects 0.000 claims abstract description 39
- 238000007664 blowing Methods 0.000 claims abstract description 14
- 238000005192 partition Methods 0.000 claims description 87
- 238000004519 manufacturing process Methods 0.000 claims description 50
- 238000009423 ventilation Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 7
- 238000000638 solvent extraction Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 abstract description 23
- 230000003405 preventing effect Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 9
- 238000009434 installation Methods 0.000 description 7
- 238000003860 storage Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 241001274218 Luvarus imperialis Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
Landscapes
- Ventilation (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60286571A JPS62147249A (ja) | 1985-12-19 | 1985-12-19 | クリ−ンル−ム |
| JP60-286571 | 1985-12-19 | ||
| JP60287330A JPS62147250A (ja) | 1985-12-20 | 1985-12-20 | クリ−ンル−ム |
| JP60-287330 | 1985-12-20 | ||
| JP60-294699 | 1985-12-27 | ||
| JP60294699A JPH0735209B2 (ja) | 1985-12-27 | 1985-12-27 | クリ−ンル−ム等における被加工物の搬送方法および搬送装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1280929C true CA1280929C (fr) | 1991-03-05 |
Family
ID=27337272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000525873A Expired - Fee Related CA1280929C (fr) | 1985-12-19 | 1986-12-19 | Salle blanche |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1280929C (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016064321A1 (fr) * | 2014-10-23 | 2016-04-28 | Qlean Air Scandinavia Ab | Paroi perforée pour l'élimination de gaz ou de particules |
-
1986
- 1986-12-19 CA CA000525873A patent/CA1280929C/fr not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016064321A1 (fr) * | 2014-10-23 | 2016-04-28 | Qlean Air Scandinavia Ab | Paroi perforée pour l'élimination de gaz ou de particules |
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| JPS6071830A (ja) | 組替式局所環境制御室 | |
| WO1997048951A1 (fr) | Appareil-boitier a environnement protege avec controle du debit d'air et equilibrage de l'air | |
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| JPH0535326B2 (fr) | ||
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| JPH0544663Y2 (fr) | ||
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| JPS62147250A (ja) | クリ−ンル−ム | |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |