CA2753797C - Microgyroscope destine a determiner des mouvements rotatifs autour d'axes x et/ou y et z - Google Patents

Microgyroscope destine a determiner des mouvements rotatifs autour d'axes x et/ou y et z Download PDF

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Publication number
CA2753797C
CA2753797C CA2753797A CA2753797A CA2753797C CA 2753797 C CA2753797 C CA 2753797C CA 2753797 A CA2753797 A CA 2753797A CA 2753797 A CA2753797 A CA 2753797A CA 2753797 C CA2753797 C CA 2753797C
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masses
group
oscillating
axis
microgyroscope
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CA2753797A1 (fr
Inventor
Volker Kempe
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HANKING ELECTRONICS HONGKONG CO., LIMITED
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Maxim Integrated GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un microgyroscope destiné à déterminer des mouvements rotatifs autour d'axes x et/ou y et z et comportant un support, plusieurs masses (4, 5) vibrantes, pourvues de ressorts pour leur fixation sur le support, des éléments d'entraînement pour mettre au moins certaines masses (4, 5) en vibration sur le plan x-y, afin de générer des forces de Coriolis lors de la rotation du support, et des éléments capteurs pour détecter des déports des masses (4, 5) dus aux forces de Coriolis générées. Au moins certaines masses (4, 5) sont disposées en deux groupes. Les masses (4, 5) des deux groupes peuvent être excitées ensemble par les éléments d'entraînement pour effectuer un mouvement primaire de vibration dans le plan des axes x/y. Les masses (4) du premier groupe sont disposées sur le support de manière à permettre des mouvements à partir des plans x/y. Les masses (5) du deuxième groupe sont disposées sur le support de manière à permettre des mouvements perpendiculaires au mouvement primaire de vibration dans le plan des axes x/y.
CA2753797A 2009-02-27 2010-02-22 Microgyroscope destine a determiner des mouvements rotatifs autour d'axes x et/ou y et z Active CA2753797C (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009001244A DE102009001244A1 (de) 2009-02-27 2009-02-27 Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse
DE102009001244.3 2009-02-27
PCT/EP2010/052179 WO2010097356A1 (fr) 2009-02-27 2010-02-22 Microgyroscope destiné à déterminer des mouvements rotatifs autour d'axes x et/ou y et z

Publications (2)

Publication Number Publication Date
CA2753797A1 CA2753797A1 (fr) 2010-09-02
CA2753797C true CA2753797C (fr) 2017-07-04

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Family Applications (1)

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CA2753797A Active CA2753797C (fr) 2009-02-27 2010-02-22 Microgyroscope destine a determiner des mouvements rotatifs autour d'axes x et/ou y et z

Country Status (8)

Country Link
US (1) US8479575B2 (fr)
EP (1) EP2401581B1 (fr)
JP (1) JP5639088B2 (fr)
KR (1) KR101677954B1 (fr)
CN (1) CN102334011B (fr)
CA (1) CA2753797C (fr)
DE (1) DE102009001244A1 (fr)
WO (1) WO2010097356A1 (fr)

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Also Published As

Publication number Publication date
EP2401581A1 (fr) 2012-01-04
JP2012519270A (ja) 2012-08-23
CN102334011B (zh) 2015-08-05
JP5639088B2 (ja) 2014-12-10
WO2010097356A1 (fr) 2010-09-02
US8479575B2 (en) 2013-07-09
CA2753797A1 (fr) 2010-09-02
DE102009001244A1 (de) 2010-09-02
CN102334011A (zh) 2012-01-25
KR101677954B1 (ko) 2016-11-21
KR20110130445A (ko) 2011-12-05
US20120048017A1 (en) 2012-03-01
EP2401581B1 (fr) 2016-05-11

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