CH621910B - Procede de fabrication d'un vibreur piezo-electrique. - Google Patents
Procede de fabrication d'un vibreur piezo-electrique.Info
- Publication number
- CH621910B CH621910B CH113877A CH113877A CH621910B CH 621910 B CH621910 B CH 621910B CH 113877 A CH113877 A CH 113877A CH 113877 A CH113877 A CH 113877A CH 621910 B CH621910 B CH 621910B
- Authority
- CH
- Switzerland
- Prior art keywords
- kept
- piezo
- manufacturing
- layer
- depositing
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000151 deposition Methods 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0492—Resonance frequency during the manufacture of a tuning-fork
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Surgical Instruments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP863276A JPS5291669A (en) | 1976-01-29 | 1976-01-29 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CH621910B true CH621910B (fr) | |
| CH621910GA3 CH621910GA3 (fr) | 1981-03-13 |
Family
ID=11698318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH113877A CH621910B (fr) | 1976-01-29 | 1977-01-31 | Procede de fabrication d'un vibreur piezo-electrique. |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4080696A (fr) |
| JP (1) | JPS5291669A (fr) |
| CH (1) | CH621910B (fr) |
| DE (1) | DE2703336A1 (fr) |
| FR (1) | FR2339960B1 (fr) |
| GB (1) | GB1549111A (fr) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411173U (fr) * | 1977-06-24 | 1979-01-24 | ||
| JPS54152885A (en) * | 1978-05-23 | 1979-12-01 | Seiko Epson Corp | Crystal oscillator |
| JPS5961210A (ja) * | 1982-09-29 | 1984-04-07 | Kinseki Kk | 水晶振動子の金属膜構造 |
| US4763098A (en) * | 1985-04-08 | 1988-08-09 | Honeywell Inc. | Flip-chip pressure transducer |
| US5369862A (en) * | 1990-02-26 | 1994-12-06 | Murata Manufacturing Co., Ltd. | Method of producing a piezoelectric device |
| US5987987A (en) * | 1997-04-14 | 1999-11-23 | Denso Corporation | Angular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor |
| US6249074B1 (en) * | 1997-08-22 | 2001-06-19 | Cts Corporation | Piezoelectric resonator using sacrificial layer and method of tuning same |
| JP4509621B2 (ja) * | 2003-10-10 | 2010-07-21 | 日本電波工業株式会社 | 角速度センサ用音叉型水晶振動子の製造方法 |
| RU2308790C2 (ru) * | 2005-12-13 | 2007-10-20 | Сергей Сергеевич Пашков | Способ улучшения монотонности температурно-частотных характеристик кварцевых резонаторов в стеклянных корпусах |
| JP4502219B2 (ja) * | 2006-10-10 | 2010-07-14 | 日本電波工業株式会社 | 音叉型水晶振動子素子の製造方法 |
| US8327684B2 (en) * | 2008-10-21 | 2012-12-11 | Teledyne Scientific & Imaging, Llc | Method for adjusting resonance frequencies of a vibrating microelectromechanical device |
| JP2015128268A (ja) * | 2013-12-27 | 2015-07-09 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器、物理量センサー、移動体および振動素子の周波数調整方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2856313A (en) * | 1955-11-01 | 1958-10-14 | Gerber Paul Daniel | Method of plating quartz crystals |
| FR1433006A (fr) * | 1964-04-24 | 1966-03-25 | Int Standard Electric Corp | Perfectionnements à la fabrication des vibrateurs piézo-électriques |
| US3691720A (en) * | 1970-10-12 | 1972-09-19 | Western Electric Co | Apparatus for frequency adjusting and assembling monolithic crystal filters |
| US3683213A (en) * | 1971-03-09 | 1972-08-08 | Statek Corp | Microresonator of tuning fork configuration |
| US3766616A (en) * | 1972-03-22 | 1973-10-23 | Statek Corp | Microresonator packaging and tuning |
| US3914836A (en) * | 1974-06-21 | 1975-10-28 | Us Army | Method for processing quartz crystal resonators |
-
1976
- 1976-01-29 JP JP863276A patent/JPS5291669A/ja active Pending
-
1977
- 1977-01-26 GB GB3192/77A patent/GB1549111A/en not_active Expired
- 1977-01-27 DE DE19772703336 patent/DE2703336A1/de not_active Withdrawn
- 1977-01-27 FR FR7702265A patent/FR2339960B1/fr not_active Expired
- 1977-01-28 US US05/763,711 patent/US4080696A/en not_active Expired - Lifetime
- 1977-01-31 CH CH113877A patent/CH621910B/fr not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE2703336A1 (de) | 1977-08-04 |
| CH621910GA3 (fr) | 1981-03-13 |
| GB1549111A (en) | 1979-08-01 |
| FR2339960B1 (fr) | 1985-05-31 |
| FR2339960A1 (fr) | 1977-08-26 |
| JPS5291669A (en) | 1977-08-02 |
| US4080696A (en) | 1978-03-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |