DK0554846T3 - Fremgangsmåde til fremstilling af lysmodtagende halvlederelementer - Google Patents

Fremgangsmåde til fremstilling af lysmodtagende halvlederelementer

Info

Publication number: DK0554846T3
Authority: DK; Denmark
Prior art keywords: semiconductor elements; manufacturing light; receiving semiconductor; receiving; manufacturing
Prior art date: 1992-02-07

Application number

DK93101631.5T

Other languages

English (en)

Inventor

Takashi Iwasaki

Yasuhiro Iguchi

Naoyuki Yamabayashi

Original Assignee

Sumitomo Electric Industries

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-02-07

Filing date

1993-02-03

Publication date

1996-08-19

1993-02-03 Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries

1996-08-19 Application granted granted Critical

1996-08-19 Publication of DK0554846T3 publication Critical patent/DK0554846T3/da

Links

238000004519 manufacturing process Methods 0.000 title 1
238000000034 method Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/127—The active layers comprising only Group III-V materials, e.g. GaAs or InP
- H10F71/1272—The active layers comprising only Group III-V materials, e.g. GaAs or InP comprising at least three elements, e.g. GaAlAs or InGaAsP
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/938—Lattice strain control or utilization

DK93101631.5T 1992-02-07 1993-02-03 Fremgangsmåde til fremstilling af lysmodtagende halvlederelementer DK0554846T3 (da)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP02295492A JP3288741B2 (ja)	1992-02-07	1992-02-07	半導体受光素子の製造方法

Publications (1)

Publication Number	Publication Date
DK0554846T3 true DK0554846T3 (da)	1996-08-19

Family

ID=12097009

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK93101631.5T DK0554846T3 (da)	1992-02-07	1993-02-03	Fremgangsmåde til fremstilling af lysmodtagende halvlederelementer

Country Status (7)

Country	Link
US (1)	US5316956A (da)
EP (1)	EP0554846B1 (da)
JP (1)	JP3288741B2 (da)
KR (1)	KR960009702B1 (da)
CA (1)	CA2088800C (da)
DE (1)	DE69303042T2 (da)
DK (1)	DK0554846T3 (da)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3285981B2 (ja) *	1993-01-14	2002-05-27	浜松ホトニクス株式会社	半導体受光素子
US5621556A (en) *	1994-04-28	1997-04-15	Xerox Corporation	Method of manufacturing active matrix LCD using five masks
DE69418870T2 (de) *	1994-07-13	1999-11-04	Hamamatsu Photonics K.K., Hamamatsu	Halbleiter-Fotodetektor
KR100403824B1 (ko) *	1996-09-24	2004-05-17	삼성전자주식회사	포토다이오드 디텍터 및 그 제조방법
CA2307745A1 (en) *	1999-07-15	2001-01-15	Sumitomo Electric Industries, Ltd.	Photodiode
KR100459547B1 (ko) *	2002-02-18	2004-12-04	삼성전자주식회사	포토다이오드 제조방법
JP4941625B2 (ja) *	2005-02-28	2012-05-30	住友電気工業株式会社	フォトダイオードの作製方法
US7608825B2 (en) *	2006-12-14	2009-10-27	Sumitomo Electric Industries, Ltd.	Image pickup device, vision enhancement apparatus, night-vision apparatus, navigation support apparatus, and monitoring apparatus
CN110808312B (zh) *	2019-10-23	2020-11-24	武汉敏芯半导体股份有限公司	一种提高光电探测器芯片产出量的制备工艺方法
CN115458623B (zh) *	2022-11-10	2023-03-24	芯思杰技术(深圳)股份有限公司	光电探测器芯片、距离传感器及电子设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5948963A (ja) *	1982-09-13	1984-03-21	Nec Corp	フオトトランジスタ
JPS60213067A (ja) *	1984-04-06	1985-10-25	Matsushita Electric Ind Co Ltd	半導体装置の製造方法
JPH0650723B2 (ja) *	1984-10-17	1994-06-29	日本電気株式会社	エピタキシヤル成長方法
JPS61172381A (ja) *	1984-12-22	1986-08-04	Fujitsu Ltd	ＩｎＰ系化合物半導体装置
JPH07118539B2 (ja) *	1988-02-10	1995-12-18	住友電気工業株式会社	半導体装置
JPH022691A (ja) *	1988-06-17	1990-01-08	Nec Corp	半導体受光素子
US4879250A (en) *	1988-09-29	1989-11-07	The Boeing Company	Method of making a monolithic interleaved LED/PIN photodetector array
JPH02159775A (ja) *	1988-12-14	1990-06-19	Toshiba Corp	半導体受光素子及びその製造方法
US5185272A (en) *	1990-04-16	1993-02-09	Fujitsu Limited	Method of producing semiconductor device having light receiving element with capacitance

1992
- 1992-02-07 JP JP02295492A patent/JP3288741B2/ja not_active Expired - Lifetime
1993
- 1993-01-14 KR KR93000410A patent/KR960009702B1/ko not_active Expired - Fee Related
- 1993-02-01 US US08/011,747 patent/US5316956A/en not_active Expired - Lifetime
- 1993-02-03 DE DE69303042T patent/DE69303042T2/de not_active Expired - Fee Related
- 1993-02-03 DK DK93101631.5T patent/DK0554846T3/da active
- 1993-02-03 EP EP93101631A patent/EP0554846B1/en not_active Expired - Lifetime
- 1993-02-04 CA CA002088800A patent/CA2088800C/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
US5316956A (en)	1994-05-31
CA2088800C (en)	1996-07-23
EP0554846B1 (en)	1996-06-12
KR960009702B1 (en)	1996-07-23
DE69303042T2 (de)	1996-11-28
EP0554846A1 (en)	1993-08-11
KR930018061A (ko)	1993-09-21
CA2088800A1 (en)	1993-08-08
JPH05218484A (ja)	1993-08-27
JP3288741B2 (ja)	2002-06-04
DE69303042D1 (de)	1996-07-18

Publication	Publication Date	Title
DK0475259T3 (da)	1996-01-15	Fremgangsmåde til fremstilling af halvlederelementer
DK292189A (da)	1989-12-16	Fremgangsmaade til fremstilling af boerstevarer
DE59609374D1 (de)	2002-07-25	Optoelektronisches halbleiter-bauelement
DE69104429D1 (de)	1994-11-10	Optisches Halbleiterbauelement.
DK40087A (da)	1987-07-28	Fremgangsmaade til fremstilling af en termoklaeber
DE69210942D1 (de)	1996-06-27	Halbleiterherstellung
DK0512635T3 (da)	1997-02-10	Fremgangsmåde til fremstilling af isoparaffiner
DK55191A (da)	1991-05-24	Fremgangsmaade til fremstilling af rekombinerede genprodukter
DE69208937D1 (de)	1996-04-18	Halbleiter-Herstellungseinrichtung
DK159963C (da)	1991-06-03	Fremgangsmaade til fremstilling af ammoniak
DK674288A (da)	1989-06-04	Fremgangsmaade til fremstilling af mikrokapsler
DK180791A (da)	1992-05-04	Fremgangsmaade til fremstilling af reflekterende genstand
DK170990D0 (da)	1990-07-16	Fremgangsmaade til fremstilling af celleplast
DK0584138T3 (da)	1996-02-05	Fremgangsmåde til fremstilling af dentalaspiratorer
DK162787D0 (da)	1987-03-31	Anlaeg til fremstilling af cementklinker
DK0554846T3 (da)	1996-08-19	Fremgangsmåde til fremstilling af lysmodtagende halvlederelementer
DK0509342T3 (da)	1996-07-15	Fremgangsmåde til fremstilling af kileformede strukturer
DE59108885D1 (de)	1997-12-11	Halbleitermodul
DE69125498D1 (de)	1997-05-07	Halbleiterverrichtungsherstellungsverfahren
DK40891A (da)	1991-09-09	Fremgangsmaade til fremstilling af cephalosporiner
SK894U (sk)	1995-07-11	Substrát pre rastliny
DK65883D0 (da)	1983-02-15	Fremgangsmade til fremstilling af elastase
DK103090D0 (da)	1990-04-26	Fremgangsmaade til fremstilling af thieno-triazolodiazepiner
DK468989A (da)	1991-03-23	Fremgangsmaade til fremstilling af gummibase til tyggegummi
KR920013590A (ko)	1992-07-29	반도체 소자 제조방법