DK0573645T3 - Fremgangsmåde til coating af en overflade med en modstandsdygtig belægning ved kemisk dampudfældning - Google Patents

Fremgangsmåde til coating af en overflade med en modstandsdygtig belægning ved kemisk dampudfældning

Info

Publication number: DK0573645T3
Authority: DK; Denmark
Prior art keywords: vapor deposition; coating; substrate; chemical vapor; accelerant
Prior art date: 1991-12-26

Application number

DK93902757T

Other languages

English (en)

Inventor

Jerome Lawrence Buchanan

Ryan Richard Dirkx

Original Assignee

Atochem North America Elf

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-12-26

Filing date

1992-12-23

Publication date

1998-10-19

1992-12-23 Application filed by Atochem North America Elf filed Critical Atochem North America Elf

1998-10-19 Application granted granted Critical

1998-10-19 Publication of DK0573645T3 publication Critical patent/DK0573645T3/da

Links

239000011248 coating agent Substances 0.000 title abstract 3
238000000576 coating method Methods 0.000 title abstract 3
238000005229 chemical vapour deposition Methods 0.000 title abstract 2
238000000034 method Methods 0.000 title 1
239000000463 material Substances 0.000 abstract 5
239000000758 substrate Substances 0.000 abstract 4
239000000203 mixture Substances 0.000 abstract 3
239000008246 gaseous mixture Substances 0.000 abstract 2
239000002243 precursor Substances 0.000 abstract 2
NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 abstract 1
UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 abstract 1
WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 abstract 1
YMLFYGFCXGNERH-UHFFFAOYSA-K butyltin trichloride Chemical compound CCCC[Sn](Cl)(Cl)Cl YMLFYGFCXGNERH-UHFFFAOYSA-K 0.000 abstract 1
239000006227 byproduct Substances 0.000 abstract 1
239000012159 carrier gas Substances 0.000 abstract 1
239000003153 chemical reaction reagent Substances 0.000 abstract 1
229910000423 chromium oxide Inorganic materials 0.000 abstract 1
AHXGRMIPHCAXFP-UHFFFAOYSA-L chromyl dichloride Chemical group Cl[Cr](Cl)(=O)=O AHXGRMIPHCAXFP-UHFFFAOYSA-L 0.000 abstract 1
238000000354 decomposition reaction Methods 0.000 abstract 1
229910052751 metal Inorganic materials 0.000 abstract 1
239000002184 metal Substances 0.000 abstract 1
229940043265 methyl isobutyl ketone Drugs 0.000 abstract 1
239000007800 oxidant agent Substances 0.000 abstract 1
230000001590 oxidative effect Effects 0.000 abstract 1
XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 1
229910001887 tin oxide Inorganic materials 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides

Landscapes

Chemical & Material Sciences (AREA)
Inorganic Chemistry (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Chemical Vapour Deposition (AREA)
Surface Treatment Of Glass Fibres Or Filaments (AREA)
Cylinder Crankcases Of Internal Combustion Engines (AREA)
Surface Treatment Of Glass (AREA)

DK93902757T 1991-12-26 1992-12-23 Fremgangsmåde til coating af en overflade med en modstandsdygtig belægning ved kemisk dampudfældning DK0573645T3 (da)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US81436791A	1991-12-26	1991-12-26
PCT/US1992/011213 WO1993013243A1 (en)	1991-12-26	1992-12-23	Method and means for coating a surface with a resistant facing by chemical-vapor deposition

Publications (1)

Publication Number	Publication Date
DK0573645T3 true DK0573645T3 (da)	1998-10-19

Family

ID=25214853

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK93902757T DK0573645T3 (da)	1991-12-26	1992-12-23	Fremgangsmåde til coating af en overflade med en modstandsdygtig belægning ved kemisk dampudfældning

Country Status (9)

Country	Link
EP (1)	EP0573645B1 (da)
JP (1)	JPH06505774A (da)
AT (1)	ATE164634T1 (da)
CA (1)	CA2104589A1 (da)
DE (1)	DE69224984T2 (da)
DK (1)	DK0573645T3 (da)
ES (1)	ES2114034T3 (da)
GR (1)	GR3026493T3 (da)
WO (1)	WO1993013243A1 (da)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR960015375B1 (ko) *	1994-06-08	1996-11-11	현대전자산업 주식회사	강유전체 박막 제조장치 및 그를 사용한 강유전체 박막 제조방법
DE19652634C2 (de) *	1996-09-13	2002-12-19	Euromat Ges Fuer Werkstofftech	Verfahren zum Innenbeschichten eines metallischer Bauteils, insbesondere eines Bauteils mit einem zylindrischen Hohlraum, eine Vorrichtung zu dessen Durchführung sowie die Verwendung des Verfahrens
DE19730119A1 (de) *	1997-07-14	1999-01-21	Siemens Ag	Verfahren zur Herstellung von Dünnfilmen aus oxidischer Keramik
US6613385B2 (en)	2001-04-23	2003-09-02	The United States Of America As Represented By The Secretary Of The Navy	Highly spin-polarized chromium dioxide thin films prepared by CVD using chromyl chloride precursor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3898672A (en) *	1972-01-28	1975-08-05	Ricoh Kk	Electrosensitive recording member
US4077808A (en) *	1973-08-31	1978-03-07	Kaman Sciences Corporation	Chromia-bonded refractory body devoid of vitreous and sintered bonding
DE2648373C2 (de) *	1976-10-26	1986-01-02	Robert Bosch Gmbh, 7000 Stuttgart	Halbleiter für Sensoren zur Bestimmung des Gehaltes an Sauerstoff und/oder oxydierbaren Bestandteilen in Abgasen
JPS5930709A (ja) *	1982-08-13	1984-02-18	Toa Nenryo Kogyo Kk	炭素膜及び／又は炭素粒子の製造方法
US4971843A (en) *	1983-07-29	1990-11-20	Ppg Industries, Inc.	Non-iridescent infrared-reflecting coated glass
JPH0618074B2 (ja) *	1984-10-25	1994-03-09	住友化学工業株式会社	磁気記録媒体
US4743506A (en) *	1984-12-28	1988-05-10	M&T Chemicals Inc.	Tin oxide coated article
US4668528A (en) *	1986-04-09	1987-05-26	Massachusetts Institute Of Technology	Method and apparatus for photodeposition of films on surfaces
GB8619456D0 (en) *	1986-08-08	1986-09-17	Ti Group Services Ltd	Vehicle exhaust systems
US5112693A (en) *	1988-10-03	1992-05-12	Ppg Industries, Inc.	Low reflectance, highly saturated colored coating for monolithic glazing
US5132165A (en) *	1990-06-19	1992-07-21	Commerical Decal, Inc.	Wet printing techniques

1992
- 1992-12-23 DK DK93902757T patent/DK0573645T3/da active
- 1992-12-23 AT AT93902757T patent/ATE164634T1/de not_active IP Right Cessation
- 1992-12-23 CA CA002104589A patent/CA2104589A1/en not_active Abandoned
- 1992-12-23 ES ES93902757T patent/ES2114034T3/es not_active Expired - Lifetime
- 1992-12-23 WO PCT/US1992/011213 patent/WO1993013243A1/en not_active Ceased
- 1992-12-23 DE DE69224984T patent/DE69224984T2/de not_active Expired - Fee Related
- 1992-12-23 EP EP93902757A patent/EP0573645B1/en not_active Expired - Lifetime
- 1992-12-23 JP JP5511904A patent/JPH06505774A/ja active Pending
1998
- 1998-04-02 GR GR980400558T patent/GR3026493T3/el unknown

Also Published As

Publication number	Publication date
EP0573645A1 (en)	1993-12-15
ATE164634T1 (de)	1998-04-15
WO1993013243A1 (en)	1993-07-08
DE69224984T2 (de)	1998-07-30
ES2114034T3 (es)	1998-05-16
EP0573645B1 (en)	1998-04-01
CA2104589A1 (en)	1993-06-27
DE69224984D1 (de)	1998-05-07
GR3026493T3 (en)	1998-07-31
EP0573645A4 (en)	1995-11-29
JPH06505774A (ja)	1994-06-30

Publication	Publication Date	Title
GB2141444A (en)	1984-12-19	Chemical vapor deposition of titanium nitride and like films
EP0689618A4 (en)	1998-01-21	METHOD AND DEVICE FOR COMBUSTION CVD OF FILMS AND COATINGS
DE69225800D1 (de)	1998-07-09	Verfahren zur Herstellung von DIAMANTMEMBRANEN FÜR RÖNTGENLITHOGRAPHIE
HU907561D0 (en)	1991-10-28	Process for the production of gaseous reagents for chemical vapourizing covering
ES457595A1 (es)	1978-03-16	Procedimiento para la formacion de recubrimientos metalicos o de compuesto metalico sobre una cara de un sustrato de vidrio.
TW362118B (en)	1999-06-21	Method for depositing amorphous SiNC coatings
IL129580A0 (en)	2000-02-29	Apparatus and process for controlled atmosphere chemical vapor deposition
SE8702923D0 (sv)	1987-07-21	Process for synthesis of diamond
AU598611B2 (en)	1990-06-28	Synthetic diamond by chemical vapour deposition process
ES2074969A6 (es)	1995-09-16	Metodo para depositar diamante sobre un sustrato.
MY122888A (en)	2006-05-31	Carbon doped oxide deposition
SE7906223L (sv)	1980-01-21	Sett att bilda en tennoxidbeleggning pa en glassubstratyta
GR3026493T3 (en)	1998-07-31	Method and means for coating a surface with a resistant facing by chemical-vapor deposition
TR23336A (tr)	1989-12-01	Alt tabaka kaplayici cihaz
JPH0377209A (ja)	1991-04-02	透明導電膜のエッチング方法
ATE1753T1 (de)	1982-11-15	Verfahren zur herstellung von haftfaehigen schichten auf polyolefinen.
GB2155044A (en)	1985-09-18	Method for the deposition of a coating
EP0095384A3 (en)	1984-12-27	Vacuum deposition apparatus
JPS6475678A (en)	1989-03-22	Hard carbon film containing nitrogen
JPS57123969A (en)	1982-08-02	Formation of zinc oxide film by vapor phase method using plasma
GB967565A (en)	1964-08-26	Alloys containing pyrolytic graphite
JPS55164072A (en)	1980-12-20	Coating
JPS558485A (en)	1980-01-22	Production of coated super hard metal member
KR910016962A (ko)	1991-11-05	TiN의 플라즈마 화학증착방법
JPS573706A (en)	1982-01-09	Vapor-phase deposition