DK3526542T3 - Terahertz-måleanordning til bestemmelse af en lagtykkelse hos et testobjekt og tilsvarende målemetode - Google Patents
Terahertz-måleanordning til bestemmelse af en lagtykkelse hos et testobjekt og tilsvarende målemetode Download PDFInfo
- Publication number
- DK3526542T3 DK3526542T3 DK17791562.6T DK17791562T DK3526542T3 DK 3526542 T3 DK3526542 T3 DK 3526542T3 DK 17791562 T DK17791562 T DK 17791562T DK 3526542 T3 DK3526542 T3 DK 3526542T3
- Authority
- DK
- Denmark
- Prior art keywords
- determining
- measuring device
- layer thickness
- measurement method
- test object
- Prior art date
Links
- 238000000691 measurement method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S13/00—Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
- G01S13/88—Radar or analogous systems specially adapted for specific applications
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Toxicology (AREA)
- Textile Engineering (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016119728.9A DE102016119728A1 (de) | 2016-10-17 | 2016-10-17 | Terahertz-Messgerät |
| PCT/DE2017/100891 WO2018072789A1 (de) | 2016-10-17 | 2017-10-17 | Terahertz-messgerät |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3526542T3 true DK3526542T3 (da) | 2021-12-06 |
Family
ID=60191065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK17791562.6T DK3526542T3 (da) | 2016-10-17 | 2017-10-17 | Terahertz-måleanordning til bestemmelse af en lagtykkelse hos et testobjekt og tilsvarende målemetode |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10753727B2 (da) |
| EP (1) | EP3526542B1 (da) |
| CN (1) | CN109964096B (da) |
| DE (1) | DE102016119728A1 (da) |
| DK (1) | DK3526542T3 (da) |
| ES (1) | ES2901624T3 (da) |
| WO (1) | WO2018072789A1 (da) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3309508B1 (en) * | 2016-05-23 | 2019-08-28 | Nippon Steel Corporation | Shape measurement device and shape measurement method |
| DE102018122965B4 (de) * | 2018-09-19 | 2021-10-14 | INOEX GmbH Innovationen und Ausrüstungen für die Extrusionstechnik | THz-Messgerät und THz-Messverfahren zur Ermittlung von Fehlstellen in Messobjekten |
| WO2020072297A1 (en) | 2018-10-03 | 2020-04-09 | Arizona Board Of Regents On Behalf Of Arizona State University | Direct rf signal processing for heart-rate monitoring using uwb impulse radar |
| CN109357598A (zh) * | 2018-10-22 | 2019-02-19 | 江西北斗变电科技有限公司 | 一种新型便携式硅钢片毛刺形状检测识别装置及方法 |
| US11783483B2 (en) | 2019-03-19 | 2023-10-10 | Arizona Board Of Regents On Behalf Of Arizona State University | Detecting abnormalities in vital signs of subjects of videos |
| US11771380B2 (en) | 2019-03-19 | 2023-10-03 | Arizona Board Of Regents On Behalf Of Arizona State University | Vital sign monitoring system using an optical sensor |
| US12274527B2 (en) | 2019-03-20 | 2025-04-15 | Arizona Board Of Regents On Behalf Of Arizona State University | Radar cardiography: a precise cardiac data reconstruction method |
| DE102019109339B4 (de) * | 2019-04-09 | 2021-04-08 | CiTEX Holding GmbH | Verfahren zur Kalibrierung einer THz-Messvorrichtung, THz-Messverfahren sowie entsprechende THz-Messvorrichtung |
| JP7498023B2 (ja) * | 2020-05-18 | 2024-06-11 | 株式会社Subaru | 孔検査装置の送り出し装置 |
| CN111665212B (zh) * | 2020-06-12 | 2023-12-15 | 常州海石智能装备有限公司 | 一种太赫兹波检测装置 |
| US11709139B2 (en) * | 2020-07-24 | 2023-07-25 | New Jersey Institute Of Technology | Systems and methods of detecting pipe defects |
| DE102021109748A1 (de) * | 2021-04-19 | 2022-10-20 | Isud Solutions Gmbh | Optische Analysevorrichtung zur Bestimmung einer Kenngröße eines Mediums, Gehäuse und Gesamtsystem |
| CN113390370B (zh) * | 2021-05-17 | 2023-01-13 | 珠海格力电器股份有限公司 | 一种对象检测方法、装置、电子设备及存储介质 |
| CN113654471A (zh) * | 2021-08-04 | 2021-11-16 | 河北光兴半导体技术有限公司 | 玻璃管厚度测量方法及装置 |
| DE102021134228A1 (de) * | 2021-12-22 | 2023-06-22 | Universität Stuttgart, Körperschaft Des Öffentlichen Rechts | Vorrichtung zum Bestimmen thermischer Energie sowie ein Verfahren zum Bestimmen der thermischen Energie mit der Vorrichtung |
| CN116337806A (zh) * | 2021-12-23 | 2023-06-27 | 中国石油天然气集团有限公司 | 一种非金属管道本体缺陷的太赫兹无损检测方法 |
| DE102022100650B3 (de) | 2022-01-07 | 2022-12-15 | CiTEX Holding GmbH | Verfahren zur Kalibrierung einer THz-Messvorrichtung und Extrusions- und Messsystem |
| CN115077340B (zh) * | 2022-06-24 | 2025-08-01 | 英纳法汽车天窗系统(上海)有限公司 | 汽车天窗框架蘑菇搭扣检测装置及其工作方法 |
| DE102023108276A1 (de) * | 2023-03-31 | 2024-10-02 | CiTEX Holding GmbH | THz- Messverfahren und THz- Messvorrichtung zur Vermessung eines Stranges |
| EP4462072B8 (de) | 2023-05-11 | 2025-08-20 | Sikora Ag | Messvorrichtung und verfahren zum messen eines geometrieparameters eines gegenstands |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4364663A (en) * | 1980-11-17 | 1982-12-21 | Caterpillar Tractor Co. | Surface roughness gauge and method |
| US6873931B1 (en) * | 2000-10-10 | 2005-03-29 | Csi Technology, Inc. | Accelerometer based angular position sensor |
| GB2405263B (en) * | 2003-08-22 | 2006-07-12 | Teraview Ltd | Sample investigation system with sliding focussing elements |
| GB2405466B (en) * | 2003-08-27 | 2006-01-25 | Teraview Ltd | Method and apparatus for investigating a non-planner sample |
| CN101187650B (zh) * | 2006-01-12 | 2010-07-07 | 大连理工大学 | 一种离心球铁管球化率和壁厚的超声无损检测方法 |
| JP5173850B2 (ja) * | 2009-01-05 | 2013-04-03 | キヤノン株式会社 | 検査装置 |
| US8591267B2 (en) * | 2010-06-23 | 2013-11-26 | Yamaichi Electronics Co., Ltd. | Contact head, probe pin including the same, and electrical connector using the probe pin |
| JP5885414B2 (ja) * | 2010-08-05 | 2016-03-15 | キヤノン株式会社 | 光周波数変換素子 |
| US20120273681A1 (en) * | 2011-04-26 | 2012-11-01 | Zomega Terahertz Corporation | Terahertz spectrometer |
| JP6117506B2 (ja) * | 2012-10-09 | 2017-04-19 | 国立大学法人 東京大学 | テラヘルツ波測定装置及び方法 |
| CN102895742B (zh) * | 2012-10-12 | 2015-10-14 | 中国科学院深圳先进技术研究院 | 太赫兹治疗仪及其探头 |
| KR102143540B1 (ko) * | 2012-10-19 | 2020-08-11 | 피코메트릭스 엘엘씨 | 반사 테라헤르츠 방사선을 사용하는 물질 특성 계산 시스템 |
| JP6096725B2 (ja) * | 2014-09-09 | 2017-03-15 | アイシン精機株式会社 | 膜厚測定装置及び膜厚測定方法 |
| CN204287040U (zh) * | 2014-11-10 | 2015-04-22 | 中国石油大学(北京) | 测量海平面漏油厚度的测量仪 |
| US9733193B2 (en) | 2015-03-12 | 2017-08-15 | Proton Products International Limited | Measurement of industrial products manufactured by extrusion techniques |
| CN104864817B (zh) * | 2015-05-06 | 2017-12-12 | 中国矿业大学 | 基于太赫兹时域光谱技术的塑料薄膜厚度检测装置及方法 |
| CN205120028U (zh) * | 2015-09-28 | 2016-03-30 | 广州市果欧电子科技有限公司 | 一种涂层测厚仪 |
| CN105588516B (zh) * | 2016-02-23 | 2018-04-03 | 天津大学 | 一种基于太赫兹脉冲光谱的漆膜厚度测量方法 |
-
2016
- 2016-10-17 DE DE102016119728.9A patent/DE102016119728A1/de not_active Withdrawn
-
2017
- 2017-10-17 CN CN201780064195.8A patent/CN109964096B/zh active Active
- 2017-10-17 EP EP17791562.6A patent/EP3526542B1/de active Active
- 2017-10-17 US US16/341,485 patent/US10753727B2/en active Active
- 2017-10-17 ES ES17791562T patent/ES2901624T3/es active Active
- 2017-10-17 DK DK17791562.6T patent/DK3526542T3/da active
- 2017-10-17 WO PCT/DE2017/100891 patent/WO2018072789A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP3526542A1 (de) | 2019-08-21 |
| DE102016119728A1 (de) | 2018-04-19 |
| CN109964096B (zh) | 2022-07-08 |
| US10753727B2 (en) | 2020-08-25 |
| ES2901624T3 (es) | 2022-03-23 |
| EP3526542B1 (de) | 2021-09-22 |
| CN109964096A (zh) | 2019-07-02 |
| US20190301853A1 (en) | 2019-10-03 |
| WO2018072789A9 (de) | 2018-06-14 |
| WO2018072789A1 (de) | 2018-04-26 |
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