EP0144524A3 - Getter-Pumpe für Hochvakuum- und Gasentladungsanlagen - Google Patents

Getter-Pumpe für Hochvakuum- und Gasentladungsanlagen Download PDF

Info

Publication number
EP0144524A3
EP0144524A3 EP84109514A EP84109514A EP0144524A3 EP 0144524 A3 EP0144524 A3 EP 0144524A3 EP 84109514 A EP84109514 A EP 84109514A EP 84109514 A EP84109514 A EP 84109514A EP 0144524 A3 EP0144524 A3 EP 0144524A3
Authority
EP
European Patent Office
Prior art keywords
gas discharge
getter
getter pump
groups
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109514A
Other languages
English (en)
French (fr)
Other versions
EP0144524A2 (de
Inventor
Hinrich Dr. Rer. Nat. Dipl.-Phys. Heynisch
Erwin Dr. rer. nat. Hübner
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0144524A2 publication Critical patent/EP0144524A2/de
Publication of EP0144524A3 publication Critical patent/EP0144524A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung bezieht sich auf eine Getter-Pumpe für Hochvakuum- und Gasentladungsanlagen mit in einem Pumpgefäß (3) angeordneten Getterkörpern (1) aus nichtver­ dampfendem Gettermaterial und zugehörigen Heizelmenten (2). Mit dieser Getter- Pumpe soll die Herstellung eines Hochvakuums im Druckbereich ab 10⁻³ mbar und besser durch nichtverdampfende Getter ermöglicht werden. Erfin­ dungsgemäß ist hierzu vorgesehen, daß die Heizelemente (2) parallel geschaltet sind oder mehrere Heizelemente (2) gruppenweise in Reihe geschaltet und die Gruppen entwe­ der parallel geschaltet oder einzeln herausgeführt sind.
Die erfindungsgemäße Getter-Pumpe ist in Hochvaku­ um- und Gasentladungsanlagen verwendbar.
EP84109514A 1983-09-09 1984-08-09 Getter-Pumpe für Hochvakuum- und Gasentladungsanlagen Withdrawn EP0144524A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19833332608 DE3332608A1 (de) 1983-09-09 1983-09-09 Getter-pumpe fuer hochvakuum- und gasentladungsanlagen
DE3332608 1983-09-09

Publications (2)

Publication Number Publication Date
EP0144524A2 EP0144524A2 (de) 1985-06-19
EP0144524A3 true EP0144524A3 (de) 1986-10-08

Family

ID=6208668

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84109514A Withdrawn EP0144524A3 (de) 1983-09-09 1984-08-09 Getter-Pumpe für Hochvakuum- und Gasentladungsanlagen

Country Status (2)

Country Link
EP (1) EP0144524A3 (de)
DE (1) DE3332608A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1205085B (it) * 1987-06-24 1989-03-10 Getters Spa Superconduttore elettrico isolato a vuoto con l'impiego di un dispositivo getter
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2988265A (en) * 1958-03-21 1961-06-13 Nat Res Corp Vacuum device
FR2327817A1 (fr) * 1972-08-10 1977-05-13 Getters Spa Dispositif et composition fixateurs de gaz
GB1586676A (en) * 1976-11-03 1981-03-25 Getters Spa Modular getter pumps

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2988265A (en) * 1958-03-21 1961-06-13 Nat Res Corp Vacuum device
FR2327817A1 (fr) * 1972-08-10 1977-05-13 Getters Spa Dispositif et composition fixateurs de gaz
GB1586676A (en) * 1976-11-03 1981-03-25 Getters Spa Modular getter pumps

Also Published As

Publication number Publication date
EP0144524A2 (de) 1985-06-19
DE3332608A1 (de) 1985-03-28

Similar Documents

Publication Publication Date Title
EP0144522A3 (de) Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
US4005323A (en) Microchannel plates in glass mountings
GB1014520A (en) Electrical capacitor manufacture
DE2044277C3 (de) Verfahren zur Herstellung eines aus zwei Keramikröhren bestehenden evakuierten Gehäuses
DE1282411B (de) Vorrichtung zur kontinuierlichen Herstellung und Bearbeitung von Bauelementen der Elektronik unter Vakuum, insbesondere zum Aufdampfen von Schichten
DE4236538A1 (de) Gekapselte Funkenstrecke
JPS52147800A (en) Semiconductor ceramic capacitor composite and its method of manufacturing
DE2543079C3 (de) Verfahren zum Herstellen von Trockenelektrolytkondensatoren
DE1089482B (de) Verfahren zur Herstellung eines gasgefuellten pumpstengellosen Entladungsgefaesses
DE2535173A1 (de) Verfahren zum herstellen einer feuchtedichten umhuellung fuer elektrische bauelemente oder bauelementekombinationen
DE19540900A1 (de) Verfahren zum Verbinden zweier Körper aus Siliciumcarbid
Storer Hurwitz on Hadamard designs
GB838136A (en) Improvements in or relating to methods of manufacturing thermal regenerators
EP1063873A2 (de) Verfahren zum Herstellen von Substraten mit strukturierten Metallisierungen sowie Halte-und Fixierelement zur Verwendung bei dem Verfahren
DE2010480A1 (de) Klystron hoher Leistung
JPS51150984A (en) Dielectric isolation method
DE1544313C3 (de) Verfahren zur Eindiffusion von Fremdatomen in einen Halbleiterkörper aus Galliumarsenid
EP0144524A2 (de) Getter-Pumpe für Hochvakuum- und Gasentladungsanlagen
DE1446197A1 (de) Blende zur Begrenzung von unter vermindertem Druck zu bedampfenden Flaechen
FR2019325A1 (en) Manufacturing nuclear fuel from sintered uranium - dioxide
Lob New Technology for Manufacturing Silicon High Voltage Diodes Neue Technologie der Herstellung von Hochspannungsdioden Aus Silizium
DE1583354C (de) Vorrichtung zum Abschrecken von Werk stucken in Wasser oder wäßrigen Losungen
JPS5596633A (en) Method of forming electrode of semiconductor device
DE7104626U (de) Überspannungsableiter mit einem durch eine Membran verschlossenen Gehäuse
JPS542670A (en) Plasma etching method

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Designated state(s): CH DE FR IT LI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): CH DE FR IT LI

17P Request for examination filed

Effective date: 19870326

17Q First examination report despatched

Effective date: 19870902

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Withdrawal date: 19880613

RIN1 Information on inventor provided before grant (corrected)

Inventor name: HEYNISCH, HINRICH, DR. RER. NAT. DIPL.-PHYS.

Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD.

Inventor name: HUEBNER, ERWIN, DR. RER. NAT.