EP0857876A2 - Procédé et appareil de régulation de la capacité d'aspiration d'une pmpe à vide - Google Patents

Procédé et appareil de régulation de la capacité d'aspiration d'une pmpe à vide Download PDF

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Publication number
EP0857876A2
EP0857876A2 EP98100358A EP98100358A EP0857876A2 EP 0857876 A2 EP0857876 A2 EP 0857876A2 EP 98100358 A EP98100358 A EP 98100358A EP 98100358 A EP98100358 A EP 98100358A EP 0857876 A2 EP0857876 A2 EP 0857876A2
Authority
EP
European Patent Office
Prior art keywords
vacuum
connection
high vacuum
vacuum connection
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98100358A
Other languages
German (de)
English (en)
Other versions
EP0857876A3 (fr
EP0857876B1 (fr
Inventor
Armin Conrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7819318&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0857876(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0857876A2 publication Critical patent/EP0857876A2/fr
Publication of EP0857876A3 publication Critical patent/EP0857876A3/fr
Application granted granted Critical
Publication of EP0857876B1 publication Critical patent/EP0857876B1/fr
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/009—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by bleeding, by passing or recycling fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/42—Conditions at the inlet of a pump or machine

Definitions

  • the invention relates to a method and a device for regulating the Pumping speed of vacuum pumps according to the preamble of the first claim.
  • control valves are used, which between Vacuum pump and vacuum chamber are attached. Because of the required high conductance have a large diameter. This will a complex construction causes high costs and an increase the spatial expansion of the system. They also become special Requirements placed on these valves because they are used in the high vacuum range will.
  • the object of the invention is to develop a method and an apparatus for To carry out the procedure to construct, with which the pumping speed of vacuum pumps can be set reproducibly and the individual vacuum process can be adjusted.
  • the disadvantages of the conventional methods are to be avoided will.
  • a complex construction should be avoided and the danger the condensation and corrosion caused by process gases can be reduced.
  • Claims 2, 3 and 5-7 provide further design options of the invention.
  • the process in the vacuum chamber can be influenced so that it can run in an optimal manner - as intended. If e.g. through the constant Suction rate of the vacuum pump or the vacuum system too much gas is pumped out, so that the process is no longer in the intended manner can run off, then a part of the pumped out via the connecting line Gases are fed back to the intake flange. As a result, increases the suction pressure and thus becomes according to the characteristic properties the vacuum pump the pumping speed for the process gas to be pumped out degraded.
  • the built-in control valve in the connecting line allows control this process precisely.
  • Turbomolecular pumps are for use with Vacuum processes are particularly suitable as high vacuum pumps. With them lets the method according to the invention can be carried out advantageously.
  • the supply of part of the pumped gas to the high vacuum side has also a positive influence on the composition of the process gas: Since the conductance of the connecting line and control valve for gases with low Molecular weight is higher than for high molecular weight gases, the composition the gases on the intake flange and thus also in the vacuum chamber changed in favor of lighter gases. At the end of the processes in vacuum chambers low molecular weight gases are predominantly involved. Heaviness Gases are rather the waste products Process also the more effective use of the gases required for the process clearly increased.
  • FIG 1 shows a schematic representation of a vacuum pump 1, which in this example consists of three stages 2a, 2b and 2c.
  • a vacuum pump 1 which in this example consists of three stages 2a, 2b and 2c.
  • Backing pump 6 is provided, which to the backing port 5 of the last Stage 2c is appropriate.
  • the vacuum chamber 3 At the high vacuum connection 4 of the first stage 2a is the vacuum chamber 3 connected. From any point 7 of the vacuum pump 1 one leads between the high vacuum connection 4 and the fore vacuum connection 5 Connection line 8 to the high vacuum connection 4.
  • a control valve 9 is attached.
  • the vacuum pump 1 with the three stages 2a, 2b and 2c also by a vacuum system 1 consisting of three different pumps 2a, 2b and 2c replaced will.
  • a vacuum system consisting of e.g. a pump with two stages 2a and 2b and from a pump 2c corresponds to the schematic structure in FIG Illustration.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
EP98100358A 1997-02-05 1998-01-12 Procédé et appareil de régulation de la capacité d'aspiration d'une pompe à vide Revoked EP0857876B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19704234 1997-02-05
DE19704234A DE19704234B4 (de) 1997-02-05 1997-02-05 Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen

Publications (3)

Publication Number Publication Date
EP0857876A2 true EP0857876A2 (fr) 1998-08-12
EP0857876A3 EP0857876A3 (fr) 1999-07-07
EP0857876B1 EP0857876B1 (fr) 2003-03-19

Family

ID=7819318

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98100358A Revoked EP0857876B1 (fr) 1997-02-05 1998-01-12 Procédé et appareil de régulation de la capacité d'aspiration d'une pompe à vide

Country Status (5)

Country Link
US (1) US6030181A (fr)
EP (1) EP0857876B1 (fr)
JP (1) JPH10220373A (fr)
AT (1) ATE235004T1 (fr)
DE (2) DE19704234B4 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0898083B1 (fr) * 1997-08-15 2003-12-17 The BOC Group plc Système de pompe à vide

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE10046902B4 (de) * 2000-09-21 2006-04-27 Nash_Elmo Industries Gmbh Pumpenanlage und Verfahren zum Pumpen eines Gases
JP2008008302A (ja) * 2001-09-06 2008-01-17 Ulvac Japan Ltd 多段式容積移送型ドライ真空ポンプの省エネ方法
DE10159835B4 (de) * 2001-12-06 2012-02-23 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE10302764A1 (de) * 2003-01-24 2004-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE10321771C5 (de) * 2003-05-15 2017-01-19 Continental Teves Ag & Co. Ohg Verfahren zur Leistungsbegrenzung eines mehrstufigen Kompressor und Kompressor zur Durchführung des Verfahrens
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
US7886692B2 (en) * 2004-07-13 2011-02-15 Delaval Holding Ab Controllable vacuum source
DE102004059486A1 (de) * 2004-12-10 2006-06-22 Leybold Vacuum Gmbh Vakuum-Anlage
CN100491721C (zh) * 2005-06-27 2009-05-27 建国科技大学 多级式抽真空装置及其抽真空方法
DE602005007593D1 (de) * 2005-06-30 2008-07-31 Varian Spa Vakuumpumpe
US8573465B2 (en) 2008-02-14 2013-11-05 Ethicon Endo-Surgery, Inc. Robotically-controlled surgical end effector system with rotary actuated closure systems
US9241714B2 (en) 2011-04-29 2016-01-26 Ethicon Endo-Surgery, Inc. Tissue thickness compensator and method for making the same
US9301753B2 (en) 2010-09-30 2016-04-05 Ethicon Endo-Surgery, Llc Expandable tissue thickness compensator
GB2499217A (en) * 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve
DE202012012359U1 (de) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumpstand zum Pumpen leichter Gase
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
US20150098839A1 (en) * 2013-10-08 2015-04-09 Ingersoll-Rand Company Pump Systems and Methods
JP6935216B2 (ja) * 2017-03-31 2021-09-15 株式会社荏原製作所 ルーツ型真空ポンプ
CN119467389A (zh) * 2024-10-30 2025-02-18 中国船舶集团有限公司第七〇四研究所 船用真空泵站性能监测与故障诊断平台

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT204163B (de) 1958-02-19 1959-07-10 Enfo Grundlagen Forschungs Ag Verfahren und Einrichtung zur stufenlosen Regelung der Liefermenge von mehrstufigen Verdichtern
EP0344345A1 (fr) 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Système à pompe pour un appareil de détection de fuite
DE69000990T2 (de) 1989-06-05 1993-06-09 Cit Alcatel Zweistufige trockenprimaerpumpe.
DE4410903A1 (de) 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD230614A3 (de) * 1983-06-22 1985-12-04 Alfred Voelzer Verfahren zur inbetriebnahme eines mehrstufigen kolbenverdichters ohne waermeuebertrager nach dem letzten verdichtungsabschnitt
DD236967B1 (de) * 1985-05-06 1989-03-08 Ardenne Forschungsinst Verfahren zum zyklischen evakuieren einer vakuumkammer
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT204163B (de) 1958-02-19 1959-07-10 Enfo Grundlagen Forschungs Ag Verfahren und Einrichtung zur stufenlosen Regelung der Liefermenge von mehrstufigen Verdichtern
EP0344345A1 (fr) 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Système à pompe pour un appareil de détection de fuite
DE69000990T2 (de) 1989-06-05 1993-06-09 Cit Alcatel Zweistufige trockenprimaerpumpe.
DE4410903A1 (de) 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0898083B1 (fr) * 1997-08-15 2003-12-17 The BOC Group plc Système de pompe à vide

Also Published As

Publication number Publication date
US6030181A (en) 2000-02-29
DE19704234B4 (de) 2006-05-11
EP0857876A3 (fr) 1999-07-07
JPH10220373A (ja) 1998-08-18
EP0857876B1 (fr) 2003-03-19
DE19704234A1 (de) 1998-08-06
ATE235004T1 (de) 2003-04-15
DE59807507D1 (de) 2003-04-24

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