EP1065385A2 - Procédé d' operation un dispositif à vide à compartiments multiples - Google Patents

Procédé d' operation un dispositif à vide à compartiments multiples Download PDF

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Publication number
EP1065385A2
EP1065385A2 EP00112484A EP00112484A EP1065385A2 EP 1065385 A2 EP1065385 A2 EP 1065385A2 EP 00112484 A EP00112484 A EP 00112484A EP 00112484 A EP00112484 A EP 00112484A EP 1065385 A2 EP1065385 A2 EP 1065385A2
Authority
EP
European Patent Office
Prior art keywords
vacuum
pump
chamber
valve
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00112484A
Other languages
German (de)
English (en)
Other versions
EP1065385A3 (fr
EP1065385B1 (fr
Inventor
Karl Abbel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1065385A2 publication Critical patent/EP1065385A2/fr
Publication of EP1065385A3 publication Critical patent/EP1065385A3/fr
Application granted granted Critical
Publication of EP1065385B1 publication Critical patent/EP1065385B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86131—Plural

Definitions

  • the invention relates to a method for operating a multi-chamber vacuum system according to the preamble of the first claim.
  • the invention has set itself the goal of the effort for such a multi-chamber vacuum system reduce to manufacturing costs, operating costs and space requirements to reduce.
  • Turbomolecular pumps have been on the market for some time, which are characterized by additional Pump stages, for example molecular pump stages of the Holweck type, can discharge against higher fore-vacuum pressure on the fore-vacuum side. If such a pump is disconnected from the backing pump for some time, it produces yet so much pressure ratio and pumping speed that that on the high vacuum side ongoing process is not disturbed. This opens up the possibility that atmospheric vacuum pump, which is the backing vacuum for the Turbomolecular pump generated at intervals to evacuate another vacuum chamber to use.
  • this pump according to the invention alternates with valves with the turbomolecular pump and the second vacuum chamber is connected and the two to be pumped out Spaces by opening and closing the valves constantly are separated from each other, a second vacuum pump can be saved. This reduces the acquisition costs and the operating costs of a vacuum system and reduces the space requirement.
  • the invention can be used particularly effectively where a second vacuum chamber as a lock chamber for loading and unloading the first vacuum chamber is trained.
  • 1 denotes a first vacuum chamber, which with a High vacuum pump 3 is connected. Their pre-vacuum is determined by an over Valve 5 against atmosphere ejecting vacuum pump 4 generated.
  • a second vacuum chamber 2 is via a valve 6 with the atmosphere-emitting pump 4 connected.
  • the second vacuum chamber 2 can, for example, in the event that it is used as a lock chamber, via a valve 7 with the first vacuum chamber get connected.
  • the atmosphere-emitting pump 4 can be used both to generate the forevacuum for the high vacuum pump 3 as well as for generating a vacuum in the second vacuum chamber 2 can be used.
  • the procedure for evacuation can proceed in the following steps:
  • the first vacuum chamber 1 is opened High vacuum pump 3 and the vacuum pump 4 evacuated
  • the second vacuum chamber 2 by a second valve 6 from the vacuum pump 4 and from the high vacuum pump 3 is separated. Then the first valve 5 is closed and then the second valve 6 is opened and thus the second vacuum chamber 2 evacuated by the vacuum pump 4. Then valve 6 is closed again and then the valve 5 for further evacuation of the vacuum chamber 1 the high vacuum pump 3 opened.
  • the pumping cycle can of course also be started be that first with the first valve 5 closed and the second valve open 6 the second vacuum chamber 2 is evacuated, or that initially both vacuum chambers be pumped out at the same time.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Vacuum Packaging (AREA)
EP00112484A 1999-06-28 2000-06-13 Procédé d' operation un dispositif à vide à compartiments multiples Expired - Lifetime EP1065385B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19929519A DE19929519A1 (de) 1999-06-28 1999-06-28 Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
DE19929519 1999-06-28

Publications (3)

Publication Number Publication Date
EP1065385A2 true EP1065385A2 (fr) 2001-01-03
EP1065385A3 EP1065385A3 (fr) 2001-04-11
EP1065385B1 EP1065385B1 (fr) 2003-07-30

Family

ID=7912784

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00112484A Expired - Lifetime EP1065385B1 (fr) 1999-06-28 2000-06-13 Procédé d' operation un dispositif à vide à compartiments multiples

Country Status (5)

Country Link
US (1) US6446651B1 (fr)
EP (1) EP1065385B1 (fr)
JP (1) JP2001020860A (fr)
AT (1) ATE246317T1 (fr)
DE (2) DE19929519A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102459914A (zh) * 2009-06-26 2012-05-16 阿迪森真空产品公司 用于预测真空泵的转子旋转时的故障的方法及相关的抽吸装置
WO2018108479A1 (fr) * 2016-12-15 2018-06-21 Leybold Gmbh Système de pompe à vide et son procédé de fonctionnement

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002542396A (ja) * 1999-04-16 2002-12-10 ユナキス・バルツェルス・アクチェンゲゼルシャフト 加工物を真空処理する方法と真空処理装置
DE10048210B4 (de) * 2000-09-28 2007-02-15 Singulus Technologies Ag Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
DE10150015A1 (de) 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0212757D0 (en) * 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
WO2007149652A2 (fr) * 2006-05-11 2007-12-27 Cp Packaging, Inc. Système et procédé d'aspiration de chambre à vide
US20090242046A1 (en) * 2008-03-31 2009-10-01 Benjamin Riordon Valve module
EP3502472B1 (fr) * 2009-12-24 2020-09-09 Sumitomo Seika Chemicals Co., Ltd. Dispositif de suppression de vibrations des gaz d'échappement dans un appareil à double pompe à vide
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US9506478B2 (en) * 2012-01-13 2016-11-29 Edwards Limited Vacuum system
DE202012002684U1 (de) * 2012-03-15 2013-06-17 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer
EP3491243A1 (fr) * 2016-07-12 2019-06-05 Dr.-ing. K. Busch GmbH Système d'évacuation
DE102017004066A1 (de) 2017-04-23 2018-10-25 Alfred-Wegener-lnstitut, Helmholtz-Zentrum für Polar- und Meeresforschung Vakuumsystem zur Erzeugung von zumindest einem Hochvakuum in einem Rezipienten
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
JP7650633B2 (ja) 2020-10-06 2025-03-25 エドワーズ株式会社 真空排気システム

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US3537474A (en) * 1968-02-19 1970-11-03 Varian Associates Push button vacuum control valve and vacuum system using same
US3986521A (en) * 1974-03-21 1976-10-19 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Evacuation device
JPH0545827Y2 (fr) * 1988-06-24 1993-11-26
JPH04326943A (ja) * 1991-04-25 1992-11-16 Hitachi Ltd 真空排気システム及び排気方法
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5433238A (en) * 1992-12-18 1995-07-18 Vlsi Technology, Inc. Pumping system for evacuating reactor chambers
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
JP3361162B2 (ja) * 1993-10-27 2003-01-07 清原 まさ子 タンク室付ブロックバルブ
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
JPH08321448A (ja) * 1995-05-25 1996-12-03 Tadahiro Omi 真空排気装置、半導体製造装置及び真空処理方法
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
JPH10132711A (ja) * 1996-10-25 1998-05-22 Shinku Kagaku Kenkyusho 試料表面分析用真空排気装置
DE19645104B4 (de) * 1996-10-31 2007-12-20 Pfeiffer Vacuum Gmbh Verfahren zur Durchführung eines Prozesses in einem mit Unterdruck beaufschlagten Prozessraum
KR100252213B1 (ko) * 1997-04-22 2000-05-01 윤종용 반도체소자제조장치및그제조방법
JP2942239B2 (ja) * 1997-05-23 1999-08-30 キヤノン株式会社 排気方法及び排気装置、それを用いたプラズマ処理方法及びプラズマ処理装置
US6113698A (en) * 1997-07-10 2000-09-05 Applied Materials, Inc. Degassing method and apparatus
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102459914A (zh) * 2009-06-26 2012-05-16 阿迪森真空产品公司 用于预测真空泵的转子旋转时的故障的方法及相关的抽吸装置
WO2018108479A1 (fr) * 2016-12-15 2018-06-21 Leybold Gmbh Système de pompe à vide et son procédé de fonctionnement
US11286934B2 (en) 2016-12-15 2022-03-29 Leybold Gmbh Vacuum pump system and method for operating a vacuum pump system
US12140146B2 (en) 2016-12-15 2024-11-12 Leybold Gmbh Vacuum pump system and method for operating a vacuum pump system

Also Published As

Publication number Publication date
US6446651B1 (en) 2002-09-10
EP1065385A3 (fr) 2001-04-11
DE19929519A1 (de) 2001-01-04
EP1065385B1 (fr) 2003-07-30
ATE246317T1 (de) 2003-08-15
JP2001020860A (ja) 2001-01-23
DE50003072D1 (de) 2003-09-04

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