EP1710440A2 - Vakuumpump mit einer Energiebeschränkung - Google Patents

Vakuumpump mit einer Energiebeschränkung Download PDF

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Publication number
EP1710440A2
EP1710440A2 EP06300288A EP06300288A EP1710440A2 EP 1710440 A2 EP1710440 A2 EP 1710440A2 EP 06300288 A EP06300288 A EP 06300288A EP 06300288 A EP06300288 A EP 06300288A EP 1710440 A2 EP1710440 A2 EP 1710440A2
Authority
EP
European Patent Office
Prior art keywords
stages
configuration
parallel
series
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06300288A
Other languages
English (en)
French (fr)
Other versions
EP1710440A3 (de
Inventor
Jean-Luc Rival
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Alcatel Lucent SAS
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA, Alcatel Lucent SAS, Nokia Inc filed Critical Alcatel SA
Publication of EP1710440A2 publication Critical patent/EP1710440A2/de
Publication of EP1710440A3 publication Critical patent/EP1710440A3/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/10—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by changing the positions of the inlet or outlet openings with respect to the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/05—Speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/58—Valve parameters

Definitions

  • the present invention relates to vacuum pumping devices capable of establishing and maintaining an appropriate vacuum in an enclosure.
  • substrates are fed into a load lock chamber connected to a vacuum pumping device which lowers the internal pressure of the charging chamber to a satisfactory value and then transfers the semiconductor substrates into a process chamber in which there is a vacuum suitable for manufacture.
  • the loading chambers used for the production of flat screens have large volumes, generally of the order of 500 to 1000 liters, and sometimes exceeding 5000 liters, which must therefore be pumped as quickly as possible. .
  • the problem proposed by the invention is to rapidly pump a large volume chamber, to quickly reach the appropriate vacuum inside the chamber, reducing the size of the pumping device to empty and limiting the energy consumption used to reach the satisfactory vacuum.
  • a given vacuum pumping device generally has a flow rate characteristic as a function of pressure which has a maximum within a given pressure range, and the maximum flow pressure range depends on the architecture of the vacuum pumping device.
  • the invention takes advantage of this observation to design a variable geometry vacuum pumping device, in which the geometry is varied one or more times in order to optimize the flow rate of the pumping device at each stage of the pumping, that is to say say in the different successive pressure ranges in the pumped enclosure.
  • the invention thus achieves the desired purpose by using a multi-stage dry mechanical pump and a principle of intelligent connection of the stages in series / parallel mode, possibly combined with a control of the speed of the pump.
  • the savings in volume of the pumping device and energy consumed can reach about 40%.
  • the invention proposes a vacuum pumping device, for the descent pressure of an enclosure, comprising a motor driving a multi-stage dry mechanical vacuum pump, each stage having a suction and a discharge, and comprising pipes for connecting the stages to each other, in the gas suction circuit of the enclosure.
  • the device includes fluidic connection means which connect the stages to pass from a first configuration in which the stages are connected at least two by two in parallel in a first pumping step to a last configuration in which the stages are connected in series in a last stage pump, passing through at least one intermediate configuration, optimizing the pumping rate in the current pressure range, wherein at least one stage is connected in parallel with at least one other stage and at least one stage is connected in series at least one other floor.
  • the fluidic connection means may advantageously comprise valves controlled by electronic control means and inserted into the pipes.
  • the electronic control means actuate the valves to move from one configuration to the next in response to an evolution of the gas pressure in the chamber.
  • the gas pressure in the enclosure is a reliable indicator of the pumping capacity of the vacuum pumping device in the current configuration, and the flow curves of the different configurations can be compared to choose, at any moment , the configuration that has the best pumping capacity.
  • the electronic control means can actuate the valves to move from one configuration to the next in response to a change in the power consumed by the pump motor.
  • the power consumed by the engine is also a possible parameter that gives an indication of the optimal state or not of the current configuration of the stages, because the power consumed by the pumping device increases beyond a value limit after the maximum of the flow curve has been reached.
  • the electronic control means can actuate the valves to go from one configuration to the next after a predefined duration which is a function of the volume of the pumped enclosure. Indeed, for the same volume of enclosure to be pumped, it can be determined, by learning, which are the times when it is necessary to switch from one configuration to the next to remain permanently in the configuration optimizing the flow rate of the pumping device. empty.
  • valves and the interstage channels are integrated in the body of the vacuum pump.
  • the electronic control means can advantageously increase the speed of the motor, and therefore the speed of the pump, beyond its nominal speed, being observed that the nominal speed can be increased without exceeding the power limit because the low pressure stage, which limits the power, is in a zone of low compression during this step.
  • the electronic control means can put the pumping device empty in an economical operating mode, or by reducing the rotational speed of the engine to ensure a holding pumping. pressure, or by connecting an additional pumping stage of small flow to the discharge, to maintain the pressure.
  • the invention proposes a multi-stage dry mechanical pump vacuum pumping method for lowering the pressure of an enclosure, in which the stages of the pump are connected in several successive configurations to pass from one first configuration in which the stages are connected at least two by two in parallel in a first pumping step to a last configuration in which the stages are connected in series in a last pumping step, passing through at least one intermediate configuration, selected each to optimize the pumping rate in the current pressure range.
  • at least one suction stage is connected in parallel with at least one other suction stage and at least one discharge stage is connected in series with at least one other stage.
  • the stages are connected at least two by two in parallel, in the last pumping stage the stages are connected in series, with or without an intermediate pumping step in which the suction stages remain in parallel while the discharge stages are in series.
  • the speed of the pump can temporarily be increased beyond its nominal speed.
  • Such a device comprises a motor 1 which drives a pump 2 of the multi-stage ROOTS type which draws the gases from an enclosure 100 by a suction 3 and which delivers them to the discharge 4.
  • the pump 2 comprises, in the illustrated embodiment, four successive stages respectively 5, 6, 7 and 8, each having a stator stage, respectively 5a, 6a, 7a and 8a, and a double rotor stage respectively 5b, 6b, 7b and 8b.
  • Each stage comprises a suction, respectively 5c, 6c, 7c and 8c, and a discharge, respectively 5d, 6d, 7d and 8d.
  • each interstage line 9-11 1 connects, in this known pump, the discharge from the floor preceding the aspiration from the floor that follows.
  • the interstage pipe 9 connects the discharge 5d to the suction 6c. This connection is not changed during the pumping process.
  • FIG. 2 which illustrates a vacuum pumping device structure according to one embodiment of the invention, is now considered.
  • This embodiment takes the general structure of a traditional multi-stage ROOTS pump as illustrated in Figure 1, providing adaptations for changing the connection of the stages with each other.
  • Figure 2 we find the main elements of the pump of Figure 1, and these elements are identified by the same reference numerals.
  • the interstage pipe 9 connects the discharge 5d to the suction 6c; the interstage duct 10 connects the discharge 6d to the suction 7c; the interstage pipe 11 connects the discharge 7d to the suction 8c.
  • valves are provided, 16, 17, 18 and 19, respectively.
  • the valve 16 is arranged to selectively bring the suction 6c into communication with either the bypass pipe 12 or with the interstage pipe 9 and the repression 5d.
  • the valve 17 is arranged to selectively close off the bypass pipe 13.
  • the valve 18 is arranged to selectively put in communication the suction 8c is with the bypass line 14, or with the interstage pipe 11 and the discharge 7d.
  • the valve 19 is arranged to selectively close off the bypass line 15.
  • valves 16 and 17 are mechanically coupled to one another by a longitudinal actuating rod engaged in the interstage pipe 9 and requested by a Actuator 20.
  • valves 18 and 19 are mechanically coupled to one another on a longitudinal rod urged by an actuator 21.
  • the actuators 20 and 21 are lowered, the valves 16-19 are lowered as shown in Figure 2.
  • the first 5 and second 6 stages are connected in parallel with each other, forming a first pair of stages, and the third 7 and fourth 8 stages are in parallel with each other, forming a second pair of stages.
  • the two pairs of stages are in series in the gas flow path between the suction 3 and the discharge 4.
  • the actuators 20 and 21 are controlled by an electronic control 22, to which they are connected by lines 20a and 21a.
  • the electronic control 22 comprises, for example, a processor associated with memories containing a program for appropriately feeding the actuators 20 and 21 and ensuring the appropriate positioning of the valves 16-19 according to the various operating steps of the device as they will be described. below.
  • the motor 1 is also controlled in speed by the electronic control 22, to which it is connected by a line 1a and an external variable speed drive or integrated into the motor 1 or to the electronic control 22.
  • Figure 3 shows the elements of Figure 2, shown in space. We thus find the motor 1, the pump 2 with its suction 3 and its discharge 4. We distinguish the two actuators 20 and 21, the valves 16 and 18, and the ROOTS type rotors 5b, 6b and 7b of the respective stages 5, 6 and 7. The discharge stage 8 is not visible.
  • FIG. 4 the configuration of the stages of FIG. 2 is illustrated, and between the suction 3 and the discharge 4 the two stages 5 and 6 connected in parallel are found, their respective aspirations 5c and 6c being connected. one to the other by the bypass line 12, their respective upsets 5d and 6d being connected to each other by the bypass line 13.
  • the stages 7 and 8 are also connected in parallel, their respective aspirations 7c and 8c being connected to each other by the bypass line 14, their respective forcings 7d and 8d being connected to each other by the bypass line 15.
  • the two couples 5-6 and 7- 8 are connected to one another in series through the interstage pipe 10 in the path of gas path between the suction 3 and the discharge 4.
  • This first configuration illustrated in FIGS. 2 and 4, with two pairs of parallel stages, constitutes the first configuration that is given to the device in the first step of pumping an enclosure.
  • FIGS. 5 and 6 the system is given a second configuration, in an intermediate pumping step E2.
  • the first 5 and second 6 stages or suction stages remain connected in parallel with each other, while the third 7 and fourth 8 stages or discharge stages are connected in series with each other.
  • the first pair of stages formed by the first 5 and second 6 stages is connected in series with the third 7 and the fourth 8 stages.
  • the actuator 20 remains lowered while the actuator 21 is raised.
  • Stage 5 is considered to have a flow S1 of 400 m 3 / h
  • stage 6 has a flow S 2 of 300 m 3 / h
  • stage 7 has a flow S 3 of 300 m 3 / h
  • the floor 8 a a flow S4 of 200 m 3 / h.
  • the average power consumed remains less than 10 kW.
  • the gas pressure is passed from the chamber of 1 atmosphere to a pressure p1.
  • the vacuum pumping device being in the configuration illustrated in Figures 2 and 4.
  • KO is the zero flow compression ratio of the pump.
  • S 650 m 3 / h .
  • P w 700.
  • ( p ' - p two ( at s p i ) ) + 500 ( p ( ref ) - p ' ) with p ': intermediate pressure p1 (aspi).
  • (S1 + S2) / (S3 + S4) by the conservation of the flow.
  • the power consumed is higher on the high pressure stage.
  • the power increases on each stage with the decrease of the pressure p1 (aspi).
  • FIG. 8 illustrates the flow rate of the device as a function of the pressure in the pumped enclosure.
  • step E1 the flow rate of the vacuum pumping device according to the invention, in the first configuration, follows a curve A which has a maximum.
  • the energy consumption is illustrated to mechanically drive the pump in rotation, as a function of the pressure in the enclosure.
  • the power consumption increases regularly according to the curve B, and then drops sharply to the pressure p1 when switching the device in the second configuration.
  • the pressure of the enclosure is passed from a pressure p1 to a pressure p2.
  • the parallel discharge stage 7-8 is split in series so as to reduce the power consumed on the high pressure stage.
  • step E2 between the pressures p1 and p2, the flow characteristic S of the device according to the invention follows a curve C exhibiting a maximum.
  • step E2 the flow characteristic S of the device according to the invention follows a curve C exhibiting a maximum.
  • step E2 the power characteristic of the device follows a curve D.
  • the configuration of the device is then changed to make the pressure in the chamber go from a pressure p2 to a pressure p3.
  • the configuration is then that shown in Figure 7, with all stages 5-8 in series.
  • the nominal pumping speed must be increased by increasing the speed of rotation.
  • the invention thus allows a gain on the maximum electric power of 40 to 45%, and a gain on the average energy consumed from 20% to 25%.
  • the invention allows a gain on the nominal size of the pump of about 40%.
  • the example described relates to a pumping device with dry mechanical pump type ROOTS four stages.
  • the invention applies in the same way to pumping devices based on a dry mechanical pump having a different number of stages, the number of stages being greater than or equal to four.
  • Figure 10 is an example of successive configurations of the pumping device according to the invention as the pressure drop, when the device comprises five stages.
  • FIG. 10A shows, between the suction 100 and the discharge 101, the three stages 102, 103 and 104 connected in parallel, their respective aspirations 102c, 103c and 104c being connected to one another by the pipe Bypass 105, their respective upsets 102d, 103d and 104d being connected to each other by the bypass line 106.
  • the two stages 107 and 108 are also connected in parallel, their respective aspirations 107c and 108c being connected to each other. to each other through the bypass line 109, their respective upsets 107d and 108d being connected to each other by the bypass line 110.
  • the two groups 102-103-104 and 107-108 are connected to each other. one to the other in series through the interstage line 111 in the path of gas path between the suction 100 and the discharge 101.
  • This first configuration constitutes the configuration that is given to the device in the first pump step E1 of an enclosure.
  • the system is given a second configuration in an intermediate pump step E2.
  • the first 102 and second 103 stages are connected in parallel with each other, as are the third 104 and fourth 107 stages.
  • the first pair of stages formed by the first 102 and second 103 stages is connected in series with the second pair of stages formed by the third 104 and fourth 107 stages and with the fifth stage 108.
  • FIG. 10C A third configuration, in an intermediate pumping step E3, is illustrated in FIG. 10C.
  • the first 102 and second 103 stages are connected in parallel with each other.
  • the third 104, fourth 107 and fifth 108 stages are connected in series with the first pair of stages formed by the first 102 and second 103 stages.
  • FIG. 11 is an example of successive configurations of the pumping device according to the invention as and when the pressure drop, when this device comprises six stages.
  • FIG. 11A shows, between the suction 200 and the discharge 201, the three stages 202, 203 and 204 connected in parallel, their respective aspirations 202c, 203c and 204c being connected to one another by the pipe 205, their respective backs 202d, 203d and 204d being connected to each other by the bypass line 206.
  • the three stages 207,208 and 209 are also connected in parallel, their respective aspirations 207c, 208c and 209c being connected to each other through the bypass line 210, their respective upsets 207d, 208d and 209d being connected to each other by the bypass line 211.
  • the two groups 202-203-204 and 207-208 are connected to one another in series through the interstage line 212 in the gas path between the suction 200 and the discharge 201.
  • This first configuration constitutes the configuration that is given to the device in the first pump step E1 of an enclosure.
  • FIG. 11B the system is given a second configuration in an intermediate pumping step E2.
  • the first three stages 202, 203 and 204 are connected in parallel.
  • the fourth 207 and fifth 208 stages are also connected in parallel with each other.
  • the group 202-203-204, the pair 207-208 and the sixth stage 209 are connected in series.
  • FIG. 11C A third configuration, in an intermediate pump step E3, is illustrated in FIG. 11C.
  • the first three stages 202, 203 and 204 are connected in parallel.
  • the fourth 207, fifth 208 and sixth 209 stages are connected in series with the group 202-203 204.
  • FIG. 11D A fourth configuration, in an intermediate pumping step E4, is illustrated in FIG. 11D.
  • the first 202 and second 203 stages are connected in parallel with each other.
  • the third 204, fourth 207, fifth 208 and sixth 209 stages are connected in series with the first pair of stages formed by the first 202 and second 203 stages.
  • FIG. 12 is an example of alternative configurations of the pumping device according to the invention comprising six stages.
  • the first configuration is illustrated in FIG. 11A, and constitutes the configuration that is given to the device in the first pump step E1 of an enclosure.
  • FIG. 12B the system is given a second configuration in an intermediate pump step E2.
  • the suction 300 and the discharge 301 There are, between the suction 300 and the discharge 301, the two first stages 302 and 303 connected in parallel, their respective aspirations 302c and 303c being connected to each other by the bypass line 304, their respective upsets 302d and 303d being connected to each other by the bypass line 305.
  • the next two stages 306 and 307 are also connected in parallel, their respective aspirations 306c and 307c being connected to each other by the pipeline of branch 308, their respective upsets 307d and 308d being connected to each other by the Bypass line 309.
  • the two last stages 310 and 311 are also connected in parallel, their respective aspirations 310c and 311c being connected to each other by the bypass line 312, their respective forcings 310d and 311 d being connected to one another by the bypass line 313.
  • the three couples 302-303, 306-307 and 310-311 are connected to each other in series through the interstage channels 314 and 315 respectively, in the gas path between the suction 300 and the discharge 301.
  • FIG. 12C A third configuration, in an intermediate pumping step E3, is illustrated in FIG. 12C.
  • the first two stages 302 and 303 are connected in parallel.
  • the third 306 and fourth 307 stages are also connected in parallel.
  • the last two stages 310 and 311 are connected in series with the couples 302-303 and 307-308.
  • the fourth and fifth configurations are similar to those shown in Figures 11D and 11E.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
EP06300288A 2005-04-05 2006-03-27 Vakuumpump mit einer Energiebeschränkung Withdrawn EP1710440A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0503352A FR2883934B1 (fr) 2005-04-05 2005-04-05 Pompage rapide d'enceinte avec limitation d'energie

Publications (2)

Publication Number Publication Date
EP1710440A2 true EP1710440A2 (de) 2006-10-11
EP1710440A3 EP1710440A3 (de) 2008-02-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP06300288A Withdrawn EP1710440A3 (de) 2005-04-05 2006-03-27 Vakuumpump mit einer Energiebeschränkung

Country Status (5)

Country Link
US (1) US20060222506A1 (de)
EP (1) EP1710440A3 (de)
JP (1) JP2006291952A (de)
CN (1) CN100559028C (de)
FR (1) FR2883934B1 (de)

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WO2013087822A1 (fr) * 2011-12-15 2013-06-20 Adixen Vacuum Products Dispositif de pompe a vide multi-etage
WO2014072276A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems
WO2015074865A1 (de) * 2013-11-19 2015-05-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-system sowie verfahren zum betreiben eines vakuumpumpen-systems
FR3017425A1 (fr) * 2014-02-12 2015-08-14 Adixen Vacuum Products Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement
WO2018184853A1 (fr) * 2017-04-07 2018-10-11 Pfeiffer Vacuum Groupe de pompage et utilisation
WO2019202297A1 (en) * 2018-04-16 2019-10-24 Edwards Limited A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
WO2020201218A1 (fr) * 2019-04-05 2020-10-08 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
FR3128747A1 (fr) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Pompe à vide multi-étagée

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DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
JP4820304B2 (ja) * 2007-01-18 2011-11-24 株式会社荏原製作所 真空ポンプユニット
US8864476B2 (en) * 2011-08-31 2014-10-21 Flow Control Llc. Portable battery operated bilge pump
MX2012013390A (es) * 2011-11-18 2013-06-04 Flow Control LLC Bomba de utilidad alimentada con bateria recargable con configuracion de bomba centrifuga en serie.
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US20060222506A1 (en) 2006-10-05
CN100559028C (zh) 2009-11-11
FR2883934A1 (fr) 2006-10-06
JP2006291952A (ja) 2006-10-26
FR2883934B1 (fr) 2010-08-20
CN1847660A (zh) 2006-10-18
EP1710440A3 (de) 2008-02-06

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