EP1846729A1 - Appareil de mesure de coordonnees et procede de mesure au moyen d'un appareil de mesure de coordonnees - Google Patents

Appareil de mesure de coordonnees et procede de mesure au moyen d'un appareil de mesure de coordonnees

Info

Publication number
EP1846729A1
EP1846729A1 EP05819689A EP05819689A EP1846729A1 EP 1846729 A1 EP1846729 A1 EP 1846729A1 EP 05819689 A EP05819689 A EP 05819689A EP 05819689 A EP05819689 A EP 05819689A EP 1846729 A1 EP1846729 A1 EP 1846729A1
Authority
EP
European Patent Office
Prior art keywords
coordinate measuring
sensor
measuring machine
image
image processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP05819689A
Other languages
German (de)
English (en)
Inventor
Ralf Christoph
Wolfgang Rauh
Matthias ANDRÄS
Uwe Wachter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Werth Messtechnik GmbH
Original Assignee
Werth Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik GmbH filed Critical Werth Messtechnik GmbH
Priority to EP10185231.7A priority Critical patent/EP2284480B1/fr
Priority to EP10165895.3A priority patent/EP2224204B1/fr
Priority to EP10185239.0A priority patent/EP2284486B1/fr
Priority to EP10185234.1A priority patent/EP2284485B1/fr
Publication of EP1846729A1 publication Critical patent/EP1846729A1/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Definitions

  • the invention relates to a coordinate measuring machine for measuring workpiece geometries with movable track axes and one or more sensors for detecting measuring points on the workpiece surfaces.
  • the invention also relates to a method for measuring workpiece geometries with a coordinate measuring machine with movable track axes and one or more sensors for detecting measuring points on the workpiece surfaces.
  • Coordinate measuring machines are understood to mean measuring devices with one or more mechanically moved axes for measuring geometric properties of workpieces or measuring objects. These coordinate measuring machines are equipped with sensors for recording the geometrical measuring points on the workpiece surfaces. Prior art are predominantly coordinate measuring machines with purely tactile sensors, d. H. the measuring point is generated by touching the workpiece surface with a tactile probe. Also known are coordinate measuring machines with optical sensors, in which the measuring points are determined by an opto-electronic image processing or laser distance sensor. Coordinate measuring machines are also known in which individual ones of these sensors are combined with one another and thus extended possibilities for the user are given.
  • the present invention is based on the problem, a coordinate measuring machine and a method for measuring workpiece geometries with a coordinate measuring machine such that an optimal configuration for each measurement task is given, so that basically several devices of different types are necessary.
  • a coordinate measuring machine is equipped with all necessary for the solution of the measurement task sensors. These can either be mounted or disassembled or automatically switched on and replaced by appropriate sensor change systems during operation. This allows a flexible measurement of complex workpiece geometries. Of course, it is also possible to have a corresponding number of selected sensors permanently mounted on the device and to measure the workpieces in this configuration.
  • a coordinate measuring machine for measuring workpiece geometries with movable track axes and one or more sensors for detecting measuring points on the workpiece surfaces, wherein the sensor is an image processing sensor system and / or a switching touch probe and / or a measuring touch probe, and / or an in the image processing sensor integrated laser distance sensor and / or a separate laser distance sensor and / or a white light interferometer and / or a tactile optical probe, in which the position of the Antastformiatas is determined directly by an image processing sensor, and / or a punctiform intermittent interferometer and / or a punctiform working interferometer sensor with integrated rotation axis and / or a punctiform interferometer sensor with angled viewing direction, and / or an x-ray sensor and / or a chromatic focus sensor and / or a confocal scanning probe are mounted.
  • This is Art or number of used sensors designed for the respective measurement task.
  • a method for measuring workpiece geometries with a coordinate measuring machine with movable track axes and one or more sensors for detecting measuring points on the workpiece surfaces is characterized in that the sensor is an image processing sensor and / or a switching touch probe and / or a measuring touch probe and / or a laser distance sensor integrated in the image processing sensor system and / or a separate laser distance sensor and / or a white light interferometer and / or a tactile optical sensor, in which the position of the probe element is determined directly by an image processing sensor, and / or a punctiform interferometer sensor and / or a point-shaped working interferometer sensor with integrated rotation axis and / or a punctiform interferometer sensor with angled viewing direction and / or an X-ray sensor system and / or a chromatic focus sensor and / or a confocal Scanning head are used, with type and number of sensors used is aligned to the respective measurement task.
  • the magnification between the measurement object and the monitor image can be controlled by changing the selected section of the camera image by the software or the live image can be displayed in the same way.
  • the magnification between the measurement object and the monitor image can be changed by changing the selected section of the camera image.
  • This can optionally be operated by a rotary knob, which is integrated in the control system of the coordinate measuring machine, or via a software controller. It is also possible that when using a high-resolution camera, the image or the image is displayed only in the lower resolution of the monitor, in the background, however, the full resolution of the camera for digital image processing is used to increase the accuracy.
  • optical magnification of the imaging optics of the image processing here is relatively low (typically 1-fold, but at most 5-fold) and the representation of only a section of the high-resolution camera image on the lower-resolution monitor, the optical effect of higher magnification is achieved.
  • An extension of the procedure described above is that several but at least two cameras are integrated via mirror systems in an optical beam path and use the same imaging objective.
  • a laser distance sensor can be integrated and also the same imaging lens can be used. It is thus possible to realize different magnifications for the user by choosing different cutting widths or different cameras with different chip size with the same number of pixels or with different number of pixels with the same chip size or both. It is also possible to additionally integrate a laser distance sensor into the beam path, which also uses the same imaging lens via mirror systems. If the magnification ranges given by selection of different camera chips are not sufficient, it is possible to additionally integrate a corresponding after-magnification or redimensioning as an optical component in front of each camera in the camera beam path.
  • optical splitters eg Spie- gel
  • This optical splitters which divide the beam paths for the different cameras, designed so that all cameras receive the same proportionate light intensity. This is achieved by selecting appropriate reflectance or transmittance of the optical splitters used, in particular splitter levels.
  • this system can also be extended by an integrated bright field light beam path. This bright-field illumination beam path is likewise realized via a correspondingly dimensioned optical divider such as splitter mirror.
  • a particular problem is that the selected display resolution is not an integer multiple or integer divisor of the selected image capture resolution.
  • An adaptation in the resolution to each other can be done by re-sampling from the captured with a high-resolution camera image. A corresponding number of pixels required for the resolution of the evaluation or display area is calculated.
  • the image processing sensor can measure a plurality of partial images of a measurement object individually and to form an overall image of the total measurement object or for an overall image of partial areas of the entire measurement area. be joined together.
  • This image can be saved and later evaluated on a separate workstation.
  • the calibration parameters of the coordinate measuring machine used for image recording are also stored and used again in the evaluation software. Offline raster scanning is enabled.
  • the entire measurement sequence including the travel position of the coordinate measuring machine and / or the images of the image processing sensor and / or the images of the X-ray sensor and / or the tactile points of the tactile sensor and / or the scanning points of the laser sensor and / or other technology parameters are stored and thus made available for later evaluation.
  • both new measurement results from the existing measurement points and technology parameters can be generated, as well as checked by the measuring device directly on the measuring device as well as the actual measuring programs for the application to further measurement objects can be optimized and changed.
  • a common problem is that devices should be operated by less trained operators.
  • the measurement objects are simply placed on the coordinate measuring machine and a start button is pressed.
  • the problem is that the coordinate measuring machine must first be shown where the actual measuring object is in order to be able to execute the CNC program in the workpiece coordinates of the coordinate measuring machine.
  • the following method is proposed for this purpose: After placing the workpiece on the coordinate measuring machine, the measured object is searched for in the measuring range of the coordinate system. Dinatenmessuzes by driving a sensor, in particular an image processing sensor on a straight, spiral, meandering, circular arc, stochastic or other kind of search path until the existence of a measured object is detected.
  • a scanning of the outer contour follows, starting at the starting point generated by detecting the measurement object (contour tracking for detecting the outer geometry and position of the measurement object).
  • the measuring points located within this outer contour are optionally detected by using one of the optionally available sensors of the coordinate measuring machine, for example by scanning with the image processing sensor or by scanning with the tactile sensor.
  • the measuring points thus obtained can then be fed to the further evaluation in accordance with a test plan. It is also possible to subsequently measure rule geometry elements already within the known workpiece position or to use the first measured contour points merely for aligning the workpiece in workpiece coordinates and then to measure rule geometry elements and features such as angles and distances.
  • the devices it is also possible to store these measured values in a so-called light box, which performs the control of the illumination intensity in the operation of the coordinate measuring machine. If one carries out this light characteristic measurement on a calibrated reference object or at least for several devices on a uniform calibration object, this makes it possible to adapt the devices in their behavior to the outside, ie in their behavior with respect to the setting value light - physical illumination value and thus the pro - ensure grammatability of different devices.
  • the characteristic In order to facilitate the operation of the devices, it is useful to correct the characteristic so that the operator has a linearity, ie that during operation of the coordinate measuring machine, the previously measured characteristic is taken into account for the correction calculation, that apparently a linear characteristic for the operator is present, ie the set value and the illumination intensity then follow a linear relationship.
  • the slope of this linear characteristic can then be adjusted for several devices by a simple correction factor.
  • the set values for the illumination intensities of the different illumination sources specified in the program are set first.
  • the illumination intensity which is influenced by the reflection behavior of the workpiece, is checked with the image processing sensor and it is checked whether the measured value corresponds to the stored nominal value or setting value. If the deviation between the setpoint and the actual value exceeds a fixed limit amount, the setting value of the illumination intensity is linearly corrected and readjusted in accordance with the previously detected light characteristic of the illumination system.
  • the desired Intens ⁇ tuschswert as deposited in the program, is reflected by the measured object. Then the desired object feature is measured. This process is repeated according to the number of image sections that the coordinate measuring device needs to solve the measuring task.
  • the advantage of this approach over conventional light control systems is that only 2 images of the measurement object must be recorded for this control method and thus a very fast light control can be realized.
  • the Best-fitting between the target and actual contour in addition to the Relativlagever selectedung between nominal and actual contour itself and the length of contour sections corresponding to the desired length while maintaining the curvature or alternatively the contour curvature while maintaining the Konrurine on Actual contour changed so that an optimal coverage is achieved with the target contour. If parts with excellent geometric features are difficult to check by elasticity or deformation, this process can be assisted by fitting the actual and target contours to a group of actual and target contours on individually distinguished features, such as contours or contours Circular structures or other recurring structures takes place and so a distortion of the actual contour for optimum coverage with the target contour is generated.
  • the tolerances for the measurement of the parts are generally given as dimensional, geometrical and / or positional tolerances in the form of printed drawings or CAD drawings.
  • the implementation of these tolerances in corresponding tolerance zones can be solved by the coordinate measuring machine. This problem is self-inventively solved in that the coordinate measuring machine algorithms are deposited, which realize an automatic conversion of the dimensional, shape and / or position tolerances on contour section related tolerance zones. For the simple case, a uniform overall tolerance for the contour section results here for several tolerances.
  • the coordinate measuring machine automatically performs a multiple evaluation for the different tolerance situations.
  • each setpoint or actual contour segment is assigned several tolerance zones.
  • an evaluation of a plurality of target or actual contour regions combined into groups and / or a complete workpiece of target and actual contours for each of a plurality of different positional, dimensional and / or shape tolerance situations is performed automatically one after the other.
  • the most unfavorable result of the various target / actual comparisons for each desired or actual contour segment can be displayed with the aid of the different tolerance zones.
  • autofocus measurement points be generated on several semi-transparent layers simultaneously with the image processing sensor in autofocus mode for a plurality of evaluation regions. This is achieved by moving the image processing sensor in the measuring direction and simultaneously recording several images. The focus measuring points are calculated in the respectively determined evaluation ranges according to a contrast criterion.
  • the axes of the coordinate measuring machine are moved perpendicular or nearly perpendicular to the measuring direction of the laser distance sensor. According to the boundary condition, it is considered that the measuring points of the laser distance sensor lie in a predefined cutting plane. It is thus possible to scan contour lines on the measurement object.
  • the laser distance sensor is moved on a path on which the distance between sensor and object is the same.
  • the advantage with this procedure is that the accuracy of the rotary swivel axis used for the rotation or pivoting of the test object is not included in the measurement result.
  • the position measured values of the rotary axis or rotary swivel axis can additionally be used for the evaluation. It is also possible to measure the reference marks (preferably balls) with one sensor and to carry out the measurement on the workpiece with one according to another.
  • Coordinate measuring machines with various sensors also have, among other things, optionally sensors with an opto-tactile button.
  • the determination of the Position of the sensing element (sphere, cylinder) by an image processing sensor (WO-A-98/157121).
  • One problem is to adjust this sensor to the position of the probe ball.
  • this is realized by additionally arranging an adjusting unit on the coordinate axis bearing the sensor, which permits a relative adjustment between the sensing element (probe ball including stylus and holder) and the image processing sensor. For example, via an autofocus method is then an automatic focus of the Antastformides in relation to the image processing sensor possible.
  • the problem may exist that the geometric quality of the sensing element (sphere, cylinder or similar) is worse than the required measurement uncertainty. This leads to unusable measurement results.
  • the geometry of the probing element eg ball, cylinder
  • these measured values are automatically taken into account as correction values when using the probing element in the coordinate measuring machine.
  • a change device can be provided according to the invention.
  • this changing device In order not to limit the measuring volume of the coordinate measuring machine by placement of the changing device, it is inventively provided to arrange this changing device on a separate adjustment axis, which moves the changing device out of the measuring volume, if no change operation takes place, and enters the measuring volume, if a change operation is provided.
  • This adjustment axis can be performed with a spindle drive. Alternatively, it is possible to work only with 2 stops, which are positioned against by a motor drive. Alternatively it is possible to determine the 2 positions by means of a linear displacement encoder or a rotary encoder on the spindle drive.
  • Coordinate measuring machines are generally exposed to different operating temperatures at the place of use. If several sensors are attached to the coordinate measuring machine, this will cause the positions between the different sensors to change thermally. This leads to measurement errors.
  • the temperature of the mechanical assemblies which serve to secure the various sensors be measured at one or more locations and the expansion of the corresponding mechanical components to compensate for error effects caused by temperature fluctuations at the installation site of the coordinate measuring machine the calculation of the measuring points detected by the different sensors. This means that z.
  • the temperature of the device connecting both sensors permanently measured, linked to the linear expansion coefficient of the material used for this component and so the corrected relative position of the sensor is calculated in the coordinate system of the coordinate measuring machine. These corrected values are included in each measurement of measurement points.
  • the temperature compensation described above is accomplished by linearly multiplying the measurements by a constant factor that is affected by the temperature.
  • the measurement object can be clamped in an axis of rotation and thus screwed into an optimum position for the measurement with the various sensors.
  • the problem arises that the clamping force of the counter-tip can lead to deformations of the measured object.
  • the object to be measured is constantly deformed or that the counter-tip is automatically positioned against the measured object until a predefined force is reached.
  • the counter-tip is resiliently mounted, so that via a deflection and a corresponding limit switch the corresponding required force can be determined.
  • an embodiment variant results that only one of the plurality of arranged buttons is used for realizing the scanning operation of the coordinate measuring machine (regulation of the positioning process of the coordinate measuring machine depending on the deflection of the probe) and the other buttons are only used for acquiring measured values (passive). operate. These do not contribute to the regulation of the coordinate measuring machine.
  • the control of an optional rotary swivel unit for the multi-key arrangement can be automatically controlled by the difference between the average deflections of the various individual keys.
  • Typical application for said multiple probe arrangement is the measurement of tooth flanks, of gears or the measurement of the shape of cam of camshafts.
  • a plurality of measuring tracks are generated simultaneously during a measuring process.
  • the image processing sensor is permanently nachzufokussieren on the outer edge to be measured.
  • this problem can be solved by additionally integrating a laser distance sensor in the image processing beam path.
  • the laser sensor measures the distance of the image processing sensor to the workpiece surface in the vicinity of the outer edge to be measured and is connected to a position control loop of the coordinate measuring machine in such a way that an automatic detection management takes place.
  • the image processing sensor is thus permanently focused.
  • the tracking of the workpiece for focusing can be realized alternatively with the Cartesian axes of the coordinate measuring machine or by an optional rotation axis (rotation of the workpiece to be measured).
  • the number of evaluated images does not meet the required number of measurement points or the total measurement time can not be realized sufficiently to meet the requirements.
  • the camera of the image processing system of the coordinate measuring machine in video standard (50 or 60 Hz) operated and stored in a loose order given by the operator or by the sequence program of the coordinate measuring machine, an image and evaluated.
  • the number of evaluated images is significantly smaller than the number taken by the camera.
  • the measuring time is not optimal or the measuring point number is insufficient.
  • the evaluation of the image is performed for each image taken by the camera. This means that the evaluation is realized in video real time. Ie.
  • the image evaluation of the image processing sensor in video real-time i. H. in the same frequency as the refresh rate of the camera.
  • the measurement object is rotated during the measurement with an axis of rotation and recorded and evaluated with the frequency of the camera measurement points on the outer edge of the measurement object for realizing a roundness measurement in video real time.
  • the integration time is extended until there is a sufficiently low signal to noise ratio. This means that several successive images are added and then the image evaluation takes place on this added image. This process can automatically be The integration time of such a camera is extended until a sufficiently good image can be stored and further processed. The intensity of the pixels of the image is monitored up to a setpoint and increased by storing several images.
  • image processing sensors with laser sensors integrated in the beam path can be used. These beam paths can also be designed as zoom optics.
  • the working distance of the zoom optics used is adjustable. In practically used systems, it is to be expected that the desired optical properties for the integrated laser distance sensor and the image processing sensor will not be present at the same setting parameters (working distance / magnification).
  • the aperture and working distance of the zoom optical system used can alternatively be optimized for the laser sensor or the image processing sensor by an additionally exchangeable attachment optics. This additional optical system can be designed so that the same setting parameters (working distance / magnification) are not present for the laser sensor and the image processing sensor.
  • the aperture and working distance of the zoom optical system used can be optimized alternatively for the laser sensor or the image processing sensor.
  • This additional optical system can be designed so that it creates optimized conditions for the laser sensor. It is possible to connect this attachment to the zoom optics via a magnetic interface and / or to switch it on or off via a probe changing station which is otherwise used for tactile sensors.
  • illumination sources such as bright field, dark field, transmitted light
  • These illumination sources are varied with regard to their setting, such as intensity, solid angle of the illumination (illumination angle or direction of the illumination), direction of illumination, in order to achieve optimal conditions.
  • These parameters are different for sections of the object to be measured, which is why it is not possible with a lighting setting the entire object optimal image.
  • the measuring points are usually specified by the operator in the teach-in mode. If unknown contours are to be measured in this method, this is only possible with difficulty. This is inventively improved by the fact that with an autofocus sensor, a scanning process on the material surface is performed by theoretically calculated from the already measured focus points by extrapolation, the probable location of the next measurement point and accurately measured by a new autofocus point. If this process is repeated several times in succession, this results in a fully automatic scanning. In this case, both the number of points to be scanned along a line and an area to be scanned on the workpiece or measured object can be specified by the operator.
  • the extrapolation of the next measurement point from the two or more preceding measurement points can be done by a linear extrapolation. Furthermore, it is also possible to perform this extrapolation by polynomial interpolation from the last measured 2 or more points. If several delimited areas of the image are used to determine focus measurement points during each focus operation, a sequence of measurement points during a focus process can be generated in this way. If such sequences are put together, a scan of complete contours is also realized.
  • the described problem is solved in that for each image section several images are recorded with different illumination intensities. Subsequently, these images of the same object area are merged into a new overall image such that the pixel amplitudes are normalized to the respective illumination intensity that was used. For the overall image composition, the pixels from the respective image that are within the permitted dynamic range (eg 0-245 at 8 bits) are then used. Overshoot amplitudes are not taken into account in the respective picture. For pixels with several valid pixel amplitudes, an averaging is performed from the values. Subsequently, the overall picture can be evaluated.
  • the permitted dynamic range eg 0-245 at 8 bits
  • the radiation intensity or irradiation intensity of the test object is often insufficient to allow optimum measurement.
  • This can be inventively improved by the fact that for quality optimization of recorded images in image processing sensors or X-ray tomography sensors taken multiple images of an object area, each with different illumination or radiation intensities and then joined together to form an overall picture become.
  • the individual image sets taken from each individual image with a different illumination or radiation intensity the pixel amplitudes (pixels used), which lie within a valid amplitude range (typically between 0 and 245 LSB). Pixel amplitudes with amplitude evaluation that indicate an overshoot (eg> 245 LSB) are ignored during the evaluation.
  • an average value can be formed from the normalized pixel amplitudes. It is possible to perform all described calculations on amplitude values normalized to the radiation or illumination intensity used.
  • 1 is a schematic diagram of a coordinate measuring machine
  • FIG. 3 is a schematic diagram of a coordinate measuring machine with Syndromeverarbei- tion and laser distance sensor
  • FIG. 6 is a schematic representation of a contour tracing
  • FIG. 9 setpoint and actual comparison of contour data
  • FIG. 19 shows a sensor rake for measuring a plurality of measuring paths
  • 21 shows a measuring arrangement with image processing sensor and laser distance sensor
  • Fig. 22 is a schematic diagram for measuring determined by extrapolation measuring points and 23 is a schematic diagram of an arrangement with an X-ray tomography sensor.
  • a coordinate measuring machine 10 is shown purely in principle, which is equipped with the required for the respective solution of a measurement task sensor or the required sensors.
  • the sensors can either be mounted or disassembled or can be automatically switched on and off during operation by means of corresponding sensor change systems.
  • a flexible measurement of complex workpiece geometries is possible.
  • the invention will not be abandoned if a corresponding number of selected sensors are permanently mounted on the device to measure objects in this configuration.
  • a coordinate measuring machine 10 comprises a z. B. granite base frame 12 with measuring table 14, on which an object to be measured 16 is positioned to measure its surface properties.
  • a portal 18 is adjustable in the Y direction.
  • columns or uprights 20, 22 are slidably supported on the base frame 12.
  • a traverse 24 goes out, along which a carriage is movable, which in turn receives a quill or column 26 which is adjustable in the Z direction.
  • a sensor 30 is designed which, in the exemplary embodiment, is designed as a tactile sensor, which measures tactile-optically when the sleeve 26 contains an image processing sensor.
  • the coordinate measuring machine 10 can have a sensor changer, as can be seen in principle from FIG. 2.
  • a plurality of sensors can each optionally be provided with the coordinate measuring machine via an exchange interface and exchanged by hand or by automatic retrieval of the coordinate measuring machine at a parking station.
  • FIG. 2 shows a section of a coordinate measuring machine with a quill 32 in plan view.
  • the sensors connectable to the quill are identified by the reference numerals 34, 36, 38.
  • the sensors 34, 36, 38 may be designed optically or tactile, to name only sensor types.
  • the coordinate measuring machine, ie the quill 32 is adjustable in the YXZ direction in order to carry out an exchange of the sensors 34, 36, 38.
  • the parking station 42 or the Tasterwechslersystem can be adjusted by an adjustment axis 44 so that the probe changer 42 is arranged in non-operation outside the measuring volume of the coordinate measuring machine.
  • image processing sensors in coordinate measuring machines, it is necessary for the user to set different magnifications. This contradicts the demand for cost-optimized optical systems and high imaging qualities, which are difficult to achieve with the otherwise required zoom optics.
  • the camera of the image processing sensor is selected with a larger resolution (number of pixels) than the resolution of the monitor used or of the monitor section used for the image display. Furthermore, the camera can be equipped with random access to certain sections of the overall picture.
  • magnification between the measurement object and the monitor image can be controlled by changing the selected section of the camera image by the software or the live image can be displayed in the same way.
  • the magnification between the measurement object and the monitor image can be changed by changing the selected section of the camera image. This can optionally be operated by a rotary knob, which is integrated in the control system of the coordinate measuring machine, or via a software controller.
  • the image or the image is displayed only in the lower resolution of the monitor, in the background, however, the full resolution of the camera for digital image processing is used to increase the accuracy.
  • the actual optical magnification of the imaging optics of the image processing here is relatively low (typically 1-fold, but at most 5-fold) and the representation of only a section of the high-resolution camera image on the lower-resolution monitor, the optical effect of higher magnification is achieved.
  • FIG. 3 shows a section of a coordinate measuring machine.
  • the object to be measured 16 is shown on the measuring table 12.
  • an imaging lens 46 and a camera such as CCD camera 48 are arranged, the is connected via a computer 50 to a monitor 52.
  • the hardware of the computer 50 or computer it is possible to adjust the resolution between the camera 48 and the monitor 52 computationally, for. B. to use a larger camera resolution than can be reproduced by the monitor 52.
  • the camera 58 is equipped with additional post-magnification optics 62 to define the magnification.
  • the optical splitters or mirrors used in the beam path which are identified by the reference numerals 56 and 64 in FIG. 3, are designed such that after the division all affected cameras 48, 58 or sensors 60 are provided with the same light intensity. Via an additional optical divider 66 and a lighting device 68, an integrated bright field incident light is realized.
  • an even higher level of re-sampling from the respectively acquired camera image her resolved camera image with the purpose of representing an even higher magnification.
  • additional pixels are determined by interpolation between real measured pixels.
  • a problem with known coordinate measuring machines is that once created programs for measuring workpieces are subsequently changed or subsequently additional features are to be generated from the measurement results already obtained. This is not possible in the current state of the art because the corresponding associated technology data is no longer available.
  • the measurement points or video images or X-ray images measured with one or more sensors of the coordinate measuring machine and their associated position and other technology parameters such as set value of the illumination system used, light intensity or magnification of the lens used during the coordinate measuring machine Recorded recorded the measurement process and made available for later evaluation so.
  • a measuring object 68 is to be measured with an image processing sensor.
  • image sections 70, 72, 76, 78 image sections are shown, which are detected at different positions in the X, Y coordinate system 80 of the coordinate measuring machine on the measuring object 68.
  • the image contents of the object sections captured at the respective positions are stored, in addition to the respectively associated image processing evaluation windows 82, 84, 86, 88 and the parameters stored thereon in the coordinate measuring machine such as magnification of the objective used, setting value of the used lighting system.
  • the actual measurement of the image contents and the link eg. As the measurement of an angle 90 or a distance 92, take place.
  • an image is automatically composed of several parts which are automatically combined Users then presented as a measured image and made available for evaluation. This is illustrated in principle with reference to FIG. 5.
  • a feature in the form of a bore 96 is to be measured on a measurement object 94.
  • the field of view 98 of an image processing sensor is insufficient to fully capture this feature.
  • the operator sets an evaluation area 100 that is significantly larger than the visual field 98.
  • the software automatically recognizes this and, in the exemplary embodiment, defines four positions 102, 104, 106, 108, which are measured successively in order to combine an overall image and to metrologically record the feature to be measured, ie the bore 96 in the exemplary embodiment.
  • a measurement object 110 lies on the measurement table 12.
  • An image processing sensor used for the measurement has an evaluation region 112.
  • an outer contour scanning of the measurement object 110 begins until complete detection of the outer contour along the path 118 (contour tracking).
  • a grid-shaped detection of the inner area of the measurement object 110 in the previously defined outer boundaries 120 is automatically carried out, so that subsequently the total measurement object 118 is available for evaluation.
  • the invention proposes that the characteristics of the illumination devices of the image processing sensor system of the coordinate measuring machine are recorded, d. H. the dependence of the illumination intensity on the adjustment image of the user interface of the measuring device is detected by measuring the intensity for the associated setting value with the image processing sensor system. Corresponding measurement results are stored as a characteristic curve in the computer of the measuring device. It is also possible to store the measured values in a so-called light box, which controls the illumination intensity during operation of the coordinate measuring machine.
  • an original light characteristic 122 of an illumination system for an optical coordinate measuring machine is shown in FIG. 7 at the top left.
  • the illumination intensity E does not depend linearly on the current flow I through the illumination source.
  • a similar, but in detail different characteristic 122 of a second coordinate measuring machine is shown in the graph of FIG. 7 at the top right.
  • Fig. 8 shows the procedure for controlling the light intensity E.
  • a light characteristic 132 is effective.
  • the setpoint value of the illumination intensity E s is set by the illumination current I 1 . If another measurement object or a different location of the measurement object is now measured, the reflection properties of the material may have changed, which leads to a change in the increase in the light characteristic.
  • This second light characteristic 133 is likewise shown in FIG. 8. If the illumination intensity is then measured after setting the current Ij, the illuminance Ei is determined as the result. This does not correspond to the setpoint E s .
  • the necessary current I s can be calculated in a simple manner to set the target list strength E s .
  • the physical structure for the above-described process is shown in FIG. 2, in which the light source 68, the mirror 66 and the objective 46 represent the illumination device. The calculation takes place via the computer 50.
  • the reflection behavior of the measurement object 16 is different within the measurement objects and generates the different response to current I and illumination intensity E.
  • the length of contour sections corresponding to the nominal length while retaining the curvature or, alternatively, the contour curvature while retaining the contour length on the profile will be inherent in the best fit between nominal and actual contour Actual contour changed so that an optimal coverage is achieved with the target contour. If parts with excellent geometric features are difficult to check by elasticity or deformation, this process can be assisted by fitting the actual and target contours to a group of actual and target contours on individually distinguished features, such as contours or contours Circular structures or other recurring structures takes place and thus a distortion of the actual contour for optimum coverage with the desired contour is generated.
  • Reference numeral 134 represents a point cloud, which is essentially represented by a cylindrical lateral surface. Due to the distortion of the measuring object, the structures on this cylindrical lateral surface are twisted or twisted relative to one another along the cylinder axis. By the teaching of the invention, this distortion is compensated mathematically by turning back the structures in the starting position. This is realized by comparing the respective sections of the measuring point cloud transversely to the cylinder axis via a desired / actual comparison with corresponding desired data and from this the necessary twisting position for the respective section is calculated.
  • reference numeral 134 represents the measuring point cloud of a measuring object having a cylindrical shape.
  • the measuring point cloud 134 is shown with distortion, wherein in the sections 136, 138, 140 each have a different degrees of twisting.
  • a set point position 142 is compared with an actual point position 144, and from this the angle of rotation 146 is calculated. In this way, the various sections 136, 138, 140 are traversed and the measuring points interpolated between them.
  • FIG. 10 a shows an example of how, from an actual contour 156, by changing the curvature while maintaining the length, a better coverage to a desired contour 158 for the subsequent comparison with it can be produced.
  • Circle 160 represents that a better adaptation to the desired contour 158 is made possible by a change in curvature at a constant length (in this case circumference).
  • FIG. 10 b shows how, while the curvature of the contours is maintained by changing the length of contour sections, a better overlap between desired / actual value is made possible for the purpose of the later comparison.
  • reference symbol 162 represents the actual contour
  • reference symbol 164 represents the desired contour.
  • the contour 166 is the actual contour adapted by stretching while maintaining the curvature to the desired contour 164.
  • the tolerance zones assigned to the desired or actual contour can be evaluated in the evaluation of the deviation between the nominal and actual contour.
  • the tolerance zones are automatically taken from the dimension data of a CAD drawing or alternatively defined by operator information. With reference to the explanations to FIGS. 11 and 12, the method will be described in more detail.
  • a workpiece 167 comprising the elements 1 to 6 with associated dimensions (dimension 1 to dimension 4) as well as the tolerances associated with the dimensions are reproduced.
  • the corresponding dimensions and tolerances can be taken from a CAD drawing, but alternatively also be defined by operator input.
  • all elements in the present example are assigned a two-sided, symmetrical tolerance zone, which can have different widths per element. From Fig. 11 it can be seen that the element 1 by dimension 2 with respect to element 3 and by measure 4 with respect to element 5 two different width tolerance zones must be assigned. Analogously, the element 2 with respect to element 4 by specifying the dimension 3 and with respect to element 6 by specifying the measure 1 different tolerance zones assigned.
  • the calculation and assignment of the different tolerance zones to the elements takes place automatically by analyzing all tensile dimensions defined for an element within the drawing and by automatically dividing the tolerance zones per drawing element according to the reference dimensions present for the element.
  • the upper tolerance zone is created by the tolerance assigned to dimension 2; the lower tolerance zone is created by the tolerance assigned to dimension 4.
  • the element 2 is assigned two tolerance zones, wherein the left tolerance zone for element 2 shown in FIG. 12 arises from the tolerance zone assigned to dimension 1, the right tolerance zone for element 2 arises through the tolerance zone assigned to dimension 3.
  • the measuring points recorded on the real workpiece 166 are assigned in a first step according to their position to one of the automatically determined tolerance zones.
  • the measuring points associated with the respective tolerance zones are optimally fitted into the tolerances in the workpiece 166 defined by the nominal contour without binding degrees of freedom, wherein the fitting conditions are automatically selected depending on the type of tolerance.
  • the corresponding check for tolerance zone evaluation is performed sequentially for all tolerance zones and all measuring points assigned to these tolerance zones.
  • the invention proposes that with the image processing sensor in autofocus mode for several evaluation areas simultaneously autofocus measurement points are generated at a plurality of semi-transparent layers. This is achieved by moving the image processing sensor in the measuring direction and simultaneously recording several images. The focus measuring points are calculated in the respectively determined evaluation ranges according to a contrast criterion. This is apparent from FIG. 13. An image processing sensor 168 is moved to implement an auto-focus method corresponding to the Z-axis so that the focal point 170 of the sensor 168 is placed in different positions within the semi-transparent measurement object 172. As a result, a contrast characteristic 174 is recorded.
  • each The maximum of the contrast characteristic represents the location of the respective semi-transparent boundary layer between different types of material layer, and from this contrast curve 174, the correspondingly assigned Z positions Z1, Z2 and Z3 can then be calculated. In this case, conventional methods for contrast auto focus measurement are used.
  • contours on workpiece surfaces are scanned in a sensory way, ie. H.
  • the coordinate measuring machine is moved on a predetermined path.
  • the position control of the sensor or the position control loop of the coordinate measuring machine is controlled in dependence on the deflection display of the laser distance sensor so that the deflection of the laser distance sensor remains constant.
  • a measuring object 176 is located on a measuring table of a coordinate measuring machine and is scanned with a distance sensor such as laser distance sensor 178 of the coordinate measuring machine.
  • the laser distance sensor 178 is controlled in its movement so that the distance to the material surface is constant.
  • the Z position of the sensor 178 is kept constant and achieved by regulating the X and Y position that the sensor measuring point always remains in a plane 180 and thus a contour line 182 is scanned on the measuring object 176.
  • Measuring further points 204 on the measuring object 190 with one or more sensors 192 of the coordinate measuring machine,
  • Coordinate measuring machines with various sensors also have, among other things, optionally sensors with an opto-tactile button.
  • the determination of the position of the Antastformiatas (ball or cylinder) by an image processing sensor is to adjust this sensor to the position of the probe ball.
  • This can be achieved by additionally arranging an adjusting unit on the coordinate axis bearing the sensor, which device sets a relative position between the sensing element (probe ball including stylus and holder) in the image frame.
  • processing sensor allows. For example, via an autofocus method is then an automatic focus of the Antastformides in relation to the image processing sensor possible.
  • a tactile-optical sensor 210 (also called opto-tactile sensor) arranged in a coordinate measuring machine on an adjustment axis 208, which is mounted on a coordinate axis of the coordinate measuring machine, preferably the Z-axis 208, in the embodiment with the optical axis of an optical sensor 210 coincides.
  • actuator 210 By separately controlling a second Z-axis (actuator 210), it becomes possible to selectively adjust the relative position between the probe form element 212 of the tactile optical sensor 206 to the focal plane 214 of the optical sensor 210.
  • Coordinate measuring machines are generally exposed to different operating temperatures at the place of use. If several sensors are attached to the coordinate measuring machine, this will cause thermally induced changes in the positions between the different sensors. This leads to measurement errors. To compensate for this, the temperature of the mechanical assemblies required for mounting the various sensors is measured at one or more locations and the expansion of the corresponding mechanical components is taken into account in the calculation of the measurement points detected by the various sensors.
  • FIG. 17 shows an arrangement with two sensors 218, 220 on a Z axis 222 of a coordinate measuring machine.
  • the sensors 218, 220 are one or more connecting elements 224 connected to each other and the Z-axis 222.
  • a temperature sensor 226, the temperature of the connecting element or elements 224 is measured continuously during the measurement, and the corresponding change in length is corrected by an evaluation computer 228 and taken into account for the measurement results.
  • the measuring object In order to be able to measure a measuring object from several sides during the measurement on a coordinate measuring machine, it makes sense that the measuring object is clamped in an axis of rotation and thus in an optimal for the measurement with the various sensors Position can be screwed. In addition to this, it is possible to record the measurement object in addition to the rotation axis itself with a correspondingly arranged counter-tip.
  • the measured object is constantly deformed or the counter-tip is automatically positioned up to a predefined force on the measurement object. In this case, the counter-tip can be mounted sprung, so that via a deflection and a corresponding limit switch, the corresponding required force can be determined.
  • FIG. 18 shows how, during the clamping of a measuring object 230, tip 232 and counter-tip 234 are pushed to a point by a guide 236 against the measuring object 230 until the counter-tip 234 interacts with a limit switch 238.
  • a bias voltage by means of a biasing spring 240 are generated, wherein the feed movement (arrow 242) of the opposite tip 234, which is achieved by a corresponding drive 244 on the guide 236, then interrupted when the opposite tip 234 on the limit switch 238 or a gleichconcedes Element acts.
  • the biasing force of the clamped measuring object 236 is clearly defined.
  • a plurality of tactile sensors of similar or different construction are arranged close to one another on a common mechanical axis of the coordinate measuring machine.
  • Fig. 19 shows an example.
  • a plurality of tactile sensors 248, 250, 252 are arranged on a common Z-axis 254 of a coordinate measuring machine.
  • measuring points 258, 260, 262 are simultaneously measured for different positions, which are then evaluated together in the coordinate measuring machine.
  • a laser distance sensor is additionally integrated in the image processing beam path.
  • the laser sensor measures the distance of the image processing sensor to the workpiece surface in the vicinity of the outer edge to be measured and is connected to a position control loop of the coordinate measuring machine in such a way that automatic tracking takes place.
  • the image processing sensor is thus permanently focused. This will be clarified in principle with reference to FIG.
  • two combined sensors 260, 262 for image processing and laser distance measurement are combined, which detect measurement points on a tool 266 via a common optical system 264.
  • the axis of rotation 268 of the tool 266 is controlled by a computer and control system 270 of the coordinate measuring machine, which also has the sensor signals of the CMM, so that measured by the laser distance sensor 262 measuring points on a rake face 272 of the tool 266 influence the settings of the rotation axis 268 so in that the cutting edge comes to rest here in each case in the section plane 274 of the tool.
  • the image processing sensor 260 of the same coordinate measuring machine it is thereby possible to measure the outer contour of the corresponding tool. With constant turning and moving of the X, Y and Z axes of the CMM, this process can be repeated continuously, thus performing scanning in all three coordinates simultaneously.
  • FIG. 21 shows an image processing sensor 276 and a laser distance sensor 278 which are inserted via a beam splitter 280 with a common measuring objective 282 in a coordinate measuring machine.
  • a measurement object 284 is to be touched, that is to be measured without contact in the present case.
  • the measuring points are usually specified by the operator in the teach-in mode. If unknown contours are to be measured in this method, this is only possible with difficulty.
  • a scanning process of a material surface is performed with an autofocus sensor by theoretically calculating from the already measured focus points by extrapolation the prospective location of the next measurement point and measuring it accurately by a new autofocus point. If this process is repeated several times in succession, this results in a fully automatic scanning. In this case, both the number of points to be scanned along a line and an area to be scanned on the workpiece or measured object can be specified by the operator. The extrapolation of the next measurement point from the two or more preceding measurement points can be done by a linear extrapolation.
  • Fig. 22 shows a corresponding method for scanning a material surface with an autofocus sensor.
  • An autofocus sensor 290 is used in a first location 191 by movement in the Z-axis of the coordinate measuring machine to measure a surface point.
  • the contrast behavior is recorded via a focus area 292 and from this the focus location 294 is calculated in accordance with the measurement point.
  • the same process is repeated at a next position 295 with corresponding Focusing range 296 and measuring point 298.
  • z. B. interpolation of a line 300 the position of the focus measuring range 302 and thus the sensor 290 is defined in the position 304 and there a measuring point 306 measured. This process is repeated one after the other until the entire length of the contour 308 of the object to be measured or of a part thereof has been measured.
  • an X-ray source 308, a turntable 310 with a measurement object 312, and an X-ray sensor 314 are shown in FIG.
  • the pixel amplitude of the X-ray detector 314 is stored in a computer and evaluation system 316 and evaluated according to previously explained method steps and joined together. In this case, it is possible to control the X-ray frequency of the radiation source 308 as well as the recording parameters of the detector 316 in accordance with the procedure described by the evaluation system 316.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

L'invention concerne un procédé pour mesurer des géométries de pièces au moyen d'un appareil de mesure de coordonnées (10) ainsi que ledit appareil. L'objectif de cette invention est d'effectuer des tâches de mesure de façon optimale, sans que des appareils de différents types soient nécessaires. A cet effet, un ou plusieurs capteurs (30), pouvant être utilisés de façon optimale pour la tâche de mesure respective, sont utilisés.
EP05819689A 2004-12-16 2005-12-16 Appareil de mesure de coordonnees et procede de mesure au moyen d'un appareil de mesure de coordonnees Ceased EP1846729A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP10185231.7A EP2284480B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées
EP10165895.3A EP2224204B1 (fr) 2004-12-16 2005-12-16 Procédé de mesure de la géometrie d'un objet à l'aide d'un appareil de mesure de coordonnées
EP10185239.0A EP2284486B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées
EP10185234.1A EP2284485B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées

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DE102004061151 2004-12-16
PCT/EP2005/013526 WO2006063838A1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnees et procede de mesure au moyen d'un appareil de mesure de coordonnees

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EP10165895.3A Division EP2224204B1 (fr) 2004-12-16 2005-12-16 Procédé de mesure de la géometrie d'un objet à l'aide d'un appareil de mesure de coordonnées
EP10185231.7A Division EP2284480B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées
EP10185234.1A Division EP2284485B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées
EP10185239.0A Division EP2284486B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées

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EP1846729A1 true EP1846729A1 (fr) 2007-10-24

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EP10185234.1A Expired - Lifetime EP2284485B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées
EP10185231.7A Expired - Lifetime EP2284480B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées
EP10165895.3A Expired - Lifetime EP2224204B1 (fr) 2004-12-16 2005-12-16 Procédé de mesure de la géometrie d'un objet à l'aide d'un appareil de mesure de coordonnées
EP05819689A Ceased EP1846729A1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnees et procede de mesure au moyen d'un appareil de mesure de coordonnees

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EP10185234.1A Expired - Lifetime EP2284485B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées
EP10185231.7A Expired - Lifetime EP2284480B1 (fr) 2004-12-16 2005-12-16 Appareil de mesure de coordonnées et procédé de mesure à l'aide d'un appareil de mesure de coordonnées
EP10165895.3A Expired - Lifetime EP2224204B1 (fr) 2004-12-16 2005-12-16 Procédé de mesure de la géometrie d'un objet à l'aide d'un appareil de mesure de coordonnées

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EP (5) EP2284486B1 (fr)
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EP2284485A2 (fr) 2011-02-16
EP2284486A3 (fr) 2013-10-02
EP2284485B1 (fr) 2015-09-16
EP2224204A2 (fr) 2010-09-01
EP2224204B1 (fr) 2021-05-26
EP2284486A2 (fr) 2011-02-16
EP2224204A3 (fr) 2013-05-15
WO2006063838A1 (fr) 2006-06-22
EP2284486B1 (fr) 2018-04-11
EP2284480A2 (fr) 2011-02-16
JP2008524565A (ja) 2008-07-10
JP2012137498A (ja) 2012-07-19
US20100014099A1 (en) 2010-01-21
EP2284480B1 (fr) 2014-08-27
EP2284485A3 (fr) 2013-05-15
EP2284480A3 (fr) 2013-05-15

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