EP2056068A4 - Capteur de force d'inertie - Google Patents

Capteur de force d'inertie

Info

Publication number
EP2056068A4
EP2056068A4 EP07792698A EP07792698A EP2056068A4 EP 2056068 A4 EP2056068 A4 EP 2056068A4 EP 07792698 A EP07792698 A EP 07792698A EP 07792698 A EP07792698 A EP 07792698A EP 2056068 A4 EP2056068 A4 EP 2056068A4
Authority
EP
European Patent Office
Prior art keywords
force sensor
inertia force
inertia
sensor
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07792698A
Other languages
German (de)
English (en)
Other versions
EP2056068B1 (fr
EP2056068A1 (fr
Inventor
Satoshi Ohuchi
Hiroyuki Aizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Publication of EP2056068A1 publication Critical patent/EP2056068A1/fr
Publication of EP2056068A4 publication Critical patent/EP2056068A4/fr
Application granted granted Critical
Publication of EP2056068B1 publication Critical patent/EP2056068B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
EP07792698A 2006-08-21 2007-08-20 Capteur de force d'inertie Not-in-force EP2056068B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006223807A JP5205725B2 (ja) 2006-08-21 2006-08-21 角速度センサ
PCT/JP2007/066084 WO2008023653A1 (fr) 2006-08-21 2007-08-20 Capteur de force d'inertie

Publications (3)

Publication Number Publication Date
EP2056068A1 EP2056068A1 (fr) 2009-05-06
EP2056068A4 true EP2056068A4 (fr) 2009-11-25
EP2056068B1 EP2056068B1 (fr) 2012-11-14

Family

ID=39106739

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07792698A Not-in-force EP2056068B1 (fr) 2006-08-21 2007-08-20 Capteur de force d'inertie

Country Status (5)

Country Link
US (1) US20090320594A1 (fr)
EP (1) EP2056068B1 (fr)
JP (1) JP5205725B2 (fr)
CN (1) CN101506617B (fr)
WO (1) WO2008023653A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090064783A1 (en) 2006-01-24 2009-03-12 Matsushita Electric Industrial Co., Ltd. Inertial force sensor
WO2008035683A1 (fr) * 2006-09-21 2008-03-27 Panasonic Corporation Détecteur de vitesse angulaire
EP2330381A4 (fr) * 2008-10-07 2012-07-04 Panasonic Corp Élément de capteur de vitesse angulaire, capteur de vitesse angulaire et unité de capteur de vitesse angulaire utilisant tous deux l'élément de capteur de vitesse angulaire, et procédé de détection de signal pour unité de capteur de vitesse angulaire
EP2385343B1 (fr) * 2009-02-13 2018-07-25 Panasonic Intellectual Property Management Co., Ltd. Capteur de force d'inertie et élément de détection l'utilisant
JP2010190706A (ja) 2009-02-18 2010-09-02 Panasonic Corp 慣性力センサ
CN102725606A (zh) * 2010-01-29 2012-10-10 松下电器产业株式会社 角速度传感器
WO2011161958A1 (fr) * 2010-06-25 2011-12-29 パナソニック株式会社 Élément de détection de force d'inertie et capteur de force d'inertie utilisant cet élément
US9303993B2 (en) 2010-12-28 2016-04-05 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor
CN104981682A (zh) * 2013-02-08 2015-10-14 松下知识产权经营株式会社 电子设备
CN103994845B (zh) * 2013-02-19 2019-09-10 精工爱普生株式会社 力检测装置、机械手、以及移动体
JP6125914B2 (ja) * 2013-06-07 2017-05-10 日立オートモティブシステムズ株式会社 角速度センサ
JP6344033B2 (ja) 2014-04-22 2018-06-20 セイコーエプソン株式会社 角速度センサー、電子機器及び移動体
JP6610706B2 (ja) 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6627911B2 (ja) * 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6696530B2 (ja) 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP6627912B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996027135A1 (fr) * 1995-02-27 1996-09-06 Gert Andersson Dispositif de mesure de la vitesse angulaire dans une matiere monocristalline
EP0939296A2 (fr) * 1996-03-29 1999-09-01 Ngk Insulators, Ltd. Capteur gyroscopique à vibration, capteur combiné, et sa méthode de fabrication
US6119518A (en) * 1996-08-05 2000-09-19 Nippon Soken, Inc. Angular velocity sensor
EP1099930A2 (fr) * 1999-11-09 2001-05-16 Alps Electric Co., Ltd. Gyroscope et dispositif d'entrée
GB2370119A (en) * 2000-07-28 2002-06-19 Sagem Vibrating beam gyroscopic measuring apparatus with cruciform shaped base and piezoelectric excitation
US20030011283A1 (en) * 1997-09-08 2003-01-16 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device
US6520015B1 (en) * 1999-09-28 2003-02-18 Thales Avionics S.A. Tuning fork gyroscope

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3323361B2 (ja) * 1995-05-29 2002-09-09 アルプス電気株式会社 振動型ジャイロスコープ
DE19508769C1 (de) 1995-03-01 1996-08-29 Siemens Ag Verfahren zur Bestimmung des Drehsinnes eines Drehstromnetzes und Schaltungsanordnung zur Durchführung des Verfahrens
JPH08152328A (ja) * 1995-07-04 1996-06-11 Nippondenso Co Ltd 角速度センサ及びその使用方法
JPH09105634A (ja) * 1995-10-12 1997-04-22 Nippon Soken Inc 角速度センサ
JPH09178492A (ja) * 1995-12-27 1997-07-11 Kyocera Corp 圧電振動体
JPH1047966A (ja) * 1996-07-31 1998-02-20 Aisin Seiki Co Ltd 角速度センサ
JP3336605B2 (ja) * 1997-02-12 2002-10-21 トヨタ自動車株式会社 角速度センサ
JP3355998B2 (ja) * 1997-05-16 2002-12-09 株式会社村田製作所 振動ジャイロ
JP4004129B2 (ja) * 1998-02-09 2007-11-07 マイクロストーン株式会社 運動センサ
JP4112684B2 (ja) * 1998-06-01 2008-07-02 シチズンホールディングス株式会社 振動ジャイロ
JP2000074673A (ja) * 1998-08-27 2000-03-14 Miyota Kk 複合運動センサ
JP3998049B2 (ja) * 1999-09-13 2007-10-24 芳明 加藤 運動センサ振動体および振動ジャイロスコープ
JP2001194155A (ja) * 2000-01-13 2001-07-19 Yoshiro Tomikawa 運動センサ
JP4552253B2 (ja) * 2000-02-28 2010-09-29 パナソニック株式会社 角速度センサ
JP4305623B2 (ja) * 2002-03-13 2009-07-29 セイコーエプソン株式会社 振動子および振動型ジャイロスコープ
JP2004077351A (ja) * 2002-08-21 2004-03-11 Matsushita Electric Ind Co Ltd 角速度センサ
JP4163031B2 (ja) * 2003-03-28 2008-10-08 日本電波工業株式会社 音叉型角速度センサ
JP2005283402A (ja) * 2004-03-30 2005-10-13 Fujitsu Media Device Kk 慣性センサ
JP2006030125A (ja) * 2004-07-21 2006-02-02 Fujitsu Media Device Kk 角速度センサ
JP4687085B2 (ja) * 2004-12-03 2011-05-25 パナソニック株式会社 複合センサ
JP4415382B2 (ja) * 2005-01-20 2010-02-17 セイコーエプソン株式会社 振動ジャイロ素子、振動ジャイロ素子の支持構造およびジャイロセンサ
JP2006266969A (ja) * 2005-03-25 2006-10-05 Nec Tokin Corp 音叉形圧電振動ジャイロ
JP4702942B2 (ja) * 2005-10-14 2011-06-15 Ｎｅｃトーキン株式会社 振動ジャイロ用素子及び振動ジャイロ
JP4310325B2 (ja) * 2006-05-24 2009-08-05 日立金属株式会社 角速度センサ
JP2007327758A (ja) * 2006-06-06 2007-12-20 Nec Tokin Corp 圧電単結晶振動子および圧電振動ジャイロ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996027135A1 (fr) * 1995-02-27 1996-09-06 Gert Andersson Dispositif de mesure de la vitesse angulaire dans une matiere monocristalline
EP0939296A2 (fr) * 1996-03-29 1999-09-01 Ngk Insulators, Ltd. Capteur gyroscopique à vibration, capteur combiné, et sa méthode de fabrication
US6119518A (en) * 1996-08-05 2000-09-19 Nippon Soken, Inc. Angular velocity sensor
US20030011283A1 (en) * 1997-09-08 2003-01-16 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device
US6520015B1 (en) * 1999-09-28 2003-02-18 Thales Avionics S.A. Tuning fork gyroscope
EP1099930A2 (fr) * 1999-11-09 2001-05-16 Alps Electric Co., Ltd. Gyroscope et dispositif d'entrée
GB2370119A (en) * 2000-07-28 2002-06-19 Sagem Vibrating beam gyroscopic measuring apparatus with cruciform shaped base and piezoelectric excitation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2008023653A1 *

Also Published As

Publication number Publication date
JP5205725B2 (ja) 2013-06-05
JP2008046058A (ja) 2008-02-28
CN101506617A (zh) 2009-08-12
EP2056068B1 (fr) 2012-11-14
US20090320594A1 (en) 2009-12-31
EP2056068A1 (fr) 2009-05-06
WO2008023653A1 (fr) 2008-02-28
CN101506617B (zh) 2011-11-30

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