EP4379216B1 - Pompe à vide turbomoléculaire compacte - Google Patents

Pompe à vide turbomoléculaire compacte

Info

Publication number
EP4379216B1
EP4379216B1 EP24171527.5A EP24171527A EP4379216B1 EP 4379216 B1 EP4379216 B1 EP 4379216B1 EP 24171527 A EP24171527 A EP 24171527A EP 4379216 B1 EP4379216 B1 EP 4379216B1
Authority
EP
European Patent Office
Prior art keywords
pump
turbomolecular
rotor
stator
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP24171527.5A
Other languages
German (de)
English (en)
Other versions
EP4379216A1 (fr
EP4379216C0 (fr
Inventor
Florian Bader
Jan Hofmann
Daniel Reich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24171527.5A priority Critical patent/EP4379216B1/fr
Publication of EP4379216A1 publication Critical patent/EP4379216A1/fr
Priority to JP2024104851A priority patent/JP7787241B2/ja
Application granted granted Critical
Publication of EP4379216B1 publication Critical patent/EP4379216B1/fr
Publication of EP4379216C0 publication Critical patent/EP4379216C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2220/00—Application
    • F05D2220/30—Application in turbines
    • F05D2220/32—Application in turbines in gas turbines
    • F05D2220/321—Application in turbines in gas turbines for a special turbine stage
    • F05D2220/3216—Application in turbines in gas turbines for a special turbine stage for a special compressor stage
    • F05D2220/3217—Application in turbines in gas turbines for a special turbine stage for a special compressor stage for the first stage of a compressor or a low pressure compressor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet

Definitions

  • the present invention relates to a turbomolecular vacuum pump which, due to the inventive design of the most upstream turbomolecular pumping stage, has a particularly compact design without this leading to any loss of performance in the pumping speed of the pump.
  • the pumping speed of a turbomolecular vacuum pump is influenced by many parameters. These include, among others, the geometric parameters of the individual pump stages, in particular the geometric parameters of the rotor and stator disks, which together form a pump stage in pairs.
  • turbomolecular vacuum pump depends on the number of pumping stages. However, the more pumping stages are connected in series, the greater the axial height of the pump becomes. On the other hand, there are general efforts to keep the axial height of turbomolecular vacuum pumps as small as possible.
  • the invention is based on the objective of reducing the axial height of a turbomolecular vacuum pump without this leading to significant performance losses in the pumping speed of the pump.
  • H denotes the height of the rotor disk vanes measured parallel to the rotor shaft in the view
  • h denotes the height of the stator disk vanes measured parallel to the rotor shaft in the view.
  • the height H of the rotor disk vanes and the height h of the stator disk of the most upstream turbomolecular pumping stage are generally constant over the radial extent of the respective vane, as is the case when the vanes have a substantially rectangular shape and are inclined relative to the axis of the rotor shaft.
  • the height H of the rotor disk vanes and the height h of the stator disk vanes can also vary slightly in the radial direction.
  • the parameters H (or H 1 ) and h (or h 1 ) discussed here refer to the mean value of the respective wings.
  • the turbomolecular vacuum pump comprises a pump inlet, a pump outlet, and a pumping mechanism driven by a rotor shaft for conveying a process gas from the pump inlet to the pump outlet.
  • the pumping mechanism includes several turbomolecular pumping stages connected in series, each with a rotor disk and a stator disk downstream of the respective rotor disk.
  • Each rotor disk has several vanes extending radially from the rotor shaft, which, measured parallel to the rotor shaft and thus viewed in the axial direction, have a height H.
  • each stator disk has several vanes extending radially, which, measured parallel to the rotor shaft and thus viewed in the radial direction, have a height h.
  • the ratio H/h of the most upstream turbomolecular pump stage, or of the turbomolecular pump stage located closest to the pump inlet in the flow direction is: 3 ⁇ H/h ⁇ 5.
  • the vanes of the most upstream stator disk thus have a maximum height h that is at most one-third of the height H of the vanes of the most upstream rotor disk.
  • the vanes of the most upstream stator disk have a minimum height h that is at least 20% of the height H of the vanes of the most upstream rotor disk.
  • the blades of the respective stator disk are usually dimensioned so that their axial height is preferably not less than half the axial height of the blades of the associated rotor disk, since a decrease in pumping speed tends to occur with decreasing blade height of the stator disk furthest upstream.
  • the pumping speed can be maintained or even slightly improved compared to conventional design criteria. While it was observed that for ratios H/h such that approximately 2.5 ⁇ H/h, the pumping speed initially decreases as expected with decreasing blade height h of the stator disks, this decrease is noticeable from a ratio of approximately 3 onwards. However, it was surprisingly found according to the invention that the pumping speed again reaches values that are normally only achieved when the ratio H/h is approximately 1.7.
  • turbomolecular vacuum pump designed according to the inventive design principles therefore has a lower axial height with the same or even improved pumping speed.
  • the pumping speed even reaches a maximum value in the interval 3 ⁇ H/h ⁇ 5 according to the invention. Accordingly, the following preferably applies to the ratio H/h of the turbomolecular pump stage located furthest upstream: 3.2 ⁇ H/h ⁇ 4.5, in particular 3.3 ⁇ H/h ⁇ 4.1 and especially preferably 3.4 ⁇ H/h ⁇ 3.9.
  • the ratio H/h of the most upstream turbomolecular pumping stage should be selected such that: 3.2 ⁇ H/h ⁇ 3.8, and in particular 3.4 ⁇ H/h ⁇ 3.6.
  • the H/h ratio of the most upstream turbomolecular pump stage can be selected such that: 4.2 ⁇ H/h ⁇ 4.8, and in particular 4.4 ⁇ H/h ⁇ 4.6, since only minor performance losses in pumping speed are to be expected in this range. Only above 5 ⁇ H/h does the pumping speed decrease excessively; therefore, according to the invention, the height of the vanes of the most upstream stator disk should not be less than 20% of the height of the vanes of the most upstream rotor disk.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a receiver (not shown) can be connected in a manner known per se.
  • the gas from the receiver can be drawn out of the receiver via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms a Fig. 1
  • the housing 119 comprises a lower part 121, to which an electronics housing 123 is attached laterally.
  • the electronics housing 123 contains electrical and/or electronic components of the vacuum pump 111, e.g., for operating an electric motor 125 located in the vacuum pump (see also Fig. 3
  • the electronics housing 123 has several connections 127 for accessories.
  • a data interface 129 e.g. according to the RS485 standard, and a power supply connection 131 are located on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • the housing 119 of the turbomolecular pump 111 has a flood inlet 133, in particular in the form of a flood valve, through which the vacuum pump 111 can be flooded.
  • a purge gas connection 135, also referred to as a purge gas connection is arranged, through which purge gas is supplied to protect the electric motor 125 (see e.g. Fig. 3
  • the gas pumped by the pump can be introduced into the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111.
  • Two coolant connections 139 are also arranged in the lower part 121, one of which serves as an inlet and the other as an outlet for coolant that can be directed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) are operated exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a base, allowing the vacuum pump 111 to be operated standing upright on its underside 141.
  • the vacuum pump 111 can be attached to a receiver via the inlet flange 113 and thus operated in a suspended position.
  • the vacuum pump 111 can be designed to operate even when oriented differently than described. Fig. 1 As shown. It is also possible to implement embodiments of the vacuum pump in which the underside 141 can be arranged facing sideways or upwards instead of downwards. In principle, any angle is possible.
  • Mounting holes 147 are also arranged on the underside 141, via which the pump 111 can be attached to a support surface, for example. This is not possible with other existing turbomolecular vacuum pumps (not shown), which are particularly larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant introduced and removed via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119, which has a rotor shaft 153 rotatable about a rotation axis 151.
  • the turbomolecular pump 111 comprises several turbomolecular pump stages connected in series to provide pumping action. These stages have several radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119. Each rotor disk 155 and an adjacent stator disk 157 form a turbomolecular pump stage. The stator disks 157 are held at a desired axial distance from each other by spacer rings 159.
  • the vacuum pump also includes Holweck pump stages arranged radially within one another and connected in series to effectively pump the pump.
  • Other turbomolecular vacuum pumps exist (not shown) that do not have Holweck pump stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical Holweck rotor sleeves 163, 165 attached to and supported by the rotor hub 161, which are oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction. Furthermore, two cylindrical Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the outer surfaces, i.e., the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 faces the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171, and together they form the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169, forming a radial Holweck gap 173, and together they form a second Holweck pump stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175, and together they form the third Holweck pumping stage.
  • a radially extending channel can be provided, through which the radially outer Holweck slot 171 is connected to the central Holweck slot 173. Furthermore, a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, through which the central Holweck slot 173 is connected to the radially inner Holweck slot 175. This connects the nested Holweck pump stages in series.
  • a connecting channel 179 to the outlet 117 can be provided in the internal Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have several Holweck grooves spiraling around the axis of rotation 151 in the axial direction, while the opposite outer surfaces of the Holweck rotor sleeves 163, 165 are smooth and drive the gas forward in the Holweck grooves for the operation of the vacuum pump 111.
  • a rolling bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 is provided in the area of the pump inlet 115.
  • a conical injection nut 185 with an outer diameter increasing towards the rolling bearing 181 is provided on the rotor shaft 153.
  • the injection nut 185 is in sliding contact with at least one wiper of a fluid reservoir.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "injection tip" is also used in this context.
  • the operating fluid reservoir comprises several stacked absorbent discs 187, which are impregnated with an operating fluid for the rolling bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the wiper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 towards the rolling bearing 181, where it fulfills, for example, a lubricating function.
  • the rolling bearing 181 and the operating fluid reservoir are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each containing a ring stack of several axially stacked permanent magnet rings 195, 197.
  • the ring magnets 195, 197 face each other, forming a radial bearing gap 199, with the rotor-side ring magnets 195 arranged radially outside and the stator-side ring magnets 197 radially inside.
  • the magnetic field present in the bearing gap 199 induces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be radially supported.
  • the rotor-side ring magnets 195 are supported by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the stator-side ring magnets 197 are supported by a stator-side support section 203, which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a cover element 207 coupled to the support section 201.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a retaining ring 209 connected to the support section 203 and a retaining ring 211 also connected to the support section 203.
  • a disc spring 213 may also be provided between the retaining ring 211 and the ring magnets 197.
  • an emergency or catch bearing 215 is provided, which runs freely without contact during normal operation of the vacuum pump 111 and only engages in the event of excessive radial deflection of the rotor 149 relative to the stator, in order to form a radial stop for the rotor 149 and thus prevent a collision between the rotor-side and stator-side structures.
  • the catch bearing 215 is designed as an unlubricated rolling bearing and The rotor 149 and/or the stator form a radial gap, which causes the catch bearing 215 to be disengaged during normal pump operation.
  • the radial deflection at which the catch bearing 215 engages is dimensioned to be large enough so that the catch bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough to prevent a collision between the rotor-side and stator-side structures under all circumstances.
  • the vacuum pump 111 comprises the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, whose rotor shaft 153 extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded in the section of the rotor shaft 153 extending through the motor stator 217.
  • a space 219 is arranged between the motor stator 217 and the section of the rotor 149 extending through the motor stator 217. This space comprises a radial motor gap through which the motor stator 217 and the permanent magnet arrangement can magnetically influence each other to transmit the drive torque.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a purge gas also known as a sealing gas, which can be, for example, air or nitrogen, can enter the motor compartment 137 via the purge gas connection 135. This purge gas protects the electric motor 125 from process gas, e.g., from corrosive components of the process gas.
  • the motor compartment 137 can also be evacuated via the pump outlet 117, meaning that the vacuum pressure in the motor compartment 137 is at least approximately equal to that produced by the backing pump connected to the pump outlet 117.
  • a so-called labyrinth seal 223, which is known per se, can also be provided, in particular to achieve a better seal of the engine compartment 217 against the radially outside Holweck pump stages.
  • turbomolecular vacuum pump 111 The following section will discuss the inventive design and dimensioning of the previously described turbomolecular vacuum pump 111, and in particular its most upstream turbomolecular pumping stage, as well as the influence of this design on the pumping speed of the turbomolecular vacuum pump 111.
  • the turbomolecular vacuum pump 111 comprises several turbomolecular pumping stages connected in series to perform the pumping action. Each of these pumping stages is formed by a rotor disk 155 attached to the rotor shaft 153 and a stator disk 157 located downstream of the corresponding rotor disk 155 and fixed to the housing 119.
  • Downstream of this first pumping stage is a second pumping stage, which is also formed by a rotor disk 155 and a stator disk 157 located downstream of it.
  • Each rotor disk 155 has several radially extending blades, which are shown in the cross-sectional view of the Fig. 6 Viewed in the axial direction of the rotor shaft 153, they have a height H.
  • each stator disk 157 has several radially extending vanes, which are shown in the cross-sectional view of the Fig. 6
  • the rotor disk 155 of the first, or the most upstream, pumping stage is designated by H1
  • the height of the blades of the rotor disk 155 of the second, or downstream, pumping stage is designated by H2 .
  • the height of the blades of the stator disk 157 of the first pumping stage is subsequently designated by h1 .
  • the height H 1 or h 1 of the wings of the rotor disk 155 or the stator disk 157 of the most upstream turbomolecular pump stage is constant over the radial extent of the respective wings.
  • Table 1 refers to turbomolecular vacuum pumps of the applicant and Table 2 to turbomolecular vacuum pumps of the competition.
  • Tables 1 and 2 list, in the third and fourth rows respectively, the impeller heights H1 and h1 of the most upstream pump stage of various turbomolecular vacuum pumps, which are identified according to the relevant ISO standard ISO 1609 by the diameter of their respective inlet flange 113.
  • the sixth column of each table lists the ratio H1 / h1
  • the seventh row lists the corresponding capture probability of an N2 molecule. This value correlates with the pumping speed and, in particular, is linearly related to the pumping speed.
  • the capture probability of an N2 molecule was chosen because, unlike the pumping speed, it is independent of the pump size and thus of the inlet flange diameter 113, allowing the individual pumps to be directly compared regardless of the diameter of their respective inlet flanges 113.
  • the ratio H1 / h1 usually lies approximately in the range between 1 and 2, which means that so far the height h1 of the wings of the furthest upstream
  • the stator disk 157 was at least half as high as the height H1 of the rotor disk blades 155 of the most upstream turbomolecular pump stage.
  • This can also be seen in the following performance diagram, in which the capture probability according to Tables 1 and 2 is illustrated with triangle symbols as a function of the respective ratio H1 / h1 .
  • the molecular capture probability for an N 2 molecule tends to decrease with increasing H 1 / h 1 ratio, which had previously supported the assumption that, due to the tendentially decreasing pumping speed, it is not technically sensible to design the wings of the most upstream stator disk 157 with a height h 1 that is less than half the height H 1 of the wings of the rotor disk 155 of the most upstream pump stage.
  • turbomolecular pumping stage 4.2 ⁇ H1 / h1 ⁇ 4.8, in particular 4.4 ⁇ H1 / h1 ⁇ 4.6.
  • most upstream turbomolecular pumping stage such that: 3.2 ⁇ H1 /h1 ⁇ 3.8 , in particular 3.4 ⁇ H1 / h1 ⁇ 3.6.
  • the axial height of the turbomolecular vacuum pump 111 can be reduced without having to accept any loss of pumping speed if the most upstream turbomolecular pump stage is designed such that the impeller height ratio is: 3 ⁇ H 1 / h 1 ⁇ 5.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (4)

  1. Pompe à vide turbomoléculaire (111) comprenant une entrée de pompe (115), une sortie de pompe (117) et un mécanisme de pompage entraîné par un arbre de rotor (153) pour transporter un gaz de traitement de l'entrée de pompe (115) vers la sortie de pompe (117), le mécanisme de pompage comprenant, entre l'entrée de pompe (115) et la sortie de pompe (117), plusieurs étages de pompe turbomoléculaire connectés en série de manière efficace pour le pompage, chacun comprenant un disque de rotor (155) et un disque de stator (157) en aval du disque de rotor (155), chaque disque de rotor (155) comprenant plusieurs pales qui s'étendent radialement et présentent une hauteur H parallèlement à l'arbre de rotor (153), et chaque disque de stator (157) comprenant plusieurs pales qui s'étendent radialement et présentent une hauteur h parallèlement à l'arbre de rotor (153) ;
    caractérisée en ce que
    le rapport H / h de l'étage de pompe turbomoléculaire situé le plus en amont est tel que : 3 ≤ H / h ≤ 5.
  2. Pompe à vide turbomoléculaire (111) selon la revendication 1,
    dans laquelle le rapport H / h de l'étage de pompe turbomoléculaire situé le plus en amont est tel que : 3,2 ≤ H / h ≤ 4,5,
    en particulier, le rapport H / h de l'étage de pompe turbomoléculaire situé le plus en amont est tel que : 3,3 ≤ H / h ≤ 4,1, et
    de préférence, le rapport H / h de l'étage de pompe turbomoléculaire situé le plus en amont est tel que : 3,4 ≤ H / h ≤ 3,9.
  3. Pompe à vide turbomoléculaire (111) selon la revendication 1,
    dans laquelle le rapport H / h de l'étage de pompe turbomoléculaire situé le plus en amont est tel que : 3,2 ≤ H / h ≤ 3,8,
    en particulier, le rapport H / h de l'étage de pompe turbomoléculaire situé le plus en amont est tel que : 3,4 ≤ H / h ≤ 3,6 ; ou
    le rapport H / h de l'étage de pompe turbomoléculaire situé le plus en amont est tel que : 4,2 ≤ H / h ≤ 4,8,
    en particulier, le rapport H / h de l'étage de pompe turbomoléculaire situé le plus en amont est tel que : 4,4 ≤ H / h ≤ 4,6.
  4. Pompe à vide turbomoléculaire (111) selon l'une des revendications précédentes,
    dans laquelle la hauteur des pales du disque de rotor (155) et du disque de stator (157) de l'étage de pompe turbomoléculaire situé le plus en amont est constante sur toute l'extension radiale de la pale respective.
EP24171527.5A 2024-04-22 2024-04-22 Pompe à vide turbomoléculaire compacte Active EP4379216B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP24171527.5A EP4379216B1 (fr) 2024-04-22 2024-04-22 Pompe à vide turbomoléculaire compacte
JP2024104851A JP7787241B2 (ja) 2024-04-22 2024-06-28 コンパクトな構造を有するターボ分子真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP24171527.5A EP4379216B1 (fr) 2024-04-22 2024-04-22 Pompe à vide turbomoléculaire compacte

Publications (3)

Publication Number Publication Date
EP4379216A1 EP4379216A1 (fr) 2024-06-05
EP4379216B1 true EP4379216B1 (fr) 2026-02-18
EP4379216C0 EP4379216C0 (fr) 2026-02-18

Family

ID=90822579

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24171527.5A Active EP4379216B1 (fr) 2024-04-22 2024-04-22 Pompe à vide turbomoléculaire compacte

Country Status (2)

Country Link
EP (1) EP4379216B1 (fr)
JP (1) JP7787241B2 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
JP3978001B2 (ja) 2001-06-29 2007-09-19 三菱重工業株式会社 ターボ分子ポンプ
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe
DE102014112553A1 (de) * 2014-09-01 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP7048391B2 (ja) * 2018-03-30 2022-04-05 エドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
JP2025165354A (ja) 2025-11-04
EP4379216A1 (fr) 2024-06-05
JP7787241B2 (ja) 2025-12-16
EP4379216C0 (fr) 2026-02-18

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