EP3734078B1 - Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe - Google Patents

Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe Download PDF

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Publication number
EP3734078B1
EP3734078B1 EP20161194.4A EP20161194A EP3734078B1 EP 3734078 B1 EP3734078 B1 EP 3734078B1 EP 20161194 A EP20161194 A EP 20161194A EP 3734078 B1 EP3734078 B1 EP 3734078B1
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EP
European Patent Office
Prior art keywords
stator
pump
collar
disk
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20161194.4A
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German (de)
English (en)
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EP3734078A3 (fr
EP3734078A2 (fr
Inventor
Bernd Hofmann
Jan Hofmann
Mirko Mekota
Michael Schweighöfer
Florian Bader
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to EP20161194.4A priority Critical patent/EP3734078B1/fr
Priority to JP2020184349A priority patent/JP7016398B2/ja
Publication of EP3734078A2 publication Critical patent/EP3734078A2/fr
Publication of EP3734078A3 publication Critical patent/EP3734078A3/fr
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Publication of EP3734078B1 publication Critical patent/EP3734078B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/54—Building or constructing in particular ways by sheet metal manufacturing

Definitions

  • the present invention relates to a turbomolecular pump comprising: a rotor with a plurality of rotor blades distributed over its circumference, which can be driven to rotate about an axis of rotation in order to generate a pumping effect, and at least one stator disk, which has a plurality of rotor blades distributed over its circumference arranged stator blades and with which the rotor interacts to generate the pumping effect, wherein the stator blades of the stator disk are aligned obliquely with respect to a disk plane which runs perpendicular to the axis of rotation of the rotor.
  • the invention also relates to a method for producing a stator disk with a plurality of stator blades arranged distributed over its circumference for a turbomolecular pump.
  • a turbomolecular pump according to the preamble of claim 1 and a method according to the preamble of claim 7 are in JP 2003 269365 A disclosed. Further state of the art form the U.S. 2008/317590 A1 , the U.S. 3,748,055 A , and the WO 2007/004542 A1 .
  • Stator disks for turbomolecular pumps are usually either manufactured by cutting from a solid material, for example milled or sawn, or are made from sheet metal. When fabricated from sheet metal, the stator blades are typically stamped and then bent to align them obliquely with respect to a disk plane.
  • the plane of the pane is one which, when assembled Pump runs perpendicular to the axis of rotation of the rotor, and is defined, for example, by at least one collar of the stator disc.
  • stator disks from sheet metal is particularly cost-effective, but has the disadvantage that, with comparable performance, more axial installation space is required for stator disks made from sheet metal than for stator disks produced by machining.
  • the reason for this is that the different manufacturing processes lead to different geometries of the stator blades.
  • turbomolecular pump having the features according to claim 1, and in particular in that at least one stator blade has a flattening on at least one axial end.
  • the material of the stator blade is flattened precisely where it defines the axial installation space of the stator blade and plays a relatively minor role in relation to the pump performance, in particular where it has at least essentially no active pumping effect.
  • a flattening can be produced with simple means, so that the invention enables the installation space to be optimized with at least essentially the same pump performance using structurally particularly simple means.
  • the flattening is produced by material displacement.
  • axial generally refers to the axis of rotation of the rotor or a direction parallel thereto.
  • the axial end is thus axially at the highest or lowest point of the stator blade in an upright pump.
  • a pumping direction is also typically at least essentially parallel to the axis of rotation, so that the axial ends of the stator disk form in particular an upstream end and a downstream end.
  • the at least one stator blade can, for example, only have a flattened area on one axial end, or a flattened area can be provided, for example, on two opposite axial ends.
  • the flattening comprises an at least essentially flat surface.
  • Such a surface can be produced with simple means and thus enables a relatively large amount of installation space to be saved in a simple manner.
  • the surface can preferably run at least essentially parallel to the pane plane. This enables a particularly large saving in installation space.
  • the flattening can extend over the entire length of the stator blade.
  • the length of the stator blade corresponds to its extent in at least a substantially radial direction, with the term “radial” referring to the axis of rotation of the rotor.
  • the axial end may be an upstream end or a downstream end of the stator blade. But it is also possible that both an upstream end and a downstream end of the stator blade have a flattening. In this case, the space savings can be achieved twice over.
  • stator blades of the stator disk can have a flattening, in particular at the corresponding axial end, that is to say all at the upstream end and/or at the downstream end.
  • a turbomolecular pump often has multiple stator disks. It is particularly advantageous here if several or all of the stator disks have stator blades with flattening.
  • the object of the invention is also achieved by a method for producing a stator disk according to the independent claim directed thereto.
  • This is used to produce a stator disk with a plurality of stator blades distributed over its circumference for a turbomolecular pump, in particular one of the type described above, and includes that the stator disk is made of sheet metal, the stator blades of the stator disk in relation to an extension plane of the sheet metal are aligned obliquely, and that at least one stator blade is flattened at least at one end with respect to a normal to the plane of extension of the sheet metal.
  • the invention also includes a corresponding manufacturing method for a turbomolecular pump with a stator disk manufactured in this way.
  • the plane of extent of the metal sheet preferably corresponds to a disc plane which is perpendicular to the axis of rotation, in particular when the pump is assembled.
  • a collar which carries the stator blade, remains in the plane of extent of the metal sheet.
  • flattening includes forming by means of cold forming and/or pressing.
  • the stator vane is not flatly bent, but rather compressed essentially in the cross section of the stator disk.
  • the material is deformed in a flowing manner and/or by extrusion.
  • the material of the stator blade is pushed on so that it bulges in an area adjacent to the axial end.
  • a forming and/or pressing force can be applied to the stator blade or to the end, at least essentially parallel to the normal or axis of rotation of the rotor.
  • the stator blade can preferably be supported on a flat side facing away from the flattening, preferably flat.
  • flattening can take place in particular at a corner of a cross section of the stator blade.
  • a section of material is preferably removed from its position at the relevant corner.
  • the section of material to be removed is preferably at least essentially triangular in cross section.
  • the above-mentioned area of the flattening defines in particular one side of this triangle, namely in particular one that faces a centroid of the area of the stator blade in relation to the cross section of the same.
  • the stator blade has a first flat side that faces in the same direction with respect to the normal as the flattened end.
  • the stator blade can have a second flat side that points in the opposite direction.
  • the pumping direction it is in particular an upper or first side in the pumping direction and a lower or second side in the pumping direction.
  • the flat sides are generally oriented obliquely but face one of the two opposite directions along the normal, that is, they point in the corresponding direction.
  • the flattening includes that a material of the stator blade is displaced, in particular mainly, in the direction of the first flat side, in particular in a flowing manner.
  • This can in particular form a projection and/or a bead and/or be arranged in particular directly at the flattening.
  • the first flat side is in particular a top of the vane in the upright pump and/or an upstream flat side, in particular the end in question being an upstream end.
  • the end on the downstream side can also be flattened, in particular with an accumulation of material being produced on the flat side on the downstream side.
  • stator blades can be formed by stamping and/or canted by bending.
  • Flattening can, for example, be an additional process step or part of an additional process step or, in principle, can also be provided in a process step with the forming and/or aligning. In principle, the flattening can take place in particular before, during and/or after the punching and/or bending.
  • the stator blades are carried by at least one collar, in particular an inner and/or outer collar.
  • the collar is axially off-center with respect to at least one stator blade.
  • the collar can be arranged axially off-center in relation to all the stator blades of the stator disk.
  • the collar is therefore in particular not at the level of the axial center of the blade, but is arranged axially offset thereto.
  • the off-centre arrangement allows a simplification of the assembly and in particular the disassembly of the pump.
  • the eccentric arrangement of the collar makes it easier to remove the stator disc from the pump.
  • the stator disk in which the stator disk is guided out radially between two rotor disks for the purpose of disassembly or inserted for the purpose of assembly—the stator disk in particular has at least two separable ring segments—thereby on the axial side to which the collar is offset ,
  • the risk of collision with another stator element, in particular a spacer ring is reduced because the stator blades are then axially shorter there.
  • a certain assembly sequence usually allows no such element, in particular a spacer ring, to be arranged on this other axial side when the relevant stator disk is "turned" for removal.
  • a stator disc can have an outer collar and/or an inner collar, for example.
  • an outer collar and an inner collar of the stator disk can be arranged at the same or different axial heights.
  • the terms “outside” and “inside” refer here to the axis of rotation of the rotor, meaning radially outside and radially inside.
  • the collar is axially off-center with respect to a plurality, particularly all, of the stator blades. This preferably applies to the entire waistband and/or to an outer and/or inner waistband.
  • the stator blades can be arranged in particular at the same axial height.
  • a collar can be ring-shaped, for example, in particular continuously ring-shaped or with several ring segments.
  • an inner collar can be continuously ring-shaped and an outer collar can be formed with several ring segments.
  • the stator disc itself can preferably be made from ring segments, i.e. "continuous" then refers to the relevant ring segment of the stator disc.
  • the stator disc is made of sheet metal, in particular by means of
  • a stator disc can, for example, be composed of at least two partial rings, in particular half rings.
  • the 1 Turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, at which in a known manner Way a recipient, not shown, can be connected.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (cf. also 3 ). Several connections 127 for accessories are provided on the electronics housing 123 .
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection through which flushing gas to protect the electric motor 125 (see e.g 3 ) before the pumped gas in the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, can be admitted.
  • Two coolant connections 139 are also arranged in the lower part 121, with one of the coolant connections as an inlet and the other coolant connection is provided as an outlet for coolant that can be directed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate solely on air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be operated when it is oriented in a different way than in FIG 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 cannot be arranged facing downwards but to the side or directed upwards. In principle, any angles are possible.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • fastening bores 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), which in particular are larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • Other turbomolecular vacuum pumps (not shown) exist that do not have Holweck pumping stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested in one another as seen in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and forming with it the first Holweck pump stage following the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and therewith forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can be provided at the lower end of the radially inner Holweck rotor sleeve 165 .
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite Lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and drive the gas to operate the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181 .
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the resource reservoir comprises a plurality of absorbent discs 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir to the rotating spray nut 185 via the scraper and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, each of which has a ring stack made up of a plurality of permanent-magnetic rings 195, 197 include.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 produces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support section 203 on the stator side, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119 .
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201 .
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 211 connected to the support section 203 .
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form, so that a collision of the rotor-side structures is prevented with the stator-side structures.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures is prevented under all circumstances.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can get into the engine compartment 137 via the sealing gas connection 135 .
  • the sealing gas can protect the electric motor 125 from process gas, e.g. from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor compartment 137, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages located radially outside.
  • FIGS. 6 to 11 show stator blades or stator discs in a highly schematic representation.
  • the stator discs 157 of the turbomolecular pump 111 of Figures 1 to 5 can be designed according to the invention, ie the invention can be used in a turbomolecular pump, as is based on the Figures 1 to 5 has been described.
  • FIGS. 6 and 7 serve to illustrate the state of the art. Both show a stator blade 20 in a cross section, namely with a sectional plane transverse to a direction of extension of the stator blade. This direction of extension runs radially in the pump in relation to the axis of rotation of the rotor.
  • the axis of rotation of the rotor is in the Figures 6 to 11 indicated by the dashed line 21.
  • the sectional plane of the cross section shown here runs parallel to the axis of rotation 21 of the rotor, not shown here, which runs vertically here and in the other figures. Consequently, the blades 20 are inclined relative to a plane (not shown) perpendicular to the axis of rotation 21, which is horizontal in the cross-section shown.
  • the stator disks in turbomolecular pumps are often milled from a solid block.
  • the stator blade 20 of 6 is made by cutting, for example by milling and/or sawing.
  • a flat disk made of solid material is sawn or milled radially in such a way that the multiple blades remain in place.
  • the stator blade 20 has flat ends 22 and 24 that are perpendicular to the axis of rotation 21 and thus run horizontally and are axial with respect to the axis of rotation 21 . These arise in particular from the usually flat faces of the pane before the milling or sawing process.
  • 7 12 illustrates a known sheet metal stator blade 20 which is typically first formed from flat sheet metal by stamping and then bent into the skewed orientation illustrated herein.
  • the axial ends 22 and 24 with respect to the axis of rotation 21 are not flat, as is the case with the stator blade 20 in FIG 6 the case is, but essentially angular.
  • the stator blade 20 of 7 has in particular a substantially rectangular cross-section, the corners of the rectangle forming the axial ends 22, 24 of the stator blade 20.
  • each blade differs depending on the manufacturing process: the milled or sawn blade 20 of FIG 6 is parallelogram-shaped in cross-section.
  • the shovel 20 stamped from sheet metal 7 is rectangular in cross section.
  • the blade 20 of 7 Due to the different cross-sectional shapes, the blade 20 of 7 a larger axial space with the same pumping effect than that of 6 . In other words, with the same axial gaps or with the same axial height, the pump-effective height of the blade 20 or the stator disk is 7 smaller.
  • the aim is to replace stator discs in existing pumps, ie to improve existing pump constructions in accordance with the object of the invention, only a certain amount of space is available axially.
  • the aim is to change the contour of the stator blade made from sheet metal in such a way that that they are as close as possible to the milled contour - especially as in 6 - comes up.
  • the material triangle of the rectangular cross section protruding at the axial end is flattened so that the blade contour now approaches the shape of a parallelogram.
  • stator blade 20 with a rectangular cross-section compared to the 7 shown enlarged.
  • axial end 22 may be an upstream end and axial end 24 may be a downstream end of stator blade 20 .
  • a region 26 of the illustrated cross-section is marked which is essentially triangular.
  • the material of the stator blade 20 in this area 26 is largely irrelevant for the pumping effect of the stator blade 20 or the stator disk, ie it is superfluous.
  • the pumping direction 28 is marked here by an arrow.
  • the pumping direction 28 runs, in particular, parallel to the axis of rotation 21 of the rotor, which is not shown here.
  • the stator blade 20 of 9 therefore has a flattening 32 according to the invention at the axial end 22 . Through this is the area 26 with excess Material is significantly smaller and in particular the axial height of the stator blade 20 and the relevant stator disk is reduced.
  • the flattening 32 is designed here as an at least essentially flat surface based on the three-dimensional extent of the stator blade 20 .
  • the flattening 32 or the surface runs over the entire radial extension, ie over the entire radial length, of the stator blade 20.
  • the surface of the flattening 32 runs perpendicular to the axis of rotation 21 of the rotor of the turbomolecular pump in this embodiment.
  • the axial space gain corresponds to the axial distance of the surface to the upper point of the triangle in 8 , When it is in 9 is projected. This triangle is in 9 indicated in phantom and its upstream tip is indicated at 22'.
  • the flattening 32 can be produced in different ways.
  • the axial end 22 can be ground off.
  • the stator blade 20 in 9 Illustrating the stator blade 20 as one that has been flattened not by grinding but by forming, namely extrusion. A forming force was applied, in particular, essentially perpendicularly to the disk plane or parallel to the axis of rotation 21 of the rotor, in 9 top down, upset.
  • the material of the area 26 or the stator blade 20 is formed in such a way that it is in an area that extends beyond the in 8 area 26 marked as a triangle extends laterally, namely laterally next to the flattening 32 in such a way that the axial overall height of the stator blade 20 does not increase despite the bead 34 resulting therefrom.
  • the stator blade 20 was preferably supported areally on the flat side 30 .
  • the ridge 34 is located on a flat side 36 , which is the upstream flat side here, and which faces in the same axial direction as the end 22 .
  • the bead 34 is arranged at least essentially in such a way that it does not affect the pumping action of the stator blade 20 . This is because the pumping effect is essentially determined by the flat side 30 on the downstream side. However, a comparison shows that in 9 the area 26 with excess material is significantly smaller axially than that of 8 . The axial installation space of the stator blade 20 or of the stator disk can thus be reduced in a simple manner by the flattening 32, and specifically without negative effects on the pump performance.
  • the excess material or that of the area 26 is pressed into an area where it is no longer a problem, namely not a problem with regard to the axial installation space and the pumping effect.
  • the material is preferably pressed against the fluidic rear side, such as here against the flat side 36, where it no longer interferes.
  • the flattening of the blade angle increases the gain from flattening. With blade angles of approx. 10°, as can be provided in the fore-vacuum area, the excess or disturbing triangle can make up up to 1/3 of the total height.
  • stator vanes 20 are not to scale but are adjusted for purposes of illustration.
  • the length of the rectangular cross-section in an actual stator blade 20, ie the width of the flat sides 30 and 36, is significantly larger in relation to the flattening than shown.
  • downstream end 24 can also have a flattening, but this is not shown. To that extent it is also possible to press away the disturbing triangle on the underside of the disk or blade 20 .
  • a stator disc 38 is shown in simplified form, which includes a collar 40 and a plurality of stator blades 20 connected to the collar 40 .
  • the waistband 40 can be, for example, an inner and/or outer waistband.
  • the collar 40 is axially centered with respect to the stator blades 20 as is conventional in the art.
  • FIG. 11 illustrates a stator disk 38 in which the collar 40 is axially off-center with respect to the stator blades 20.
  • FIG. With respect to a pumping direction 28, which is 11
  • the collar 40 is arranged overall and with its axial center after or downstream of the axial center of the stator blade.
  • a connection point between the collar 40 and the stator blade 20 is located at the axial height of the collar 40 and is therefore also arranged after the axial center of the stator blade 20 .
  • the blade plane that is to say the plane of the axial blade center points, is consequently not positioned centrally in relation to the collar 40 but is shifted axially and is therefore asymmetrical.
  • the pane 38 can be removed more easily during disassembly, since the probability of a collision of the 11 lower blade sections is reduced with other components.
  • the stator discs 38 of Figures 10 and 11 may be made of sheet metal, for example, and are shown here with pointed axial ends 22 and 24, similar to Fig Figures 7 and 8 .
  • the axial direction or the axis of rotation 21 runs again vertically, as in FIGS Figures 6 to 9 . Consequently, here too the blades 20 are inclined with respect to a disk plane (not shown) which runs perpendicularly to the axis of rotation 21 and in which the collar 40 lies and which consequently runs horizontally.
  • a disk plane not shown
  • the axial ends 22 and/or 24 can also have a flattening, for example one according to the invention as in FIG 9 shown, in particular to save axial space.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (14)

  1. Pompe turbomoléculaire (111) comprenant :
    un rotor (149) qui présente une pluralité d'aubes de rotor disposées en répartition sur sa périphérie et qui peut être entraîné en rotation autour d'un axe de rotation (21, 151), afin d'engendrer un effet de pompage, et
    au moins un disque de stator (38, 157) qui présente une pluralité d'aubes de stator (20) disposées en répartition sur sa périphérie et avec lequel le rotor (149) coopère pour engendrer l'effet de pompage,
    dans laquelle
    les aubes de stator (20) du disque de stator (38, 157) sont orientées en oblique par rapport à un plan de disque qui s'étend perpendiculairement à l'axe de rotation (21, 151) du rotor (149),
    le disque de stator (38, 157) est fabriqué en tôle, et
    au moins une aube de stator (20) présente un aplatissement (32) à au moins une extrémité axiale (22, 24), c'est-à-dire à une extrémité par rapport à une normale au plan de disque,
    l'aube de stator (20) présente une première face plate (36) dirigée dans la même direction par rapport à la normale que l'extrémité aplatie (22),
    caractérisée en ce que
    l'aube de stator présente une accumulation de matière (34) sur la première face plate.
  2. Pompe turbomoléculaire (111) selon la revendication 1,
    dans laquelle l'aplatissement (32) présente une surface au moins sensiblement plane.
  3. Pompe turbomoléculaire (111) selon la revendication 1 ou 2,
    dans laquelle ladite surface s'étend au moins sensiblement parallèlement au plan de disque.
  4. Pompe turbomoléculaire (111) selon l'une au moins des revendications précédentes,
    dans laquelle l'aplatissement (32) s'étend sur toute la longueur de l'aube de stator (20), et la longueur de l'aube de stator (20) correspond à son extension au moins sensiblement en direction radiale par rapport à l'axe de rotation (21, 151) du rotor (149).
  5. Pompe turbomoléculaire (111) selon l'une au moins des revendications précédentes,
    dans laquelle l'extrémité axiale est une extrémité amont (22) ou une extrémité aval (24) de l'aube de stator (20), ou à la fois une extrémité amont (22) et une extrémité aval (24) de l'aube de stator (20) présentent un aplatissement (32).
  6. Pompe turbomoléculaire (111) selon l'une au moins des revendications précédentes,
    dans laquelle toutes les aubes de stator (20) du disque de stator (38, 157) présentent au moins un aplatissement (32).
  7. Procédé de fabrication d'un disque de stator (38, 157) comportant une pluralité d'aubes de stator (20) disposées en répartition sur sa périphérie pour une pompe turbomoléculaire (111), en particulier une pompe turbomoléculaire selon l'une des revendications précédentes ;
    dans lequel
    le disque de stator (38, 157) est fabriqué en tôle,
    les aubes de stator (20) du disque de stator (38, 157) sont orientées en oblique par rapport à un plan d'extension de la tôle, et
    au moins une aube de stator (20) est aplatie à au moins une extrémité (22, 24) par rapport à une normale au plan d'extension de la tôle,
    l'aube de stator (20) présente une première face plate (36) dirigée dans la même direction par rapport à la normale que l'extrémité aplatie (22), caractérisé en ce que
    l'opération d'aplatissement comprend un déplacement de matière de l'aube de stator (20) en direction de la première face plate (36), de manière à former une accumulation de matière (34) sur la première face plate.
  8. Procédé selon la revendication 7,
    dans lequel l'opération d'aplatissement comprend une mise en forme par pressage.
  9. Procédé selon l'une au moins des revendications 7 et 8,
    dans lequel les aubes de stator (20) sont formées par poinçonnage et/ou sont orientées en oblique par cintrage, et l'opération d'aplatissement est une étape de procédé supplémentaire ou une partie d'une étape de procédé supplémentaire.
  10. Pompe turbomoléculaire (111) selon l'une des revendications 1 à 6, dans laquelle les aubes de stator (20) sont portées par au moins une collerette (40), en particulier par une collerette intérieure et/ou extérieure, la collerette (40) est disposée de façon excentrée axialement par rapport à au moins une aube de stator (20), en particulier par rapport à toutes les aubes de stator (20) du disque de stator (38, 157).
  11. Pompe turbomoléculaire (111) selon la revendication 10,
    dans laquelle la collerette (40), un emplacement de jonction entre la collerette (40) et l'aube de stator respective (20) et/ou un centre axial de la collerette (40) sont disposés en amont ou en aval du centre axial de l'aube de stator (20) par rapport à une direction de pompage (28).
  12. Pompe turbomoléculaire (111) selon la revendication 10 ou 11,
    dans laquelle des collerettes extérieure et intérieure (40) du disque de stator (38, 157) sont disposées à une hauteur axiale identique ou différente.
  13. Pompe turbomoléculaire (111) selon l'une au moins des revendications 10 à 12,
    dans laquelle la collerette (40), en particulier toute une collerette intérieure et/ou extérieure, est disposée de façon excentrée par rapport à plusieurs aubes de stator (20), en particulier par rapport à toutes les aubes de stator.
  14. Pompe turbomoléculaire (111) selon l'une au moins des revendications 10 à 13,
    dans laquelle la collerette (40) est de forme annulaire continue ou est réalisée avec plusieurs segments d'anneau.
EP20161194.4A 2020-03-05 2020-03-05 Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe Active EP3734078B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP20161194.4A EP3734078B1 (fr) 2020-03-05 2020-03-05 Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe
JP2020184349A JP7016398B2 (ja) 2020-03-05 2020-11-04 ターボ分子ポンプとターボ分子ポンプ用のステータディスクを製造するための方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20161194.4A EP3734078B1 (fr) 2020-03-05 2020-03-05 Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe

Publications (3)

Publication Number Publication Date
EP3734078A2 EP3734078A2 (fr) 2020-11-04
EP3734078A3 EP3734078A3 (fr) 2020-12-23
EP3734078B1 true EP3734078B1 (fr) 2022-01-12

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JP (1) JP7016398B2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4325061B1 (fr) * 2023-12-20 2025-11-12 Pfeiffer Vacuum Technology AG Pompe à vide turbomoléculaire
JP2025136809A (ja) 2024-03-08 2025-09-19 株式会社島津製作所 真空ポンプ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
JP3484371B2 (ja) * 1999-03-30 2004-01-06 ビーオーシーエドワーズテクノロジーズ株式会社 ターボ分子ポンプ
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
WO2007004542A1 (fr) * 2005-07-01 2007-01-11 Boc Edwards Japan Limited Pompe turbomoléculaire
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
JP6241223B2 (ja) * 2013-03-13 2017-12-06 株式会社島津製作所 真空ポンプ

Also Published As

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JP2021139361A (ja) 2021-09-16
EP3734078A3 (fr) 2020-12-23
JP7016398B2 (ja) 2022-02-04
EP3734078A2 (fr) 2020-11-04

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