EP3914946A1 - Dispositif de maintien pour une fibre optique - Google Patents

Dispositif de maintien pour une fibre optique

Info

Publication number
EP3914946A1
EP3914946A1 EP20711038.8A EP20711038A EP3914946A1 EP 3914946 A1 EP3914946 A1 EP 3914946A1 EP 20711038 A EP20711038 A EP 20711038A EP 3914946 A1 EP3914946 A1 EP 3914946A1
Authority
EP
European Patent Office
Prior art keywords
capacitive sensor
optical fiber
sensor elements
holding device
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20711038.8A
Other languages
German (de)
English (en)
Inventor
Axel Grabowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physik Instrumente PI Se and Co KG
Original Assignee
Physik Instrumente PI Se and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physik Instrumente PI Se and Co KG filed Critical Physik Instrumente PI Se and Co KG
Publication of EP3914946A1 publication Critical patent/EP3914946A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object

Definitions

  • the optical fiber When one or more of the optical fiber is mentioned in the following, it does not necessarily mean a single fiber, but also a bundle of optical fibers, for example in an array arrangement. A an explicit distinction is only made if it is deemed necessary for an understanding of the relevant part of the description.
  • the optical fiber can either be used to couple light emitted therefrom, for example into an optical element of a substrate or wafer, or light from such an optical element can be coupled into the fiber, for example.
  • Distance sensor for positioning a fiber array with respect to a wafer in which a plurality of optical fibers arranged parallel to one another are arranged on a fiber array holder, and A capacitive sensor for determining a distance between the facets of the optical fibers and optical elements of the wafer is arranged on the fiber array holder at a distance from the fibers.
  • Main extension direction of the arm section on the one hand, the determination of a distance between the optical fiber and an element or a structure, and on the other hand, the determination of a tilt of the arm portion about an axis that is parallel to the
  • Main direction of extent of the arm section are arranged one behind the other, so that the distance between the two capacitive
  • Sensor elements is different from an optical fiber arranged on the holding portion. Such an arrangement of the capacitive sensor elements, which are essentially parallel to the
  • Sensor elements can be arranged or attached to the corresponding surface of the arm section without completely or partially submerging them therein. This allows a particularly simple way of manufacturing the holding device with compact dimensions at the same time.
  • the invention also relates to a method for simultaneous
  • FIG. 3 Representation to illustrate the measurement problem with a tilted folding device according to FIG. 2, a fiber array being arranged on the folding device
  • Positioning device 201 is essentially identical to the distance of the optical fiber 204 from the positioning device 201, and not - as shown in FIG. 2 - behind the optical fiber, so that the distance of the capacitive sensor from the positioning device is smaller than the distance of the optical fiber from the positioning device is normally undesirable, since typically not only one such folding device or a corresponding positioning system is used in an arrangement above the wafer, but two or more, whereby, for example, light is coupled into the wafer via the optical fiber of a folding device , and the light coupled into the wafer is coupled out again via the optical fiber of another folding device.
  • the fiber should form the sole foremost point, ideally the foremost tip of the folding device.
  • FIG. 8 shows five different ones
  • each capacitive sensor element 10 measures on its own against a counter electrode which has a defined potential.
  • the holding element 55 is also designed in the form of a semicircle or as a semicircular disk and lies with its flat sides or surfaces on the Holding surface 51. In the center of the holding element 55 there is an opening through which the optical fiber 2 protrudes, which by means of the holding element 55 is attached to the arm section 4 or to its
  • Holding section 7 is arranged.
  • Holding device in which the two capacitive sensor elements 10, each having a sensor electrode surface 115 and a protective electrode surface 116, have a circular shape and are arranged in an adjacent arrangement on the side surface 9 in the region of the holding section 7 such that they are partially in the
  • Sensor elements 10 are arranged symmetrically with respect to the main direction of extent HE, while the third capacitive sensor element 10 is arranged behind one of the two aforementioned capacitive sensor elements 10 in a direction parallel to the main direction of extent HE.
  • the capacitive sensor elements 10 shown may have other geometric shapes, for example the square shape shown in FIG. 7b).

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manipulator (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

L'invention concerne un dispositif de maintien (1) pour une fibre (2) optique ou un faisceau de fibres ou un réseau de fibres destiné(e) à être disposé(e) sur un dispositif de positionnement (3). Le dispositif de maintien (1) comprend une section de bras (4) et une section de maintien (5). Une extrémité proximale (6) de la section de bras (4) est réalisée pour être disposée sur le dispositif de positionnement (3). La section de maintien (5) servant à maintenir la fibre (2) optique se trouve sur une extrémité distale (7) de la section de bras (4). Au moins deux éléments de capteur (10) capacitifs en forme de plaque ou de disque, lesquels servent à définir simultanément une distance et une position entre la fibre (2) optique et un élément ou une structure, par rapport auquel ou à laquelle la fibre (2) optique peut être positionnée, sont disposés sur la section de bras (4) de manière adjacente à la fibre (2) optique.
EP20711038.8A 2019-02-06 2020-02-05 Dispositif de maintien pour une fibre optique Withdrawn EP3914946A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019102965.1A DE102019102965A1 (de) 2019-02-06 2019-02-06 Haltevorrichtung für eine optische Faser
PCT/DE2020/100070 WO2020160731A1 (fr) 2019-02-06 2020-02-05 Dispositif de maintien pour une fibre optique

Publications (1)

Publication Number Publication Date
EP3914946A1 true EP3914946A1 (fr) 2021-12-01

Family

ID=69810498

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20711038.8A Withdrawn EP3914946A1 (fr) 2019-02-06 2020-02-05 Dispositif de maintien pour une fibre optique

Country Status (5)

Country Link
EP (1) EP3914946A1 (fr)
JP (1) JP3235999U (fr)
CN (1) CN217739555U (fr)
DE (1) DE102019102965A1 (fr)
WO (1) WO2020160731A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12455213B2 (en) * 2023-02-01 2025-10-28 Rtx Corporation Measurement system having a capacitance probe and an optical probe
US12553796B2 (en) 2023-03-14 2026-02-17 Rtx Corporation Measurement system having a probe for measuring parameters of a turbine engine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011080309A1 (fr) * 2009-12-31 2011-07-07 Mapper Lithography Ip B.V. Système de détection capacitive avec paires différentielles

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10256634B4 (de) * 2002-02-15 2005-03-24 Schleifring Und Apparatebau Gmbh Optischer Drehübertrager mit freiem Innendurchmesser
US7184626B1 (en) 2003-04-07 2007-02-27 Luxtera, Inc Wafer-level testing of optical and optoelectronic chips
JP4315420B2 (ja) * 2003-04-18 2009-08-19 キヤノン株式会社 露光装置及び露光方法
US7242829B2 (en) * 2005-07-01 2007-07-10 Matsushita Electric Industrial Co., Ltd. Method and apparatus for integrated optical fiber sensing with nanometer precision
US20170123159A1 (en) * 2015-10-28 2017-05-04 Dritan Celo Alignment system for optical coupling assembly

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011080309A1 (fr) * 2009-12-31 2011-07-07 Mapper Lithography Ip B.V. Système de détection capacitive avec paires différentielles

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ANONYMOUS: "Kapazitive Sensorphasen und nicht geerdete Ziele", 1 January 2013 (2013-01-01), pages 1 - 7, XP055883081, Retrieved from the Internet <URL:https://www.lionprecision.com/de/capacitive-sensor-phasing-and-ungrounded-targets/> [retrieved on 20220124] *
See also references of WO2020160731A1 *

Also Published As

Publication number Publication date
JP3235999U (ja) 2022-01-21
DE102019102965A1 (de) 2020-08-06
CN217739555U (zh) 2022-11-04
WO2020160731A1 (fr) 2020-08-13

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