EP4027081A3 - Vorrichtung und verfahren zur kryogenfreien kühlung - Google Patents

Vorrichtung und verfahren zur kryogenfreien kühlung Download PDF

Info

Publication number: EP4027081A3
Authority: EP; European Patent Office
Prior art keywords: holding device; sample holding; free cooling; sample; vacuum chamber
Prior art date: 2009-03-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP22154522.1A

Other languages

English (en)

French (fr)

Other versions

EP4027081A2 (de

EP4027081B1 (de

Inventor

John Garside

Simon Kingley

Gavin Crowther

Matthias Buehler

Doreen Wernicke

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Oxford Instruments Nanotechnology Tools Ltd

Original Assignee

Oxford Instruments Nanotechnology Tools Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-03-16

Filing date

2010-03-15

Publication date

2022-08-31

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=40637422&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP4027081(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

2010-03-15 Application filed by Oxford Instruments Nanotechnology Tools Ltd filed Critical Oxford Instruments Nanotechnology Tools Ltd

2010-03-15 Priority to EP22205298.7A priority Critical patent/EP4148353B1/de

2022-07-13 Publication of EP4027081A2 publication Critical patent/EP4027081A2/de

2022-08-31 Publication of EP4027081A3 publication Critical patent/EP4027081A3/de

2022-12-21 Application granted granted Critical

2022-12-21 Publication of EP4027081B1 publication Critical patent/EP4027081B1/de

Status Active legal-status Critical Current

2030-03-15 Anticipated expiration legal-status Critical

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Mechanical Engineering (AREA)
Thermal Sciences (AREA)
General Engineering & Computer Science (AREA)
Chemical & Material Sciences (AREA)
Combustion & Propulsion (AREA)
Sampling And Sample Adjustment (AREA)
Separation By Low-Temperature Treatments (AREA)

EP22154522.1A 2009-03-16 2010-03-15 Vorrichtung und verfahren zur kryogenfreien kühlung Active EP4027081B1 (de)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
EP22205298.7A EP4148353B1 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
GBGB0904500.6A GB0904500D0 (en)	2009-03-16	2009-03-16	Cryofree cooling apparatus and method
EP19187223.3A EP3620732B2 (de)	2009-03-16	2010-03-15	Vorrichtung und verfahren zur kryogenfreien kühlung
PCT/GB2010/000454 WO2010106309A2 (en)	2009-03-16	2010-03-15	Cryogen free cooling apparatus and method
EP10710389.7A EP2409096B2 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren

Related Parent Applications (4)

Application Number	Title	Priority Date	Filing Date
EP19187223.3A Division EP3620732B2 (de)	2009-03-16	2010-03-15	Vorrichtung und verfahren zur kryogenfreien kühlung
EP19187223.3A Division-Into EP3620732B2 (de)	2009-03-16	2010-03-15	Vorrichtung und verfahren zur kryogenfreien kühlung
EP10710389.7A Division-Into EP2409096B2 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren
EP10710389.7A Division EP2409096B2 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren

Related Child Applications (2)

Application Number	Title	Priority Date	Filing Date
EP22205298.7A Division EP4148353B1 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren
EP22205298.7A Division-Into EP4148353B1 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren

Publications (3)

Publication Number	Publication Date
EP4027081A2 EP4027081A2 (de)	2022-07-13
EP4027081A3 true EP4027081A3 (de)	2022-08-31
EP4027081B1 EP4027081B1 (de)	2022-12-21

Family

ID=40637422

Family Applications (4)

Application Number	Title	Priority Date	Filing Date
EP10710389.7A Active EP2409096B2 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren
EP22154522.1A Active EP4027081B1 (de)	2009-03-16	2010-03-15	Vorrichtung und verfahren zur kryogenfreien kühlung
EP22205298.7A Active EP4148353B1 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren
EP19187223.3A Active EP3620732B2 (de)	2009-03-16	2010-03-15	Vorrichtung und verfahren zur kryogenfreien kühlung

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
EP10710389.7A Active EP2409096B2 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren

Family Applications After (2)

Application Number	Title	Priority Date	Filing Date
EP22205298.7A Active EP4148353B1 (de)	2009-03-16	2010-03-15	Kryogenfreie kühlvorrichtung und verfahren
EP19187223.3A Active EP3620732B2 (de)	2009-03-16	2010-03-15	Vorrichtung und verfahren zur kryogenfreien kühlung

Country Status (7)

Country	Link
US (1)	US20120102975A1 (de)
EP (4)	EP2409096B2 (de)
JP (1)	JP2012520987A (de)
ES (2)	ES2935698T3 (de)
FI (4)	FI2409096T4 (de)
GB (1)	GB0904500D0 (de)
WO (1)	WO2010106309A2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2493553B (en)	2011-08-11	2017-09-13	Oxford Instr Nanotechnology Tools Ltd	Cryogenic cooling apparatus and method
CN102967834B (zh) *	2012-11-23	2014-10-15	中国科学院武汉物理与数学研究所	一种磁共振引擎装置及方法
JP2016510499A (ja) *	2012-12-27	2016-04-07	コーニンクレッカフィリップスエヌヴェＫｏｎｉｎｋｌｉｊｋｅＰｈｉｌｉｐｓＮ．Ｖ．	無冷媒超電導マグネットのクエンチ保護のためのシステム及び方法
DE102015215919B4 (de) *	2015-08-20	2017-06-22	Bruker Biospin Gmbh	Verfahren und Vorrichtung zur Vorkühlung eines Kryostaten
EP3163222B1 (de)	2015-10-28	2018-07-18	Technische Universität München	Kältemittelfreie kühlvorrichtung
CN109488720B (zh) *	2018-12-27	2024-04-26	仪晟科学仪器(嘉兴)有限公司	闭循环液氦制冷机的机械隔离式震动屏蔽系统
DE102019203341A1 (de)	2019-03-12	2020-09-17	Pressure Wave Systems Gmbh	Kryostat
EP3734303B1 (de)	2019-05-03	2024-04-03	Afore Oy	Kryogener wafertester mit beladevorrichtung
GB2592415A (en) *	2020-02-27	2021-09-01	Oxford Instruments Nanotechnology Tools Ltd	Insert for a cryogenic cooling system
FI129268B (fi) *	2020-05-13	2021-10-29	Bluefors Oy	Laite ja menetelmä lämpöä johtavan kytkennän tekemiseksi
US11360140B1 (en) *	2020-12-18	2022-06-14	Microsoft Technology Licensing, Llc	RF functional probe
US11630172B2 (en) *	2021-03-15	2023-04-18	Bruker Biospin Corp.	NMR magnet system with Stirling cooler
US20240159450A1 (en) *	2021-03-16	2024-05-16	L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude	Easy access via a partial lateral opening system
GB2616318B (en)	2022-05-16	2024-05-15	Oxford Instruments Nanotechnology Tools Ltd	Cryogenic cooling system
DE102023111606A1 (de) *	2023-05-04	2024-11-07	eleQtron GmbH	Vakuumkammer, Quantencomputeranordnung und Kühlverfahren
CN116951817B (zh) *	2023-06-27	2025-09-30	南方科技大学	一种纺锤形低温预冷装置以及制冷机
US20250380384A1 (en) *	2024-06-07	2025-12-11	International Business Machines Corporation	Quick-loading cryogenic cooling systems

Citations (3)

* Cited by examiner, † Cited by third party
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US5237825A (en) *	1991-11-08	1993-08-24	Gte Laboratories Incorporated	Method and apparatus for cryogenically cooling samples
US5611207A (en) *	1995-06-29	1997-03-18	Hess; John	Cryogenic interface for perpendicular loading of independent measurement inserts
JP2008014878A (ja) *	2006-07-07	2008-01-24	Kyushu Univ	クライオスタット及び試料装着装置、温度制御方法

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US4251123A (en) *	1979-05-04	1981-02-17	The United States Of America As Represented By The United States Department Of Energy	Glove box shield
US4446702A (en)	1983-02-14	1984-05-08	Helix Technology Corporation	Multiport cryopump
US4577465A (en)	1984-05-11	1986-03-25	Helix Technology Corporation	Oil free vacuum system
JPS60260833A (ja) *	1984-06-07	1985-12-24	Hoxan Corp	クライオスタツト
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US4872321A (en)	1988-04-27	1989-10-10	Biomagnetic Technologies, Inc.	Nonimmersive cryogenic cooler
US5077523A (en)	1989-11-03	1991-12-31	John H. Blanz Company, Inc.	Cryogenic probe station having movable chuck accomodating variable thickness probe cards
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US5727392A (en)	1996-12-19	1998-03-17	Helix Technology Corporation	Convection-shielded cryopump
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JP2001255252A (ja) *	2000-03-10	2001-09-21	Jeol Ltd	試料搬送装置
JP3580531B2 (ja)	2000-04-20	2004-10-27	大陽東洋酸素株式会社	希釈冷凍機
JP4163447B2 (ja)	2002-05-22	2008-10-08	日本電子株式会社	スキャナ保持装置および走査型プローブ顕微鏡
JP2006509999A (ja)	2002-08-02	2006-03-23	イーエイフィシオネインストルメンツインコーポレーテッド	顕微鏡の試料調製方法及び装置
GB0408425D0 (en)	2004-04-15	2004-05-19	Oxford Instr Superconductivity	Cooling apparatus
JP4319650B2 (ja) *	2005-07-29	2009-08-26	株式会社日立製作所	Ｎｍｒ用低温プローブおよびｎｍｒ装置
GB0604577D0 (en)	2006-03-07	2006-04-19	Dryogenic Ltd	Low temperature heatsinking system
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DE102007028865B3 (de) *	2007-06-22	2009-01-29	Vericold Technologies Gmbh	Tieftemperaturvorrichtung
JP2009074774A (ja)	2007-09-25	2009-04-09	Kyushu Univ	無冷媒冷凍機及び機能性熱結合体
US8291717B2 (en) *	2008-05-02	2012-10-23	Massachusetts Institute Of Technology	Cryogenic vacuum break thermal coupler with cross-axial actuation
NL2001755C2 (nl)	2008-07-03	2010-01-05	Giorgio Frossati	Houder voor een tot een lage temperatuur in een vacuümruimte af te koelen preparaat en 3he-4he mengkoelmachine ingericht voor het opnemen van een dergelijke houder.

2009
- 2009-03-16 GB GBGB0904500.6A patent/GB0904500D0/en not_active Ceased
2010
- 2010-03-15 FI FIEP10710389.7T patent/FI2409096T4/fi active
- 2010-03-15 EP EP10710389.7A patent/EP2409096B2/de active Active
- 2010-03-15 WO PCT/GB2010/000454 patent/WO2010106309A2/en not_active Ceased
- 2010-03-15 EP EP22154522.1A patent/EP4027081B1/de active Active
- 2010-03-15 FI FIEP22154522.1T patent/FI4027081T3/fi active
- 2010-03-15 EP EP22205298.7A patent/EP4148353B1/de active Active
- 2010-03-15 JP JP2012500303A patent/JP2012520987A/ja active Pending
- 2010-03-15 ES ES22154522T patent/ES2935698T3/es active Active
- 2010-03-15 ES ES19187223T patent/ES2909009T5/es active Active
- 2010-03-15 FI FIEP22205298.7T patent/FI4148353T1/fi unknown
- 2010-03-15 FI FIEP19187223.3T patent/FI3620732T4/fi active
- 2010-03-15 US US13/257,032 patent/US20120102975A1/en not_active Abandoned
- 2010-03-15 EP EP19187223.3A patent/EP3620732B2/de active Active

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5237825A (en) *	1991-11-08	1993-08-24	Gte Laboratories Incorporated	Method and apparatus for cryogenically cooling samples
US5611207A (en) *	1995-06-29	1997-03-18	Hess; John	Cryogenic interface for perpendicular loading of independent measurement inserts
JP2008014878A (ja) *	2006-07-07	2008-01-24	Kyushu Univ	クライオスタット及び試料装着装置、温度制御方法

Also Published As

Publication number	Publication date
EP2409096B2 (de)	2024-06-19
EP4148353A1 (de)	2023-03-15
FI4148353T1 (fi)	2023-03-29
EP4027081A2 (de)	2022-07-13
JP2012520987A (ja)	2012-09-10
US20120102975A1 (en)	2012-05-03
ES2909009T5 (en)	2025-02-10
EP4027081B1 (de)	2022-12-21
ES2909009T3 (es)	2022-05-04
EP3620732B2 (de)	2024-10-09
WO2010106309A3 (en)	2011-05-19
EP4148353B1 (de)	2024-05-22
EP3620732B1 (de)	2022-02-16
WO2010106309A8 (en)	2011-10-13
FI3620732T4 (fi)	2024-11-22
FI2409096T4 (fi)	2024-06-20
FI4027081T3 (fi)	2023-01-13
GB0904500D0 (en)	2009-04-29
ES2935698T3 (es)	2023-03-09
WO2010106309A2 (en)	2010-09-23
EP2409096B1 (de)	2019-08-21
EP4148353C0 (de)	2024-05-22
EP2409096A2 (de)	2012-01-25
EP3620732A1 (de)	2020-03-11

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