EP4137699B1 - Appareil à vide et procédé de fonctionnement d'un tel appareil à vide - Google Patents

Appareil à vide et procédé de fonctionnement d'un tel appareil à vide Download PDF

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Publication number
EP4137699B1
EP4137699B1 EP22213776.2A EP22213776A EP4137699B1 EP 4137699 B1 EP4137699 B1 EP 4137699B1 EP 22213776 A EP22213776 A EP 22213776A EP 4137699 B1 EP4137699 B1 EP 4137699B1
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EP
European Patent Office
Prior art keywords
vacuum pump
wear
operating
pump
measure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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EP22213776.2A
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German (de)
English (en)
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EP4137699A1 (fr
Inventor
Jochen BÖTTCHER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
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Pfeiffer Vacuum Technology AG
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Priority to EP22213776.2A priority Critical patent/EP4137699B1/fr
Publication of EP4137699A1 publication Critical patent/EP4137699A1/fr
Priority to JP2023096996A priority patent/JP7820334B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Definitions

  • the invention relates to a vacuum pump and a method for operating such a vacuum pump.
  • a turbomolecular vacuum pump can have rolling bearings and/or safety bearings for its rotor, where a certain amount of wear and tear can ultimately lead to failure of the vacuum pump. Wear and tear can also lead to pre-damage to certain components of the vacuum device, which can be made worse by continued uncontrolled operation of the vacuum device and can lead to complete failure of the vacuum device. This can occur, for example, if a vacuum pump continues to be operated at nominal conditions in terms of temperature, power and speed despite a certain amount of pre-damage to a bearing. If, for example, pre-damage to the bearing is not detected, operation at nominal conditions shortens the time until the pump fails.
  • maintenance recommendations or similar specifications are often provided, which, for example, define a check of the vacuum device after a specified operating time or under certain other conditions.
  • a failure of the vacuum device can occur before the end of such a maintenance period, for example due to the operating mode of a particular vacuum pump, if the wear of certain components of the vacuum device is not detected.
  • the planned operating time until maintenance can be chosen too conservatively, so that maintenance is carried out too early unnecessarily. This leads to unnecessary costs for the operation of the vacuum device.
  • the vacuum pump has a rotor in which a specific disturbance event is detected that affects the rotor and a backup bearing for the rotor.
  • a wear increment is estimated, which is added to a variable for the total wear of the backup bearing. Based on this variable for the total wear, a decision is made as to whether a measure is carried out to stabilize the rotor.
  • the US 2019/0383300 A1 describes a vacuum pump with a rolling bearing to which a lubricant is supplied by a special pump. Vibrations and the temperature of the vacuum pump are measured to control the supply of lubricant.
  • the DE 101 57 143 A1 describes a device and a method for detecting wear in pumps. Wear-relevant operating parameters of the pumps are recorded using sensors in order to use an evaluation device to determine an expected value for an operating period until the next maintenance is due or certain parts of the pumps are replaced based on the recorded operating parameters.
  • An object of the invention is to provide a vacuum pump and a method for operating such a pump in which a failure of the vacuum pump due to wear is avoided or at least delayed.
  • the set of operating variables of the vacuum pump includes, among other things, the number of operating hours of the vacuum pump.
  • the wear detection device can be designed to detect the previous operating hours of the vacuum pump.
  • the wear detection device can additionally or alternatively be designed to detect specific, predetermined fault events and to assign a detected fault event to a specific wear. Based on the total number of operating hours and optionally also based on the detected fault events of the vacuum pump, the wear detection device can assign a specific numerical value to these detected operating variables as a wear indicator.
  • the wear detection device records certain operating parameters of the vacuum pump as operating variables, which include the temperature and the speed of the vacuum pump.
  • the respective value of the operating parameter can be recorded over a predetermined period of time in order to relate the wear indicator to the values of the operating parameter recorded in this way.
  • the values of the operating parameter recorded over the predetermined period of time can, for example, be summed, integrated or offset against one another in another way in order to obtain, for example, an average value for the operating parameter, based on which the respective wear indicator can be determined.
  • the wear detection device can detect the state of a specific operating resource of the vacuum pump and to assign this state to another wear indicator.
  • Such a state of the operating resource can include, for example, the temperature of a coolant of the vacuum pump and/or the quality of certain lubricants.
  • the measure for reducing the wear of the vacuum pump can include adjusting certain operating parameters of the vacuum pump in such a way that the wear of the vacuum pump components is reduced. For example, a maximum possible speed can be reduced in order to be able to continue operating the vacuum pump without, for example, damage to its rolling bearings or safety bearings.
  • the vacuum pump according to the invention is thus characterized in that not only is the wear of the component of the vacuum pump recorded, among other things by counting operating hours, but that a suitable measure to reduce the wear is also triggered based on the wear indicators.
  • a suitable measure to reduce the wear is also triggered based on the wear indicators.
  • the set of operating variables includes an operating time of the vacuum pump, and one of the wear indicators includes a numerical value derived from the operating time of the vacuum pump.
  • the operating time can be recorded from a previous maintenance of the vacuum pump, for example if parts or components of the vacuum pump that are subject to wear are repaired or replaced during this maintenance. Alternatively, the entire operating time of the vacuum pump can be recorded. Specifically, the operating hours of the vacuum pump are counted, so that the numerical value of the operating hours represents the corresponding wear indicator. The number of operating hours is compared with a predetermined threshold value, which is associated with a certain probability that the wear of at least one component of the vacuum pump can lead to a malfunction or even a failure of the vacuum pump within a relatively short period of time.
  • Such a threshold value can be configurable, i.e. the threshold value can be adaptable to the specific type of vacuum pump and to the environment in which the vacuum pump is used. Furthermore, recording the operating time of the vacuum pump can be carried out with little effort, since, for example, many vacuum pumps have their operating hours counted anyway.
  • the set of operating variables includes operating parameters of the vacuum pump.
  • the wear detection device is designed to determine the wear indicator by recording values of the operating parameter over a predetermined period of time and relating them to the wear indicator.
  • the operating parameter includes a temperature in a predetermined range of the vacuum pump and a vibration of the vacuum pump. For example, a period of time can be recorded during which the temperature of the vacuum pump is above a predetermined limit.
  • the intensity of the vibrations and optionally also frequencies and/or the amplitude of the vibrations of the vacuum pump can be recorded over a predetermined period of time.
  • a further aspect of the invention relates to a method for operating a vacuum pump.
  • a set of operating variables of the vacuum pump is detected by means of a wear detection device, and for each of the detected operating variables a respective wear indicator for the vacuum pump is determined, which indicates the wear of a component of the vacuum pump. If at least one of the wear indicators exceeds a predetermined threshold value, a measure for reducing the wear of the vacuum pump is carried out by means of a protective device.
  • a predetermined state for triggering the measure thus includes one of the wear indicators having a numerical value that is greater than a respective predetermined threshold value.
  • the vacuum pump described above is therefore intended to carry out the steps of the method by means of the wear detection device and the protective device.
  • the above statements on the vacuum pump according to the invention therefore also apply mutatis mutandis to the method according to the invention, in particular with regard to the disclosure, the advantages and the preferred embodiments.
  • the set of operating variables includes an operating time of the vacuum pump, and a numerical value of one of the wear indicators is derived from the operating time of the vacuum pump. Determining the operating time of the vacuum pump includes counting its operating hours.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection is also arranged, via which purge gas can be fed to protect the electric motor 125 (see e.g. Fig. 3 ) can be let into the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, before the gas delivered by the pump.
  • two coolant connections 139 are also arranged, one of the coolant connections being provided as an inlet and the other coolant connection as an outlet for coolant that can be fed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) are operated exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a base so that the vacuum pump 111 can be operated standing on the bottom 141.
  • the vacuum pump 111 can also be mounted on a
  • the vacuum pump 111 can also be designed so that it can be operated when it is oriented in a different way than in Fig. 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 is not arranged facing downwards, but rather facing to the side or facing upwards. In principle, any angle is possible.
  • the wear detection device 620 also detects a state of at least one operating means of the vacuum pump 600, for example in the case of the turbomolecular pump 111 the quality of a lubricant for those components of the turbomolecular pump 111 that require lubrication.
  • the quality of the lubricant can be detected, for example, by monitoring one or more physical and/or chemical properties of the lubricant, e.g. the presence of a certain substance in the lubricant, its viscosity and/or its optical properties.
  • Fig. 7 shows a schematic flow diagram of a method 700 for operating the vacuum pump 600, ie in particular the turbomolecular pump 111.
  • a set of operating variables of the vacuum pump 600 is recorded by means of the wear detection device 620, which are each assigned to the various components 610 of the vacuum pump 600.
  • the operating variables include, among other things, the number of operating hours of the turbomolecular pump 111, the temperature, the speed of the rotor 149 and the pressure in the turbomolecular pump 111.
  • the wear detection device 620 is used to determine a respective wear indicator for the vacuum pump 600 based on the recorded operating variables, which indicates the wear of one or more components 610 of the vacuum pump 600.
  • it is checked whether at least one of the wear indicators assumes a predetermined state, ie by exceeding a predetermined threshold value. If this is not the case, the method returns to step 710 to continue monitoring the operating variables of the vacuum pump 600 and to record a new set of operating variables.
  • a measure to reduce the wear of the vacuum pump 600 is carried out at 740 by means of the protective device.
  • the turbomolecular pump 111 one of these measures consists in limiting the power consumption of the turbomolecular pump 111 in order to thereby limit the maximum speed of the rotor 149 and the rolling bearing 181 (cf. Fig. 3 to 5 ) and the emergency or detention camp 215 (cf. Fig. 3 ) to protect.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (9)

  1. Pompe à vide (111), comprenant :
    - un dispositif de détection d'usure (620) conçu pour détecter un ensemble de grandeurs de fonctionnement de la pompe à vide (111) et pour déterminer, pour chacune des grandeurs de fonctionnement détectées, au moins un indicateur d'usure de la pompe à vide (111), qui indique l'usure d'au moins un composant (610) de la pompe à vide (111),
    ledit au moins composant (610) pouvant être en particulier un palier de roulement (181) de la pompe à vide (111),
    l'indicateur d'usure respectif prenant une valeur numérique respective dérivée de la grandeur de fonctionnement respective de la pompe à vide (111) ; et
    - un dispositif de protection (630) ;
    caractérisée en ce que le dispositif de protection (630) est conçu pour mettre en oeuvre une action visant à réduire l'usure de la pompe à vide (111) lorsque l'un au moins des indicateurs d'usure prend un état prédéterminé, c'est-à-dire lorsqu'il dépasse une valeur seuil respective prédéterminée,
    l'ensemble de grandeurs de fonctionnement incluant un nombre d'heures de fonctionnement de la pompe à vide (111), une température de la pompe à vide (111), une vitesse de rotation de la pompe à vide (111), une pression dans la pompe à vide (111) et une intensité de vibrations de la pompe à vide, et
    le dispositif de protection (630) étant conçu pour mettre en oeuvre l'action de réduction de l'usure de la pompe à vide (111) de manière à limiter une consommation de puissance de la pompe à vide (111).
  2. Pompe à vide (111) selon la revendication 1,
    dans laquelle l'ensemble de grandeurs de fonctionnement inclut en outre un état d'au moins un agent de fonctionnement de la pompe à vide (111), et le dispositif de détection d'usure (620) est conçu pour déterminer un autre indicateur d'usure à partir de l'état dudit au moins un agent de fonctionnement.
  3. Pompe à vide (111) selon la revendication 2,
    dans laquelle l'état de l'agent de fonctionnement inclut la température d'un agent de refroidissement et/ou la qualité d'un agent de lubrification pour ledit au moins un composant (610) de la pompe à vide (111).
  4. Pompe à vide (111) selon l'une des revendications 1 à 3,
    dans laquelle le dispositif de protection (630) est conçu pour mettre en oeuvre l'action de réduction de l'usure de la pompe à vide (111) de manière à réduire au moins une valeur limite de l'émission d'un avertissement et/ou d'un message d'erreur pour l'une au moins des grandeurs de fonctionnement.
  5. Pompe à vide (111) selon l'une des revendications 1 à 4,
    dans laquelle le dispositif de protection (630) est conçu pour mettre en oeuvre l'action de réduction de l'usure de la pompe à vide (111) en adaptant un état d'au moins un agent de fonctionnement de la pompe à vide (111).
  6. Procédé (700) de fonctionnement d'une pompe à vide (111), le procédé comprenant les étapes consistant à
    détecter, au moyen d'un dispositif de détection d'usure (620), un ensemble de grandeurs de fonctionnement de la pompe à vide (111), et déterminer, pour chacune des grandeurs de fonctionnement détectées, un indicateur d'usure respectif pour la pompe à vide (111), qui indique l'usure d'au moins un composant (610) de la pompe à vide (111), ledit au moins un composant (610) pouvant être en particulier un palier de roulement (181) de la pompe à vide,
    l'indicateur d'usure respectif prenant une valeur numérique respective qui est dérivée de la grandeur de fonctionnement respective de la pompe à vide (111), et
    mettre en oeuvre une action de réduction de l'usure de la pompe à vide (111) au moyen d'un dispositif de protection (630) lorsque l'un au moins des indicateurs d'usure prend un état prédéterminé, c'est-à-dire lorsqu'il dépasse une valeur seuil respective prédéterminée,
    l'ensemble de grandeurs de fonctionnement incluant un nombre d'heures de fonctionnement de la pompe à vide (111), une température de la pompe à vide (111), une vitesse de rotation de la pompe à vide (111), une pression dans la pompe à vide (111) et une intensité de vibrations de la pompe à vide (111), et
    l'action de réduction de l'usure de la pompe à vide (111) étant mise en oeuvre au moyen du dispositif de protection (630) de manière à limiter une consommation de puissance de la pompe à vide (111).
  7. Procédé (700) selon la revendication 6,
    dans lequel l'ensemble de grandeurs de fonctionnement inclut en outre un état d'au moins un agent de fonctionnement de la pompe à vide (111), et un autre indicateur d'usure est déterminé à partir de l'état dudit au moins un agent de fonctionnement.
  8. Procédé (700) selon la revendication 6 ou 7,
    dans lequel l'action de réduction de l'usure de la pompe à vide (111) est mise en oeuvre de manière à réduire au moins une valeur limite de l'émission d'un avertissement et/ou d'un message d'erreur pour l'une au moins des grandeurs de fonctionnement.
  9. Procédé (700) selon l'une des revendications 6 à 8,
    dans lequel l'action de réduction de l'usure de la pompe à vide (111) est mise en oeuvre en adaptant un état d'au moins un agent de fonctionnement de la pompe à vide (111).
EP22213776.2A 2022-12-15 2022-12-15 Appareil à vide et procédé de fonctionnement d'un tel appareil à vide Active EP4137699B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP22213776.2A EP4137699B1 (fr) 2022-12-15 2022-12-15 Appareil à vide et procédé de fonctionnement d'un tel appareil à vide
JP2023096996A JP7820334B2 (ja) 2022-12-15 2023-06-13 真空機器及びその運転方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP22213776.2A EP4137699B1 (fr) 2022-12-15 2022-12-15 Appareil à vide et procédé de fonctionnement d'un tel appareil à vide

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Publication Number Publication Date
EP4137699A1 EP4137699A1 (fr) 2023-02-22
EP4137699B1 true EP4137699B1 (fr) 2025-01-29

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10157143A1 (de) * 2001-11-21 2003-05-28 Netzsch Mohnopumpen Gmbh Wartungsintervallanzeige für Pumpen
DE102006032648A1 (de) * 2006-01-30 2007-09-27 Abb Research Ltd. Diagnosesystem und Verfahren zur Zustandsüberwachung und Erkennung von Funktionsminderungen und Ausfällen an verdichtende und rotierende Maschinen
US20150252814A1 (en) * 2012-09-26 2015-09-10 Daikin Industries, Ltd. Control device
US20160245273A1 (en) * 2013-10-10 2016-08-25 Kaeser Kompressoren Se Electronic control device for a component of compressed-air generation, compressed-air processing,compressed-air storage, and/or compressed-air distribution
EP3686432A1 (fr) * 2020-03-27 2020-07-29 Pfeiffer Vacuum Technology AG Pompe à vide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004048866A1 (de) 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe
EP3456979B1 (fr) * 2017-09-18 2022-03-30 Pfeiffer Vacuum Gmbh Appareil a vide et procédé de génération d'une information sur le fonctionnement d'un appareil a vide
JP2019214992A (ja) * 2018-06-14 2019-12-19 株式会社島津製作所 真空ポンプ
EP3832141B1 (fr) 2020-11-05 2023-01-04 Pfeiffer Vacuum Technology AG Procédé de fonctionnement d'une pompe à vide

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10157143A1 (de) * 2001-11-21 2003-05-28 Netzsch Mohnopumpen Gmbh Wartungsintervallanzeige für Pumpen
DE102006032648A1 (de) * 2006-01-30 2007-09-27 Abb Research Ltd. Diagnosesystem und Verfahren zur Zustandsüberwachung und Erkennung von Funktionsminderungen und Ausfällen an verdichtende und rotierende Maschinen
US20150252814A1 (en) * 2012-09-26 2015-09-10 Daikin Industries, Ltd. Control device
US20160245273A1 (en) * 2013-10-10 2016-08-25 Kaeser Kompressoren Se Electronic control device for a component of compressed-air generation, compressed-air processing,compressed-air storage, and/or compressed-air distribution
EP3686432A1 (fr) * 2020-03-27 2020-07-29 Pfeiffer Vacuum Technology AG Pompe à vide

Also Published As

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JP2024086542A (ja) 2024-06-27
EP4137699A1 (fr) 2023-02-22
JP7820334B2 (ja) 2026-02-25

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