EP4621238A2 - Procédé de montage d'une pompe à vide à spirales - Google Patents

Procédé de montage d'une pompe à vide à spirales

Info

Publication number
EP4621238A2
EP4621238A2 EP25189891.2A EP25189891A EP4621238A2 EP 4621238 A2 EP4621238 A2 EP 4621238A2 EP 25189891 A EP25189891 A EP 25189891A EP 4621238 A2 EP4621238 A2 EP 4621238A2
Authority
EP
European Patent Office
Prior art keywords
spiral component
housing section
angular position
component
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP25189891.2A
Other languages
German (de)
English (en)
Other versions
EP4621238A3 (fr
Inventor
Wolfgang Söhngen
Jan Hofmann
Stefan Kallenborn
Andreas Hofmann
Heiko Schäfer
Mert Kan CELIKKALE
Timo Lange
Jonas Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP25189891.2A priority Critical patent/EP4621238A3/fr
Publication of EP4621238A2 publication Critical patent/EP4621238A2/fr
Publication of EP4621238A3 publication Critical patent/EP4621238A3/fr
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00Manufacture
    • F04C2230/60Assembly methods
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00Manufacture
    • F04C2230/60Assembly methods
    • F04C2230/603Centering; Aligning
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00Manufacture
    • F04C2230/60Assembly methods
    • F04C2230/604Mounting devices for pumps or compressors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/80Other components
    • F04C2240/805Fastening means, e.g. bolts

Definitions

  • the invention relates to a method for assembling a scroll vacuum pump and a scroll vacuum pump.
  • Scroll vacuum pumps are generally known from the prior art.
  • the pumping action of such scroll vacuum pumps is created by the interaction of a stationary scroll component and a movable scroll component.
  • the scroll components each have spiral-shaped webs formed on facing surfaces, which engage with spiral grooves formed between the webs of the respective oppositely arranged scroll components.
  • the movable scroll component is moved eccentrically along a circular path by an eccentric section of a drive shaft, a process also referred to as "orbiting.”
  • the circumferential position i.e., angular position
  • the spiral webs of the movable spiral component move in the spiral grooves of the fixed spiral component in such a way that crescent-shaped or sickle-shaped volumes enclosed between the base surfaces of the grooves and the side surfaces of the webs are spirally displaced from a radially outer position to a radially further inner position and are thereby compressed.
  • the alignment of the angular positions (ie the positions in the circumferential direction) of the two spiral components to each other is of central importance. This is also referred to as the angular alignment of the spiral components.
  • the angular alignment of the two spiral components to each other is conventionally achieved via the pump housing and a deformable sleeve, the so-called corrugated bellows.
  • the movable spiral component is aligned in the circumferential direction using positioning elements (e.g. groove via dowel pin) on the corrugated bellows and is fixed in a predetermined angular position to the pump housing via the corrugated bellows in a rotationally secure manner.
  • the corrugated bellows comprises a first fastening flange at one axial end with positioning elements which interact with corresponding positioning elements on the movable spiral component such that the movable spiral component is fixed in a predetermined angular position to the corrugated bellows.
  • the corrugated bellows comprises a second fastening flange with positioning elements which interact with corresponding positioning elements of the pump housing such that the corrugated bellows is fixed in a predetermined angular position to the pump housing. This consequently also determines the angular position of the movable spiral component with respect to the pump housing.
  • the positioning of the fixed scroll component is carried out via positioning elements which are formed on the fixed scroll component and on the pump housing and which interact so that the fixed scroll component is aligned and fixed in a predetermined angular position on the pump housing.
  • the angular alignment of the two spiral components is thus achieved via various positioning elements that must be provided on the two spiral components, on both mounting flanges of the bellows, and at various locations on the pump housing with relatively small manufacturing tolerances, which leads to a significant increase in the costs of manufacturing the respective components.
  • the two mounting flanges of the bellows which each have positioning elements and are used to align the angular position of the movable spiral component, must be aligned with each other during production. This requires, for example, welding the mounting flanges in a special device and Additional checks to ensure that the required tolerances are maintained.
  • the object is achieved according to the invention by a method for assembling a scroll vacuum pump having the features of claim 1, by a method for assembling a scroll vacuum pump having the features of claim 10 and by a scroll vacuum pump having the features of claim 11.
  • a fixation describes a state in which at least two components are connected to each other in such a way that no relative movement of a first component relative to a second component is possible. This can be achieved, for example, by clamping, screwing, or using bolts. This fixation can be permanent but can be removed, e.g., for maintenance or repair work.
  • Attachment means that the corresponding component remains movable relative to the housing section. Attachment can also include a temporary fixation that is particularly easy to remove. For example, it may be possible to rotate the component relative to the housing section. After correct alignment, the component is permanently fixed, for example, using a clamping device and/or a screw connection.
  • the method according to the invention offers the advantage that when inserting and securing the assembly in the housing section—a process that is often complex due to the typically cramped conditions—the angular position of the assembly can be freely selected. Angular alignment can be achieved solely by aligning the fixed spiral component, which is significantly simpler than ensuring a precise angular alignment of the assembly relative to the housing section. Consequently, positioning elements on the deformable sleeve are not absolutely necessary for the described method, which correspondingly shortens the tolerance chain and saves manufacturing costs.
  • the method additionally comprises fixing a mounting device having a reference feature to the movable spiral component, as well as transferring an angular position of the reference feature of the mounting device to the housing section and/or a component firmly connected to the housing section to generate a reference mark.
  • the angular position of the stationary spiral component is aligned using the reference mark.
  • feature in the present context may include a superficial, for example recorded, and/or structural marking, for example a bracket, bolt or pin.
  • the reference feature In the assembled state of the assembly device, the reference feature thus allows the transfer of an angular position of the reference feature to the housing section and/or to a component firmly connected to the housing section to create a reference mark.
  • the transfer of the reference feature can be achieved via a marking element suitable for applying a visual mark to the housing section, for example, using a marking pen and/or a self-adhesive marking or by scoring.
  • a marking element suitable for applying a visual mark to the housing section for example, using a marking pen and/or a self-adhesive marking or by scoring.
  • the mounting device comprises at least one positioning element that cooperates with at least one complementary positioning section of the movable spiral component, so that the mounting device is fixed in a predetermined angular position on the movable spiral component.
  • the positioning section or the positioning element can, for example, a recess, in particular a groove or a hole.
  • Complementary positioning elements or sections would then be, for example, corresponding elevations, e.g., ribs, or pins.
  • the mounting device can also be provided with at least one handle element.
  • the fixed scroll member has an angular position feature, and the fixed scroll member is rotated in aligning its angular position until the angular position of the angular position feature of the fixed scroll member coincides with the reference mark.
  • the limit angle position refers to the design-related maximum rotation of the fixed spiral component relative to the mounting assembly.
  • the movable spiral component is set in motion at least temporarily during the alignment of the stationary spiral component. This can be done, for example, by manually rotating the rotor.
  • starting noises can arise between the spiral components. This allows an optimal angular position to be identified, at which no or only very slight Starting noises are audible. Quantifying the starting noises can also be achieved using suitable measuring devices, such as sound sensors.
  • the second axial end of the deformable sleeve of the mounting assembly is fixed to the housing section from one side—viewed in the axial direction—of the deformable sleeve on which the movable spiral component is arranged.
  • the movable spiral component can be provided with recesses to ensure accessibility of the fixing elements used for fixing, for example, using a suitable tool.
  • the mounting assembly is angularly positioned relative to the housing section using an angular position feature of the movable scroll member and a positioning aid of the housing section.
  • This serves the particular purpose of coordinating the positions of the inlets and outlets in the pump housing with the angular position of the scroll members.
  • an arrangement is generally preferred in which the inlets and outlets in the pump housing coincide with corresponding openings in the scroll members, at least over a large area.
  • the angular position feature of the movable scroll member can, for example, be a radial groove forming a notch, which, when positioned as desired, bounds the positioning aid of the housing section, for example, a marking, on both sides, as viewed in the axial direction of the deformable shell.
  • the marking would function as a "bead” in this example.
  • a "bead-bead” arrangement With such a "bead-bead” arrangement, a rough alignment of the mounting assembly on the housing section can be easily achieved.
  • other types of angular position feature and positioning aid may also be provided.
  • a final assembly mark is created which The angular position of the aligned stationary scroll component relative to the housing section is marked. This is particularly advantageous if the stationary scroll component must be removed after assembly, for example, during repair and/or maintenance work, such as when replacing and/or servicing seals, especially tipseals. In such a case, the final assembly marking allows for easy and quick reassembly of the stationary scroll component in the correct angular alignment with the movable scroll component.
  • an angular position of the mounting assembly relative to the housing section is aligned using a reference feature associated with the movable scroll member and a mounting position feature provided on the housing section.
  • Alignment of the mounting assembly is not necessarily required when aligning the fixed scroll component.
  • the reference feature may be formed on the movable spiral component.
  • the reference feature may be formed on a mounting device that is attached to the movable scroll member.
  • the mounting device may comprise positioning elements which interact with complementary positioning sections on the movable spiral component, so that the mounting device is fixed in at least one fixedly defined angular position on the movable spiral component.
  • the mounting device can have at least one positioning element that cooperates with at least one complementary positioning section in the housing section, so that the mounting device is fixed in at least one fixedly defined angular position on the housing section. If the mounting device also has at least one positioning element that cooperates with at least one complementary positioning section of the movable spiral component, so that the mounting device is fixed in a predetermined angular position on the movable spiral component, the mounting assembly can be easily applied in a well-defined angular position and subsequently fixed.
  • the positioning section or the A positioning element can be, for example, a recess, in particular a groove or a hole. Complementary positioning elements or sections could then be, for example, corresponding elevations, e.g., ribs or pins.
  • the mounting device has both positioning elements that interact with positioning sections in the movable spiral component and positioning elements that interact with positioning sections in the housing section, a simultaneous fixing of the mounting device to both the movable spiral component and to the housing section is possible and thus leads to a fixedly defined alignment of the mounting assembly to the housing section, in particular in angular alignment relative to a fixedly defined angular position of the spiral housing.
  • the step of attaching the mounting device to the movable scroll component can occur before the step of inserting the mounting assembly or even before the assembly is formed.
  • the mounting device is removed again before the stationary scroll component is secured.
  • the attachment of the mounting device to the movable scroll component, and optionally to the housing section, is thus to be understood as a temporary attachment/fixation.
  • the invention also relates to a scroll vacuum pump with a pump housing for accommodating a pump system comprising a fixed spiral component and a movable spiral component cooperating with the latter in a pumping-effective manner, wherein the movable spiral component is connected to a housing section of the pump housing via a deformable sleeve, in particular a corrugated bellows, and a first axial end of the sleeve is fixed to the movable spiral component in a freely selectable angular position by a first fixing device.
  • a deformable sleeve in particular a corrugated bellows
  • the first fixing device can comprise, for example, a clamp connection and/or a screw connection as a fastening element.
  • the first axial end of the sleeve and/or the movable spiral component can have at least one elongated recess.
  • the angular position of the movable spiral component is not aligned via the deformable sleeve, but rather, for example, by an assembly device. Positioning elements on the deformable sleeve and/or the movable spiral component are thus not required, which reduces the manufacturing costs of the components, in particular the corrugated bellows, and improves alignment accuracy due to the elimination of assembly play.
  • the second axial end of the sleeve is fixed to the housing section by a second fixing device
  • the movable spiral component has at least one mounting recess, in particular on an outer peripheral edge of the movable spiral component, which is configured and designed so that the second fixing device can be actuated by a tool from the side of the movable spiral component.
  • the second fixing device can be designed and configured in such a way that, in addition to fixing, it also allows positioning in a pre-assembly position, in which, in particular, rotation of the deformable sleeve relative to the housing section is possible.
  • This can be achieved, for example, by a clamping device comprising fixing elements, such as screws, and clamping elements, such as washers, that engage around a flange-like edge of the sleeve.
  • the screws are lightly tightened to create a slight clamping force. The screws are then tightened for final fixing.
  • the assembly of the sleeve in the housing section is facilitated.
  • An appropriate tool such as a screwdriver, can be guided through the mounting recess to access the second fixing device.
  • the fixed spiral component is fixed to the housing section by a third fixing device depending on an angular position of the movable spiral component.
  • the angular position of the fixed spiral component is thus aligned based on the actual angular position of the previously mounted movable spiral component.
  • the resulting short tolerance chain consisting only of the spiral components, enables more cost-effective production and increases assembly accuracy.
  • the third fixing device may comprise an adjusting device for adapting the angular position of the fixed spiral component relative to the housing section.
  • the adjusting device can have an elongated hole, in particular an arcuate elongated hole.
  • the scroll vacuum pump according to the invention is suitable for being assembled by means of at least one of the described assembly methods.
  • the Fig. 1 shows a scroll vacuum pump 20 (short "scroll pump”).
  • the scroll pump 20 comprises a housing section 22 and a spiral casing 24, wherein the spiral casing 24 has a pump-active structure, namely a spiral wall 26.
  • the spiral casing 24 thus forms a fixed spiral component of the scroll pump 20.
  • the stationary scroll component is formed integrally within the scroll casing 24, which is why both terms are used synonymously below.
  • the scroll casing 24 and the stationary scroll component comprise separate, interconnected elements. Such an embodiment is to be understood as being included in the designation "scroll casing 24," with the following statements in this case referring to the stationary scroll component.
  • the spiral wall 26 of the stationary spiral component or spiral housing 24 interacts with a spiral wall 28 of a movable spiral component 30, wherein the movable spiral component 30 is moved eccentrically via an eccentric shaft 32 to generate a pumping effect.
  • a gas to be pumped is conveyed from an inlet 31, which is located in the housing section 22, to an outlet 33, which is formed in the spiral housing 24.
  • the eccentric shaft 32 is driven by a motor 34 and is supported by two roller bearings 36. It comprises an eccentric pin 38 arranged eccentrically to its rotational axis, which transmits its eccentric deflection to the movable spiral component 30 via a further roller bearing 40.
  • a Fig. 1 The left-hand end of a movable sleeve in the form of a bellows 42 is attached, the right-hand end of which is attached to the housing section 22. The left-hand end of the bellows 42 follows the deflection of the movable spiral component 30, while the right-hand end of the bellows 42 is stationary during operation of the scroll pump 20.
  • volute casing 24 and the movable scroll member 30 are aligned with each other in a well-defined manner, particularly with regard to their angular position.
  • a method according to the invention for assembling a scroll vacuum pump 20 is described below with reference to the Figures 2a to 5
  • the sequence of the process steps refers to the respective embodiment shown, but embodiments with a different sequence of process steps are also conceivable.
  • a first axial end (left in Fig. 1 ) of the bellows 42 is fixed to the movable spiral component 30, so that the bellows 42 and the spiral component 30 form a mounting assembly.
  • the mounting assembly is then inserted into the housing section 22.
  • the second axial end (right in Fig. 1 ) of the bellows 42 is now fixed to the housing section 22.
  • the axial ends of the bellows 42 typically each comprise a flange for this purpose. Since the relative angular position of the bellows 42 and the movable spiral component 30 is irrelevant, the fixation can be achieved, for example, by means of screws, each provided with a washer, which engage behind the flange when the screws are screwed into the movable spiral component 30. Other clamping means are conceivable.
  • the mounting assembly is fixed to the housing section 22 from one side - seen in axial direction A - of the bellows 42, i.e. from the left parallel to a pump axis 43.
  • the movable spiral component 30 can be provided with mounting recesses 300 (see Fig. 2c ), which ensure accessibility of the fixing elements arranged on the housing section 22 for a suitable tool.
  • the pre-assembly of the bellows 42 on the housing section 22 is carried out by means of a clamping process.
  • screws 209 and suitable clamping elements in the form of washers 211 are provided, which engage behind a flange-like end section 212 of the bellows 42. This is shown in the enlarged section in Fig. 2b
  • the screws 209 are screwed into screw holes 304 in the housing section 22 (see Fig. 4 ).
  • the mounting assembly can be fixed to the housing section 22 by tightening the screws 209.
  • a mounting device 200 (shown in Fig. 2a ) is fixed to the movable scroll member 30. This can be done before or after the assembly assembly is formed, so that the mounting device 200 can be used upon insertion into the housing section 22. However, it is also possible to attach the mounting device 200 to the movable scroll member 30 only after the assembly assembly has been attached to the housing section 22.
  • the mounting device 200 has positioning elements 202 (here in the form of pins) that interact with complementary positioning sections 203 (here in the form of holes) of the movable spiral component 30, so that the mounting device 200 is fixed in a predetermined angular position on the movable spiral component 30. It is understood that the angular position of the two components can also be ensured by other means, for example, by ribs and complementary grooves.
  • the mounting device has at least one handle element 205 for easier handling.
  • the mounting device 200 has a reference feature 201, which is shown in the Fig. 2a-d exemplified as a cantilever extending in the axial direction.
  • the angular position of the mounting device 200 can be used to apply a reference marking 206 to the housing section 22 (see Fig. 2d ).
  • the reference marking 206 can be applied to the housing section 22, for example, using a marking element, such as a marking pen or a self-adhesive marker. Other embodiments of the reference feature 201 are conceivable.
  • the mounting device 200 can be removed.
  • a final assembly mark is created that marks the angular position of the aligned volute casing 24 relative to the housing section 22.
  • multiple final assembly marks can be provided, distributed in the circumferential direction.
  • the final assembly mark facilitates, for example, the correct positioning of the volute casing 24 after maintenance work during which the volute casing 24 must be removed from the housing section 22. It can be particularly helpful in cases where the pump 20 is installed in a confined space and the reference mark 206 is obscured or difficult to read.
  • the mounting assembly is inserted into the housing section 22 and positioned there in a pre-assembly position.
  • the pre-assembly position is configured such that the mounting assembly remains freely rotatable relative to the housing section 22, but there is little or no play in the axial direction A and/or radial direction (perpendicular to A).
  • FIG. 4 A suitable embodiment of the housing section 22 is shown in Fig. 4 shown.
  • the housing section 22 has a positioning aid 302, which enables an angular alignment of the mounting assembly.
  • the housing section 22 has an assembly guide in the form of a bellows groove 303, which is designed and configured to second axial end of the bellows 42, e.g. a flange-like end or fastening section 212 (see Fig. 2b ).
  • a coarse alignment may be provided.
  • the coarse angular alignment of the movable spiral component 30 relative to the housing section 22 is carried out, for example, as shown in Fig. 5
  • the movable spiral component 30 has suitable angular position features 301, which enable alignment with the positioning aid 302. In the Fig. 5 In the embodiment shown, this is achieved using the "front sight-front sight principle," with the angular position features 301 forming the "front sight” and the positioning aid 302 forming the "front sight.”
  • the mounting recesses 300 in the movable spiral component 30 are also shown. These allow the fixing elements 209 to be reached in the axial direction A on one side of the bellows 42.
  • a mounting device 200 can be fixed to the movable spiral part 30, wherein the mounting device 200 has a reference feature 201 as shown in Fig. 2a
  • the alignment of an angular position of the mounting assembly relative to the housing section 22 is performed using the reference feature 201 of the mounting device 200 and a mounting position feature 206 attached to the housing section 22 and/or to a component firmly connected to the housing section 22.
  • the mounting position feature 206 indicates the desired angular position of the mounting assembly relative to the housing section 22.
  • This angular alignment of the movable scroll member 30 may precede the precise alignment of the scroll casing 24 described above, but is not absolutely necessary in all cases. It may serve the purpose of the correct angular alignment
  • the mounting device 200 may also comprise at least one positioning element 204 (this is dispensable for the methods described further above) which is associated with a corresponding positioning section 210 in the housing section 22, as shown in Fig. 2b is shown.
  • the positioning element 204 can, for example, be a pin, and the positioning section 210 a matching hole.
  • the mounting device 200 additionally has at least one positioning element 202, which is assigned to a corresponding positioning section 203 in the movable spiral component 30, the combination of the positioning elements 202, 204 and positioning sections 203, 210 thus enables the simultaneous fixing of the mounting device 200 to the movable spiral component 30 and the housing section 22 to result in a fixedly defined angular position of the movable spiral component 30 relative to the housing section 22, in which the movable spiral component 30 or the mounting assembly is subsequently fixed.
  • the mounting position feature 206 and the reference feature 201 are therefore not absolutely necessary.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP25189891.2A 2025-07-16 2025-07-16 Procédé de montage d'une pompe à vide à spirales Pending EP4621238A3 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP25189891.2A EP4621238A3 (fr) 2025-07-16 2025-07-16 Procédé de montage d'une pompe à vide à spirales

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP25189891.2A EP4621238A3 (fr) 2025-07-16 2025-07-16 Procédé de montage d'une pompe à vide à spirales

Publications (2)

Publication Number Publication Date
EP4621238A2 true EP4621238A2 (fr) 2025-09-24
EP4621238A3 EP4621238A3 (fr) 2025-11-12

Family

ID=96346605

Family Applications (1)

Application Number Title Priority Date Filing Date
EP25189891.2A Pending EP4621238A3 (fr) 2025-07-16 2025-07-16 Procédé de montage d'une pompe à vide à spirales

Country Status (1)

Country Link
EP (1) EP4621238A3 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6884047B1 (en) * 2003-10-20 2005-04-26 Varian, Inc. Compact scroll pump
US9328730B2 (en) * 2013-04-05 2016-05-03 Agilent Technologies, Inc. Angular synchronization of stationary and orbiting plate scroll blades in a scroll pump using a metallic bellows
EP3647599B2 (fr) * 2019-10-07 2025-09-03 Pfeiffer Vacuum Gmbh Pompe à vide, pompe d'extraction et procédé de fabrication des telles pompes
EP4506537B1 (fr) * 2023-08-08 2025-10-08 Pfeiffer Vacuum Technology AG Pompe à vide à spirales

Also Published As

Publication number Publication date
EP4621238A3 (fr) 2025-11-12

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