IT1111588B - Sensore di pressione a semiconduttori,dotato di una pluralita' di diaframmi sensibili alla pressione e procedimento relativo - Google Patents

Sensore di pressione a semiconduttori,dotato di una pluralita' di diaframmi sensibili alla pressione e procedimento relativo

Info

Publication number
IT1111588B
IT1111588B IT21081/79A IT2108179A IT1111588B IT 1111588 B IT1111588 B IT 1111588B IT 21081/79 A IT21081/79 A IT 21081/79A IT 2108179 A IT2108179 A IT 2108179A IT 1111588 B IT1111588 B IT 1111588B
Authority
IT
Italy
Prior art keywords
related procedure
pressure sensor
pressure sensitive
sensitive diaphragms
semiconductor
Prior art date
Application number
IT21081/79A
Other languages
English (en)
Italian (it)
Other versions
IT7921081A0 (it
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of IT7921081A0 publication Critical patent/IT7921081A0/it
Application granted granted Critical
Publication of IT1111588B publication Critical patent/IT1111588B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
IT21081/79A 1978-03-17 1979-03-16 Sensore di pressione a semiconduttori,dotato di una pluralita' di diaframmi sensibili alla pressione e procedimento relativo IT1111588B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2993678A JPS54123077A (en) 1978-03-17 1978-03-17 Pressure sensor

Publications (2)

Publication Number Publication Date
IT7921081A0 IT7921081A0 (it) 1979-03-16
IT1111588B true IT1111588B (it) 1986-01-13

Family

ID=12289864

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21081/79A IT1111588B (it) 1978-03-17 1979-03-16 Sensore di pressione a semiconduttori,dotato di una pluralita' di diaframmi sensibili alla pressione e procedimento relativo

Country Status (6)

Country Link
JP (1) JPS54123077A (fr)
AU (1) AU4500279A (fr)
FR (1) FR2420210A1 (fr)
GB (1) GB2036425B (fr)
IT (1) IT1111588B (fr)
WO (1) WO1979000783A1 (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407296A (en) * 1980-09-12 1983-10-04 Medtronic, Inc. Integral hermetic impantable pressure transducer
EP0049955A1 (fr) * 1980-10-09 1982-04-21 General Motors Corporation Capteur de pression à deux cavités
JPS57104835A (en) * 1980-12-23 1982-06-30 Toyota Motor Corp Detecting method for pressure in internal combustion engine
US4432372A (en) * 1981-08-28 1984-02-21 Medtronic, Inc. Two-lead power/signal multiplexed transducer
JPS5915944U (ja) * 1982-07-21 1984-01-31 株式会社日立製作所 差圧検出器
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
DE3772514D1 (de) * 1986-10-28 1991-10-02 Sumitomo Electric Industries Messverfahren fuer einen halbleiter-druckmessfuehler.
US4850228A (en) * 1987-05-27 1989-07-25 Smc Corporation Pressure meter
JPS6461634A (en) * 1987-09-02 1989-03-08 Matsushita Electric Industrial Co Ltd Semiconductor pressure sensor
JPS6461637A (en) * 1987-09-02 1989-03-08 Matsushita Electric Industrial Co Ltd Semiconductor pressure sensor
JPH0814518B2 (ja) * 1987-12-28 1996-02-14 松下電器産業株式会社 半導体圧力センサの製造方法
JPH03200034A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JPH03200035A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JP2771070B2 (ja) * 1992-03-25 1998-07-02 日立建機株式会社 差圧センサ
AU658524B1 (en) * 1993-08-17 1995-04-13 Yokogawa Electric Corporation Semiconductor type differential pressure measurement apparatus and method for manufacturing the same
DE19648048C2 (de) * 1995-11-21 2001-11-29 Fuji Electric Co Ltd Detektorvorrichtung zur Druckmessung basierend auf gemessenen Kapazitätswerten
US7077008B2 (en) * 2004-07-02 2006-07-18 Honeywell International Inc. Differential pressure measurement using backside sensing and a single ASIC
JP2008511003A (ja) * 2004-08-23 2008-04-10 ハネウェル・インターナショナル・インコーポレーテッド 微細加工された絶対圧検知ダイを使用している排ガス循環装置
US7401522B2 (en) * 2005-05-26 2008-07-22 Rosemount Inc. Pressure sensor using compressible sensor body

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE336042B (fr) * 1967-05-03 1971-06-21 Mallory & Co Inc P R
JPS5135294A (fr) * 1974-09-20 1976-03-25 Hitachi Ltd
JPS5190587A (fr) * 1975-02-07 1976-08-09
JPS5255392A (en) * 1975-10-31 1977-05-06 Hitachi Ltd Semiconductor pressure sensor

Also Published As

Publication number Publication date
GB2036425B (en) 1983-02-09
AU4500279A (en) 1979-09-20
IT7921081A0 (it) 1979-03-16
FR2420210A1 (fr) 1979-10-12
GB2036425A (en) 1980-06-25
FR2420210B1 (fr) 1984-07-06
JPS54123077A (en) 1979-09-25
WO1979000783A1 (fr) 1979-10-18

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