FR2879800B1 - Dispositif a memoire integree et procede - Google Patents
Dispositif a memoire integree et procedeInfo
- Publication number
- FR2879800B1 FR2879800B1 FR0507831A FR0507831A FR2879800B1 FR 2879800 B1 FR2879800 B1 FR 2879800B1 FR 0507831 A FR0507831 A FR 0507831A FR 0507831 A FR0507831 A FR 0507831A FR 2879800 B1 FR2879800 B1 FR 2879800B1
- Authority
- FR
- France
- Prior art keywords
- memory device
- integrated memory
- integrated
- memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0416—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/30—Devices controlled by electric currents or voltages
- H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H10D48/34—Bipolar devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
- H10D8/812—Charge-trapping diodes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Mram Or Spin Memory Techniques (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/918,335 US8288813B2 (en) | 2004-08-13 | 2004-08-13 | Integrated memory device having columns having multiple bit lines |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2879800A1 FR2879800A1 (fr) | 2006-06-23 |
| FR2879800B1 true FR2879800B1 (fr) | 2015-05-29 |
Family
ID=34862261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR0507831A Expired - Fee Related FR2879800B1 (fr) | 2004-08-13 | 2005-07-22 | Dispositif a memoire integree et procede |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US8288813B2 (fr) |
| JP (1) | JP4571544B2 (fr) |
| CN (1) | CN1750170B (fr) |
| DE (1) | DE102005029493B4 (fr) |
| FR (1) | FR2879800B1 (fr) |
| GB (1) | GB2417131B (fr) |
Families Citing this family (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100526478B1 (ko) * | 2003-12-31 | 2005-11-08 | 동부아남반도체 주식회사 | 반도체 소자 및 그 제조방법 |
| DE102005007822B4 (de) * | 2005-02-21 | 2014-05-22 | Infineon Technologies Ag | Integrierte Schaltungsanordnung mit Tunnel-Feldeffekttransistor |
| US7679130B2 (en) * | 2005-05-10 | 2010-03-16 | Infineon Technologies Ag | Deep trench isolation structures and methods of formation thereof |
| US7372674B2 (en) * | 2005-07-22 | 2008-05-13 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic tunnel transistor with high magnetocurrent and stronger pinning |
| US7319618B2 (en) * | 2005-08-16 | 2008-01-15 | Macronic International Co., Ltd. | Low-k spacer structure for flash memory |
| JP4775849B2 (ja) * | 2006-01-13 | 2011-09-21 | 富士通セミコンダクター株式会社 | 半導体素子及びそれを用いた半導体記憶装置、及びそのデータ書込み方法、データ読出し方法、及びそれらの製造方法 |
| US7880160B2 (en) * | 2006-05-22 | 2011-02-01 | Qimonda Ag | Memory using tunneling field effect transistors |
| DE102006040238A1 (de) * | 2006-08-28 | 2008-03-13 | Qimonda Ag | Transistor, Speicherzellenanordnung und Verfahren zum Herstellen und Betreiben eines Speicherelements mit mindestens einer Speicherzelle, insbesondere einer resistiv schaltenden Speicherzelle und Speicherelement |
| US7359226B2 (en) | 2006-08-28 | 2008-04-15 | Qimonda Ag | Transistor, memory cell array and method for forming and operating a memory device |
| US8384065B2 (en) * | 2009-12-04 | 2013-02-26 | International Business Machines Corporation | Gate-all-around nanowire field effect transistors |
| US8455334B2 (en) * | 2009-12-04 | 2013-06-04 | International Business Machines Corporation | Planar and nanowire field effect transistors |
| US8173993B2 (en) * | 2009-12-04 | 2012-05-08 | International Business Machines Corporation | Gate-all-around nanowire tunnel field effect transistors |
| US8129247B2 (en) * | 2009-12-04 | 2012-03-06 | International Business Machines Corporation | Omega shaped nanowire field effect transistors |
| US8143113B2 (en) * | 2009-12-04 | 2012-03-27 | International Business Machines Corporation | Omega shaped nanowire tunnel field effect transistors fabrication |
| US8097515B2 (en) * | 2009-12-04 | 2012-01-17 | International Business Machines Corporation | Self-aligned contacts for nanowire field effect transistors |
| CN101777559A (zh) * | 2009-12-24 | 2010-07-14 | 复旦大学 | 一种自对准的垂直式半导体存储器器件及存储器阵列 |
| US8722492B2 (en) * | 2010-01-08 | 2014-05-13 | International Business Machines Corporation | Nanowire pin tunnel field effect devices |
| US8324940B2 (en) | 2010-04-13 | 2012-12-04 | International Business Machines Corporation | Nanowire circuits in matched devices |
| US8361907B2 (en) | 2010-05-10 | 2013-01-29 | International Business Machines Corporation | Directionally etched nanowire field effect transistors |
| US8324030B2 (en) | 2010-05-12 | 2012-12-04 | International Business Machines Corporation | Nanowire tunnel field effect transistors |
| CN101866931A (zh) * | 2010-05-19 | 2010-10-20 | 中国科学院微电子研究所 | 半导体结构及其形成方法 |
| WO2011153451A2 (fr) | 2010-06-04 | 2011-12-08 | The Penn State Research Foundation | Dispositifs de mémoire 4t basés sur un transistor à effet de champ tfet |
| US8399918B2 (en) * | 2010-06-24 | 2013-03-19 | Semiconductor Components Industries, Llc | Electronic device including a tunnel structure |
| US8835231B2 (en) | 2010-08-16 | 2014-09-16 | International Business Machines Corporation | Methods of forming contacts for nanowire field effect transistors |
| US8254173B2 (en) | 2010-08-31 | 2012-08-28 | Micron Technology, Inc. | NAND memory constructions |
| US8536563B2 (en) | 2010-09-17 | 2013-09-17 | International Business Machines Corporation | Nanowire field effect transistors |
| CN102456745B (zh) * | 2010-10-22 | 2013-09-04 | 北京大学 | 一种快闪存储器及其制备方法和操作方法 |
| CN102738244B (zh) * | 2011-04-08 | 2015-07-29 | 北京大学 | 一种sonos快闪存储器及其制备方法和操作方法 |
| CN102738169A (zh) * | 2011-04-13 | 2012-10-17 | 北京大学 | 一种快闪存储器及其制备方法 |
| CN102354694A (zh) * | 2011-08-25 | 2012-02-15 | 复旦大学 | 一种自对准的垂直式非挥发性半导体存储器件 |
| CN103022040B (zh) * | 2011-09-28 | 2015-12-02 | 无锡华润上华科技有限公司 | 只读存储器及其制作方法 |
| JP5743831B2 (ja) * | 2011-09-29 | 2015-07-01 | 株式会社東芝 | 半導体装置 |
| CN103137626A (zh) * | 2011-11-29 | 2013-06-05 | 中国科学院微电子研究所 | 一种平面浮栅闪存器件及其制备方法 |
| US9356158B2 (en) | 2012-07-20 | 2016-05-31 | Semiconductor Components Industries, Llc | Electronic device including a tunnel structure |
| JP2014203851A (ja) | 2013-04-01 | 2014-10-27 | 株式会社東芝 | 半導体装置及びその製造方法 |
| CN103247626A (zh) | 2013-05-02 | 2013-08-14 | 复旦大学 | 一种半浮栅器件及其制造方法 |
| CN103594376B (zh) * | 2013-11-08 | 2016-02-17 | 北京大学 | 一种结调制型隧穿场效应晶体管及其制备方法 |
| US9391162B2 (en) * | 2014-04-04 | 2016-07-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Tunnel MOSFET with ferroelectric gate stack |
| US9397176B2 (en) * | 2014-07-30 | 2016-07-19 | Freescale Semiconductor, Inc. | Method of forming split gate memory with improved reliability |
| JP6872132B2 (ja) | 2016-03-07 | 2021-05-19 | ソニーグループ株式会社 | 半導体記憶素子、半導体装置、電子機器、および半導体記憶素子の製造方法 |
| KR102638610B1 (ko) * | 2017-01-11 | 2024-02-22 | 삼성전자주식회사 | 자기 메모리 장치 |
| JP7016177B2 (ja) * | 2017-09-29 | 2022-02-04 | 国立研究開発法人産業技術総合研究所 | 半導体装置 |
| US11222970B2 (en) * | 2017-12-28 | 2022-01-11 | Integrated Silicon Solution, (Cayman) Inc. | Perpendicular magnetic tunnel junction memory cells having vertical channels |
| US10658425B2 (en) | 2017-12-28 | 2020-05-19 | Spin Memory, Inc. | Methods of forming perpendicular magnetic tunnel junction memory cells having vertical channels |
| US10468293B2 (en) | 2017-12-28 | 2019-11-05 | Spin Memory, Inc. | Methods of forming perpendicular magnetic tunnel junction memory cells having vertical channels |
| US10460778B2 (en) | 2017-12-29 | 2019-10-29 | Spin Memory, Inc. | Perpendicular magnetic tunnel junction memory cells having shared source contacts |
| CN108417575A (zh) * | 2018-03-14 | 2018-08-17 | 上海华虹宏力半导体制造有限公司 | 闪存单元、闪存阵列及其操作方法 |
| CN111223868A (zh) * | 2018-11-27 | 2020-06-02 | 钰成投资股份有限公司 | 半导体非挥发性存储元件结构 |
| CN112349322A (zh) * | 2019-08-06 | 2021-02-09 | 上海磁宇信息科技有限公司 | 磁性随机存储器架构及其制造方法 |
| US11581334B2 (en) * | 2021-02-05 | 2023-02-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cocktail layer over gate dielectric layer of FET FeRAM |
| US20220302129A1 (en) * | 2021-03-10 | 2022-09-22 | Invention And Collaboration Laboratory Pte. Ltd. | SRAM Cell Structures |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US642400A (en) * | 1899-06-13 | 1900-01-30 | Joseph White | Checking or unchecking device. |
| JPS6194372A (ja) | 1984-10-16 | 1986-05-13 | Oki Electric Ind Co Ltd | 半導体メモリ素子 |
| US5420060A (en) * | 1988-11-14 | 1995-05-30 | Texas Instruments Incorporated | Method of making contract-free floating-gate memory array with silicided buried bitlines and with single-step defined floating gates |
| JP2702798B2 (ja) | 1990-03-29 | 1998-01-26 | 松下電子工業株式会社 | 半導体記憶装置 |
| JPH06326323A (ja) | 1993-05-14 | 1994-11-25 | Nec Corp | 不揮発性トンネルトランジスタおよびメモリ回路 |
| US5541875A (en) | 1994-07-01 | 1996-07-30 | Advanced Micro Devices, Inc. | High energy buried layer implant to provide a low resistance p-well in a flash EPROM array |
| US5574685A (en) * | 1994-09-01 | 1996-11-12 | Advanced Micro Devices, Inc. | Self-aligned buried channel/junction stacked gate flash memory cell |
| US6965142B2 (en) * | 1995-03-07 | 2005-11-15 | Impinj, Inc. | Floating-gate semiconductor structures |
| US5882970A (en) * | 1995-11-03 | 1999-03-16 | United Microelectronics Corporation | Method for fabricating flash memory cell having a decreased overlapped region between its source and gate |
| JP3363038B2 (ja) | 1996-09-18 | 2003-01-07 | 株式会社東芝 | 半導体記憶装置 |
| US5936265A (en) * | 1996-03-25 | 1999-08-10 | Kabushiki Kaisha Toshiba | Semiconductor device including a tunnel effect element |
| US5759896A (en) * | 1996-06-25 | 1998-06-02 | United Microelectronics Corporation | Process for fabricating memory cells of flash memory |
| JP3592898B2 (ja) | 1997-07-31 | 2004-11-24 | 株式会社東芝 | 半導体装置 |
| KR100273705B1 (ko) | 1997-12-22 | 2000-12-15 | 윤종용 | 불휘발성반도체메모리장치의웰구조및그에따른제조방법 |
| US6424000B1 (en) | 1999-05-11 | 2002-07-23 | Vantis Corporation | Floating gate memory apparatus and method for selected programming thereof |
| US6084262A (en) * | 1999-08-19 | 2000-07-04 | Worldwide Semiconductor Mfg | Etox cell programmed by band-to-band tunneling induced substrate hot electron and read by gate induced drain leakage current |
| DE19943390A1 (de) | 1999-09-10 | 2001-05-03 | Walter Hansch | Halbleiterbauelement |
| US6181601B1 (en) * | 1999-12-02 | 2001-01-30 | Taiwan Semiconductor Manufacturing Corporation | Flash memory cell using p+/N-well diode with double poly floating gate |
| US6580124B1 (en) * | 2000-08-14 | 2003-06-17 | Matrix Semiconductor Inc. | Multigate semiconductor device with vertical channel current and method of fabrication |
| US6438030B1 (en) | 2000-08-15 | 2002-08-20 | Motorola, Inc. | Non-volatile memory, method of manufacture, and method of programming |
| JP2002373946A (ja) * | 2001-06-13 | 2002-12-26 | Mitsubishi Electric Corp | スタティック型半導体記憶装置 |
| US6696742B2 (en) * | 2001-10-16 | 2004-02-24 | Infineon Technologies Ag | Semiconductor memory device |
| US6844588B2 (en) * | 2001-12-19 | 2005-01-18 | Freescale Semiconductor, Inc. | Non-volatile memory |
| WO2004001801A2 (fr) | 2002-06-19 | 2003-12-31 | The Board Of Trustees Of The Leland Stanford Junior University | Dispositif a semi-conducteur a grille isolee et procede associe impliquant l'utilisation d'une region intermediaire induite par jonctions |
| US6862216B1 (en) * | 2004-06-29 | 2005-03-01 | National Semiconductor Corporation | Non-volatile memory cell with gated diode and MOS transistor and method for using such cell |
-
2004
- 2004-08-13 US US10/918,335 patent/US8288813B2/en not_active Expired - Fee Related
-
2005
- 2005-06-24 DE DE102005029493.6A patent/DE102005029493B4/de not_active Expired - Fee Related
- 2005-07-01 GB GB0513538A patent/GB2417131B/en not_active Expired - Fee Related
- 2005-07-06 JP JP2005198146A patent/JP4571544B2/ja not_active Expired - Fee Related
- 2005-07-22 FR FR0507831A patent/FR2879800B1/fr not_active Expired - Fee Related
- 2005-08-15 CN CN2005100917257A patent/CN1750170B/zh not_active Expired - Fee Related
-
2011
- 2011-03-21 US US13/052,728 patent/US8389357B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1750170B (zh) | 2013-06-05 |
| GB0513538D0 (en) | 2005-08-10 |
| DE102005029493B4 (de) | 2014-10-16 |
| GB2417131B (en) | 2006-10-11 |
| GB2417131A (en) | 2006-02-15 |
| DE102005029493A1 (de) | 2006-02-23 |
| CN1750170A (zh) | 2006-03-22 |
| US20060033145A1 (en) | 2006-02-16 |
| US20110171803A1 (en) | 2011-07-14 |
| US8389357B2 (en) | 2013-03-05 |
| US8288813B2 (en) | 2012-10-16 |
| JP2006054435A (ja) | 2006-02-23 |
| FR2879800A1 (fr) | 2006-06-23 |
| JP4571544B2 (ja) | 2010-10-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |
Effective date: 20070330 |
|
| RN | Application for restoration | ||
| FC | Decision of inpi director general to approve request for restoration | ||
| PLFP | Fee payment |
Year of fee payment: 12 |
|
| PLFP | Fee payment |
Year of fee payment: 13 |
|
| PLFP | Fee payment |
Year of fee payment: 14 |
|
| PLFP | Fee payment |
Year of fee payment: 16 |
|
| ST | Notification of lapse |
Effective date: 20220305 |