FR3137726B1 - Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor - Google Patents

Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor Download PDF

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Publication number
FR3137726B1
FR3137726B1 FR2206931A FR2206931A FR3137726B1 FR 3137726 B1 FR3137726 B1 FR 3137726B1 FR 2206931 A FR2206931 A FR 2206931A FR 2206931 A FR2206931 A FR 2206931A FR 3137726 B1 FR3137726 B1 FR 3137726B1
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FR
France
Prior art keywords
rotor
vacuum pump
manufacturing
methods
turbomolecular vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2206931A
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English (en)
Other versions
FR3137726A1 (fr
Inventor
Nicolas Varennes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR2206931A priority Critical patent/FR3137726B1/fr
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to PCT/EP2023/060724 priority patent/WO2024008348A1/fr
Priority to CN202380049597.6A priority patent/CN119422011A/zh
Priority to JP2025500006A priority patent/JP2025524560A/ja
Priority to US18/881,063 priority patent/US12584487B2/en
Priority to DE112023002990.3T priority patent/DE112023002990T5/de
Priority to TW112116561A priority patent/TW202417744A/zh
Publication of FR3137726A1 publication Critical patent/FR3137726A1/fr
Application granted granted Critical
Publication of FR3137726B1 publication Critical patent/FR3137726B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/25—Direct deposition of metal particles, e.g. direct metal deposition [DMD] or laser engineered net shaping [LENS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/009—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of turbine components other than turbine blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/06—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of threaded articles, e.g. nuts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/38—Blades
    • F04D29/384—Blades characterised by form
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0433—Nickel- or cobalt-based alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/30—Manufacture with deposition of material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/30—Manufacture with deposition of material
    • F05D2230/31—Layer deposition
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/20—Rotors
    • F05D2240/30—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor
    • F05D2240/301—Cross-sectional characteristics

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Powder Metallurgy (AREA)

Abstract

Pompe à vide (1) turbomoléculaire comportant un stator (2) et un rotor (3) configuré pour tourner dans le stator (2), le rotor (3) comportant un moyeu (9) et au moins un étage de pales (10a-10h) comprenant des pales (11a, 11b) réparties régulièrement en périphérie du moyeu (9), caractérisée en ce que les pales (11a) d’au moins un étage de pales (10a) du rotor (3) sont creuses. Figure 1
FR2206931A 2022-07-07 2022-07-07 Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor Active FR3137726B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR2206931A FR3137726B1 (fr) 2022-07-07 2022-07-07 Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor
CN202380049597.6A CN119422011A (zh) 2022-07-07 2023-04-25 涡轮分子真空泵和用于制造转子的方法
JP2025500006A JP2025524560A (ja) 2022-07-07 2023-04-25 ターボ分子真空ポンプ及びそのロータの製造方法
US18/881,063 US12584487B2 (en) 2022-07-07 2023-04-25 Turbomolecular vacuum pump and methods for manufacturing a rotor
PCT/EP2023/060724 WO2024008348A1 (fr) 2022-07-07 2023-04-25 Pompe à vide turbomoléculaire et procédés de fabrication d'un rotor
DE112023002990.3T DE112023002990T5 (de) 2022-07-07 2023-04-25 Turbomolekularvakuumpumpe und Verfahren zur Herstellung eines Rotors
TW112116561A TW202417744A (zh) 2022-07-07 2023-05-04 渦輪分子真空泵及用於製造轉子的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2206931 2022-07-07
FR2206931A FR3137726B1 (fr) 2022-07-07 2022-07-07 Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor

Publications (2)

Publication Number Publication Date
FR3137726A1 FR3137726A1 (fr) 2024-01-12
FR3137726B1 true FR3137726B1 (fr) 2024-06-21

Family

ID=83188950

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2206931A Active FR3137726B1 (fr) 2022-07-07 2022-07-07 Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor

Country Status (7)

Country Link
US (1) US12584487B2 (fr)
JP (1) JP2025524560A (fr)
CN (1) CN119422011A (fr)
DE (1) DE112023002990T5 (fr)
FR (1) FR3137726B1 (fr)
TW (1) TW202417744A (fr)
WO (1) WO2024008348A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024165740A (ja) * 2023-05-18 2024-11-28 株式会社島津製作所 真空ポンプのロータ翼の製造方法、真空ポンプのロータ翼、真空ポンプ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11230084A (ja) * 1998-02-18 1999-08-24 Ebara Corp ターボ分子ポンプ
ATE362051T1 (de) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
EP2108844A3 (fr) * 2008-03-26 2013-09-18 Ebara Corporation Pompe à vide turbomoléculaire
US11098722B2 (en) * 2011-04-20 2021-08-24 Daniel Woody Internal combustion boundary layer turbine engine (BLTE)
EP3085964B1 (fr) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production d'un composant de pompe à vide par fabrication additive métallique
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump
DE102018119747B3 (de) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
JP7192660B2 (ja) * 2019-05-30 2022-12-20 株式会社島津製作所 真空ポンプおよびリークディテクタ
US12037923B2 (en) * 2019-07-08 2024-07-16 Pratt & Whitney Canada Corp. Pulse-managed plasma method for coating on internal surfaces of workpieces

Also Published As

Publication number Publication date
CN119422011A (zh) 2025-02-11
FR3137726A1 (fr) 2024-01-12
TW202417744A (zh) 2024-05-01
DE112023002990T5 (de) 2025-07-10
JP2025524560A (ja) 2025-07-30
US20260002541A1 (en) 2026-01-01
US12584487B2 (en) 2026-03-24
WO2024008348A1 (fr) 2024-01-11

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