IL137070A - Plasma device that includes a non-magnetically operated metal unit between the AC alarm source and the plasma - Google Patents

Plasma device that includes a non-magnetically operated metal unit between the AC alarm source and the plasma

Info

Publication number
IL137070A
IL137070A IL13707098A IL13707098A IL137070A IL 137070 A IL137070 A IL 137070A IL 13707098 A IL13707098 A IL 13707098A IL 13707098 A IL13707098 A IL 13707098A IL 137070 A IL137070 A IL 137070A
Authority
IL
Israel
Prior art keywords
plasma
chamber
coil
plasma device
metal member
Prior art date
Application number
IL13707098A
Other languages
English (en)
Hebrew (he)
Other versions
IL137070A0 (en
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of IL137070A0 publication Critical patent/IL137070A0/xx
Publication of IL137070A publication Critical patent/IL137070A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Primary Cells (AREA)
  • Drying Of Semiconductors (AREA)
IL13707098A 1997-12-31 1998-12-31 Plasma device that includes a non-magnetically operated metal unit between the AC alarm source and the plasma IL137070A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/001,512 US6280563B1 (en) 1997-12-31 1997-12-31 Plasma device including a powered non-magnetic metal member between a plasma AC excitation source and the plasma
PCT/US1998/027885 WO1999034399A1 (en) 1997-12-31 1998-12-31 Plasma device including a powered non-magnetic metal member between a plasma ac excitation source and the plasma

Publications (2)

Publication Number Publication Date
IL137070A0 IL137070A0 (en) 2001-06-14
IL137070A true IL137070A (en) 2004-01-04

Family

ID=21696416

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13707098A IL137070A (en) 1997-12-31 1998-12-31 Plasma device that includes a non-magnetically operated metal unit between the AC alarm source and the plasma

Country Status (10)

Country Link
US (1) US6280563B1 (de)
EP (1) EP1044459B1 (de)
JP (1) JP4709376B2 (de)
KR (1) KR100630885B1 (de)
AT (1) ATE240585T1 (de)
AU (1) AU2210299A (de)
DE (1) DE69814687T2 (de)
IL (1) IL137070A (de)
TW (1) TW423020B (de)
WO (1) WO1999034399A1 (de)

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KR102171725B1 (ko) * 2013-06-17 2020-10-29 어플라이드 머티어리얼스, 인코포레이티드 플라즈마 반응기를 위한 강화된 플라즈마 소스
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JP6889043B2 (ja) * 2017-06-15 2021-06-18 株式会社アルバック プラズマ処理装置
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CN110491759A (zh) * 2019-08-21 2019-11-22 江苏鲁汶仪器有限公司 一种等离子体刻蚀系统
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CN113113280B (zh) * 2020-01-09 2022-06-10 江苏鲁汶仪器有限公司 等离子体处理系统及其开合法拉第组件
CN113675063B (zh) * 2020-05-15 2024-03-12 中微半导体设备(上海)股份有限公司 一种等离子体处理装置及其导磁组件与方法
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Also Published As

Publication number Publication date
WO1999034399A1 (en) 1999-07-08
EP1044459B1 (de) 2003-05-14
JP2002500413A (ja) 2002-01-08
IL137070A0 (en) 2001-06-14
DE69814687D1 (de) 2003-06-18
US6280563B1 (en) 2001-08-28
AU2210299A (en) 1999-07-19
DE69814687T2 (de) 2004-02-26
KR20010033787A (ko) 2001-04-25
TW423020B (en) 2001-02-21
ATE240585T1 (de) 2003-05-15
WO1999034399B1 (en) 1999-08-26
JP4709376B2 (ja) 2011-06-22
KR100630885B1 (ko) 2006-10-02
EP1044459A1 (de) 2000-10-18

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