IL89648A - Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefrom - Google Patents
Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefromInfo
- Publication number
- IL89648A IL89648A IL89648A IL8964889A IL89648A IL 89648 A IL89648 A IL 89648A IL 89648 A IL89648 A IL 89648A IL 8964889 A IL8964889 A IL 8964889A IL 89648 A IL89648 A IL 89648A
- Authority
- IL
- Israel
- Prior art keywords
- novolak resins
- thermal stability
- prepared therefrom
- positive photoresists
- high thermal
- Prior art date
Links
- 229920003986 novolac Polymers 0.000 title abstract 3
- 229920005989 resin Polymers 0.000 title abstract 3
- 239000011347 resin Substances 0.000 title abstract 3
- 229920002120 photoresistant polymer Polymers 0.000 title abstract 2
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 title 1
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 abstract 6
- 150000003934 aromatic aldehydes Chemical class 0.000 abstract 3
- 239000000203 mixture Substances 0.000 abstract 3
- 229930192627 Naphthoquinone Natural products 0.000 abstract 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000007859 condensation product Substances 0.000 abstract 1
- 238000009472 formulation Methods 0.000 abstract 1
- 150000002791 naphthoquinones Chemical class 0.000 abstract 1
- 150000002989 phenols Chemical class 0.000 abstract 1
- 239000003504 photosensitizing agent Substances 0.000 abstract 1
- 239000002243 precursor Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
- C08G8/10—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ with phenol
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
- G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Phenolic Resins Or Amino Resins (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Inks, Pencil-Leads, Or Crayons (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17547388A | 1988-03-31 | 1988-03-31 | |
| US29782888A | 1988-04-22 | 1988-04-22 | |
| US07/227,404 US4920028A (en) | 1988-03-31 | 1988-08-02 | High contrast high thermal stability positive photoresists with mixed cresol and hydroxybenzaldehyde prepared novolak and photosensitive diazoquinone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL89648A0 IL89648A0 (en) | 1989-09-28 |
| IL89648A true IL89648A (en) | 1993-01-31 |
Family
ID=27390543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL89648A IL89648A (en) | 1988-03-31 | 1989-03-17 | Mixed aldehyde novolak resins and high contrast high thermal stability positive photoresists prepared therefrom |
Country Status (10)
| Country | Link |
|---|---|
| EP (1) | EP0336604B1 (de) |
| JP (1) | JPH0776254B2 (de) |
| KR (1) | KR930006913B1 (de) |
| AT (1) | ATE118225T1 (de) |
| AU (1) | AU3235289A (de) |
| DE (1) | DE68921017T2 (de) |
| DK (1) | DK155089A (de) |
| HK (1) | HK158995A (de) |
| IL (1) | IL89648A (de) |
| NO (1) | NO891063L (de) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5182184A (en) * | 1990-02-05 | 1993-01-26 | Morton International, Inc. | Novolak resins of lowered hydroxyl content and high contrast high thermal stability positive photoresists prepared therefrom |
| JPH03253860A (ja) * | 1990-03-05 | 1991-11-12 | Fuji Photo Film Co Ltd | ポジ型フオトレジスト組成物 |
| JPH03294861A (ja) * | 1990-04-13 | 1991-12-26 | Mitsubishi Petrochem Co Ltd | ポジ型フォトレジスト組成物 |
| JPH05323605A (ja) * | 1992-05-27 | 1993-12-07 | Sumitomo Chem Co Ltd | ポジ型レジスト組成物 |
| JP3319092B2 (ja) * | 1993-11-08 | 2002-08-26 | 住友化学工業株式会社 | ポジ型レジスト組成物 |
| EP0660186A1 (de) * | 1993-12-20 | 1995-06-28 | Mitsubishi Chemical Corporation | Lichtempfindliche Harzzusammensetzung und Verfahren zur Bildherstellung damit |
| JP3424341B2 (ja) * | 1994-04-11 | 2003-07-07 | 住友化学工業株式会社 | 感光性樹脂組成物 |
| JP3635598B2 (ja) * | 1995-07-13 | 2005-04-06 | 富士写真フイルム株式会社 | ポジ型フォトレジスト組成物 |
| US5709977A (en) * | 1995-07-13 | 1998-01-20 | Fuji Photo Film Co., Ltd. | Positive working photoresist composition |
| JP2006010779A (ja) * | 2004-06-22 | 2006-01-12 | Nagase Chemtex Corp | 有機膜組成物及びレジストパターン形成方法 |
| KR101324645B1 (ko) * | 2006-05-08 | 2013-11-01 | 주식회사 동진쎄미켐 | 포토레지스트 조성물 |
| JP5581046B2 (ja) * | 2009-01-09 | 2014-08-27 | 昭和電工株式会社 | ノボラック樹脂の製造方法およびノボラック樹脂 |
| CN102577712A (zh) * | 2012-03-16 | 2012-07-18 | 广西钦州力顺机械有限公司 | 可于甘蔗蔗种下方施肥的甘蔗种植机 |
| JP6070020B2 (ja) * | 2012-09-28 | 2017-02-01 | 明和化成株式会社 | ノボラック型フェノール樹脂の製造方法、ノボラック型フェノール樹脂、及びフォトレジスト組成物 |
| WO2014069091A1 (ja) * | 2012-10-30 | 2014-05-08 | 住友ベークライト株式会社 | 感光性樹脂組成物、硬化膜、保護膜、絶縁膜および電子装置 |
| WO2014104126A1 (ja) | 2012-12-26 | 2014-07-03 | セントラル硝子株式会社 | ヘキサフルオロイソプロパノール基を含むノボラック樹脂およびその製造方法、並びにその組成物 |
| JP6555975B2 (ja) * | 2015-08-07 | 2019-08-07 | 群栄化学工業株式会社 | 新規イミン基含有樹脂 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58134631A (ja) * | 1982-01-08 | 1983-08-10 | Konishiroku Photo Ind Co Ltd | 感光性組成物 |
| JPS62123444A (ja) * | 1985-08-07 | 1987-06-04 | Japan Synthetic Rubber Co Ltd | ポジ型感放射線性樹脂組成物 |
| JPH0654381B2 (ja) * | 1985-12-24 | 1994-07-20 | 日本合成ゴム株式会社 | 集積回路作製用ポジ型レジスト |
| EP0227487B1 (de) * | 1985-12-27 | 1992-07-15 | Japan Synthetic Rubber Co., Ltd. | Strahlungsempfindliche positiv arbeitende Kunststoffzusammensetzung |
| JPS62198852A (ja) * | 1986-02-27 | 1987-09-02 | Japan Synthetic Rubber Co Ltd | ポジ型感放射線性樹脂組成物 |
| JPH0654389B2 (ja) * | 1986-06-23 | 1994-07-20 | 日本合成ゴム株式会社 | ポジ型感放射線性樹脂組成物 |
-
1989
- 1989-03-13 NO NO89891063A patent/NO891063L/no unknown
- 1989-03-17 IL IL89648A patent/IL89648A/xx unknown
- 1989-03-22 AT AT89302864T patent/ATE118225T1/de not_active IP Right Cessation
- 1989-03-22 EP EP89302864A patent/EP0336604B1/de not_active Expired - Lifetime
- 1989-03-22 DE DE68921017T patent/DE68921017T2/de not_active Expired - Fee Related
- 1989-03-30 DK DK155089A patent/DK155089A/da not_active IP Right Cessation
- 1989-03-31 KR KR1019890004163A patent/KR930006913B1/ko not_active Expired - Fee Related
- 1989-03-31 AU AU32352/89A patent/AU3235289A/en not_active Abandoned
- 1989-03-31 JP JP1078689A patent/JPH0776254B2/ja not_active Expired - Fee Related
-
1995
- 1995-10-12 HK HK158995A patent/HK158995A/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| HK158995A (en) | 1995-10-20 |
| NO891063L (no) | 1989-10-02 |
| DK155089A (da) | 1989-10-01 |
| AU3235289A (en) | 1989-10-05 |
| IL89648A0 (en) | 1989-09-28 |
| EP0336604A3 (en) | 1990-07-25 |
| JPH0776254B2 (ja) | 1995-08-16 |
| KR890014613A (ko) | 1989-10-24 |
| DE68921017D1 (de) | 1995-03-23 |
| EP0336604A2 (de) | 1989-10-11 |
| KR930006913B1 (ko) | 1993-07-24 |
| JPH0284414A (ja) | 1990-03-26 |
| DE68921017T2 (de) | 1995-06-01 |
| EP0336604B1 (de) | 1995-02-08 |
| ATE118225T1 (de) | 1995-02-15 |
| NO891063D0 (no) | 1989-03-13 |
| DK155089D0 (da) | 1989-03-30 |
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