IL94799A - Photosensitive compositions comprising selected photoactive materials, and their use in producing high resolution, photoresist images with near ultraviolet radiation - Google Patents

Photosensitive compositions comprising selected photoactive materials, and their use in producing high resolution, photoresist images with near ultraviolet radiation

Info

Publication number
IL94799A
IL94799A IL9479990A IL9479990A IL94799A IL 94799 A IL94799 A IL 94799A IL 9479990 A IL9479990 A IL 9479990A IL 9479990 A IL9479990 A IL 9479990A IL 94799 A IL94799 A IL 94799A
Authority
IL
Israel
Prior art keywords
acid
phenothiazine
radiation
photoresist
photosensitive composition
Prior art date
Application number
IL9479990A
Other languages
English (en)
Other versions
IL94799A0 (en
Original Assignee
Rohm & Haas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm & Haas filed Critical Rohm & Haas
Publication of IL94799A0 publication Critical patent/IL94799A0/xx
Publication of IL94799A publication Critical patent/IL94799A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/12—Nitrogen compound containing
    • Y10S430/121—Nitrogen in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/122—Sulfur compound containing
    • Y10S430/123—Sulfur in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/126—Halogen compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/127—Spectral sensitizer containing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Polymerisation Methods In General (AREA)
IL9479990A 1989-06-20 1990-06-20 Photosensitive compositions comprising selected photoactive materials, and their use in producing high resolution, photoresist images with near ultraviolet radiation IL94799A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US36943889A 1989-06-20 1989-06-20

Publications (2)

Publication Number Publication Date
IL94799A0 IL94799A0 (en) 1991-04-15
IL94799A true IL94799A (en) 1994-02-27

Family

ID=23455488

Family Applications (1)

Application Number Title Priority Date Filing Date
IL9479990A IL94799A (en) 1989-06-20 1990-06-20 Photosensitive compositions comprising selected photoactive materials, and their use in producing high resolution, photoresist images with near ultraviolet radiation

Country Status (13)

Country Link
US (1) US5391465A (de)
EP (1) EP0404499A3 (de)
JP (1) JP3026503B2 (de)
KR (1) KR0155990B1 (de)
CN (1) CN1048931A (de)
AU (1) AU5764390A (de)
BR (1) BR9002906A (de)
CA (1) CA2017338A1 (de)
FI (1) FI903096A7 (de)
IE (1) IE902217A1 (de)
IL (1) IL94799A (de)
NO (1) NO902666L (de)
ZA (1) ZA904704B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69032077T2 (de) * 1989-10-17 1998-12-03 Shipley Co., Inc., Newton, Mass. Fotoresist für nahes U.V.
DE69131673T2 (de) * 1990-06-19 2000-04-20 Shipley Co., Inc. Säuregehärtete Photoresiste
EP0599779A1 (de) * 1992-10-29 1994-06-01 OCG Microelectronic Materials AG Hochauflösender negativ arbeitender Photoresist mit grossem Prozessspielraum
EP0733665B1 (de) * 1995-03-23 1998-07-29 Siemens Aktiengesellschaft Verfahren zur Herstellung von Polybenzoxazol-Vorstufen und entsprechender Resistlösungen
JP3433017B2 (ja) * 1995-08-31 2003-08-04 株式会社東芝 感光性組成物
US5763134A (en) 1996-05-13 1998-06-09 Imation Corp Composition comprising photochemical acid progenitor and specific squarylium dye
US7147983B1 (en) * 1996-10-07 2006-12-12 Shipley Company, L.L.C. Dyed photoresists and methods and articles of manufacture comprising same
US6376149B2 (en) 1999-05-26 2002-04-23 Yale University Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
US6468712B1 (en) 2000-02-25 2002-10-22 Massachusetts Institute Of Technology Resist materials for 157-nm lithography
TW588220B (en) * 2000-04-04 2004-05-21 Daikin Ind Ltd Novel fluorine-containing polymer having group reactive with acid and chemically amplifying type photo resist composition prepared by using same
US20040192876A1 (en) * 2002-11-18 2004-09-30 Nigel Hacker Novolac polymer planarization films with high temparature stability
EP1649322A4 (de) * 2003-07-17 2007-09-19 Honeywell Int Inc Planarisierungsfilme für fortschrittliche mikroelektronsiche anwendungen und einrichtungen und herstellungsverfahren dafür
US20050202352A1 (en) * 2004-03-11 2005-09-15 Worcester Polytechnic Institute Systems and methods for sub-wavelength imaging
US7638877B2 (en) * 2006-06-30 2009-12-29 Intel Corporation Alternative to desmear for build-up roughening and copper adhesion promotion
KR20130067332A (ko) * 2011-11-16 2013-06-24 삼성디스플레이 주식회사 노광용 마스크 및 그 마스크를 사용한 기판 제조 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL16065C (de) * 1924-04-24
US4343885A (en) * 1978-05-09 1982-08-10 Dynachem Corporation Phototropic photosensitive compositions containing fluoran colorformer
JPS54153889A (en) * 1978-05-24 1979-12-04 Toyo Ink Mfg Co Ltd Photosetting coating composition
US4442197A (en) * 1982-01-11 1984-04-10 General Electric Company Photocurable compositions
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
DE3248246A1 (de) * 1982-12-28 1984-06-28 Basf Ag, 6700 Ludwigshafen Positiv arbeitendes verfahren zur herstellung von relief- und druckformen
JPS59147001A (ja) * 1983-02-07 1984-08-23 ゼネラル・エレクトリツク・カンパニイ 光硬化性組成物
GB2137626B (en) * 1983-03-31 1986-10-15 Sericol Group Ltd Water based photopolymerisable compositions and their use
GB2139369B (en) * 1983-05-06 1987-01-21 Sericol Group Ltd Photosensitive systems showing visible indication of exposure
MX170270B (es) * 1984-06-01 1993-08-11 Rohm & Haas Imagenes sobre una superficie y un metodo para formar imagenes positivas y negativas termicamente estables sobre una superficie
US4632891A (en) * 1984-10-04 1986-12-30 Ciba-Geigy Corporation Process for the production of images
CA1307695C (en) * 1986-01-13 1992-09-22 Wayne Edmund Feely Photosensitive compounds and thermally stable and aqueous developablenegative images
US5034304A (en) * 1986-01-13 1991-07-23 Rohm And Haas Company Photosensitive compounds and thermally stable and aqueous developable negative images
DE3710281A1 (de) * 1987-03-28 1988-10-06 Hoechst Ag Photopolymerisierbares gemisch und daraus hergestelltes aufzeichnungsmaterial

Also Published As

Publication number Publication date
NO902666L (no) 1990-12-21
ZA904704B (en) 1991-03-27
KR910001455A (ko) 1991-01-30
JPH0387748A (ja) 1991-04-12
NO902666D0 (no) 1990-06-15
IE902217L (en) 1990-12-20
AU5764390A (en) 1991-01-03
BR9002906A (pt) 1991-08-20
US5391465A (en) 1995-02-21
KR0155990B1 (ko) 1998-11-16
JP3026503B2 (ja) 2000-03-27
FI903096A7 (fi) 1990-12-21
CN1048931A (zh) 1991-01-30
IL94799A0 (en) 1991-04-15
FI903096A0 (fi) 1990-06-19
EP0404499A2 (de) 1990-12-27
CA2017338A1 (en) 1990-12-20
IE902217A1 (en) 1991-01-16
EP0404499A3 (de) 1992-03-18

Similar Documents

Publication Publication Date Title
CA1283799C (en) Thermally stable polymer images and processes
EP0232972B1 (de) Negativ arbeitende Photolack-Zusammensetzung und Verfahren zur Herstellung von thermisch stabilen negativen Bildern damit
US5650261A (en) Positive acting photoresist comprising a photoacid, a photobase and a film forming acid-hardening resin system
US5128232A (en) Photoresist composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units
US5391465A (en) Method of using selected photoactive compounds in high resolution, acid hardening photoresists with near ultraviolet radiation wherein the photoresist comprise conventional deep UV photoacid generators
EP0423446B1 (de) Fotoresist für nahes U.V.
US5034304A (en) Photosensitive compounds and thermally stable and aqueous developable negative images
AU627196B2 (en) Radiation-curable composition and radiation-sensitive recording material prepared therefrom for use with high-energy radiation
HK178995A (en) Positive-working photosensitive composition containing a dye and positive-working photosensitive recording material prepared from this composition
JPH0215270A (ja) フォトレジスト組成物
US5401608A (en) Negative-working radiation-sensitive mixture and radiation-sensitive recording material produced therewith
US5204225A (en) Process for producing negative images
US5210000A (en) Photoresist and method for forming a relief image utilizing composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units
US6106995A (en) Antireflective coating material for photoresists
CN1160597C (zh) 用于正性光刻胶的混合溶剂体系
JP2000502467A (ja) ポジ型フォトレジスト用の混合溶剤系
JPH0792679A (ja) レジスト組成物
CN1227637A (zh) 含2,4－二硝基－1－萘酚的正性光刻胶组合物
JPS60147731A (ja) 感光性樹脂組成物
KR100567641B1 (ko) 아미노방향족발색단의금속이온함량을감소시키는방법및이를금속함량이낮은포토레지스트용저부반사방지피복물의합성에사용하는방법
JPH0527421A (ja) ネガ型感光性組成物
JPH04136941A (ja) ネガ型感光性組成物

Legal Events

Date Code Title Description
KB Patent renewed
RH Patent void