JP1746404S - サセプタカバーベース - Google Patents

サセプタカバーベース

Info

Publication number
JP1746404S
JP1746404S JP2023000283F JP2023000283F JP1746404S JP 1746404 S JP1746404 S JP 1746404S JP 2023000283 F JP2023000283 F JP 2023000283F JP 2023000283 F JP2023000283 F JP 2023000283F JP 1746404 S JP1746404 S JP 1746404S
Authority
JP
Japan
Prior art keywords
cover base
susceptor cover
base
susceptor
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023000283F
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2023000283F priority Critical patent/JP1746404S/ja
Application granted granted Critical
Publication of JP1746404S publication Critical patent/JP1746404S/ja
Priority to US29/896,279 priority patent/USD1082730S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットを構成するカバーベース部品であり、基台となるサセプタ部品の外周に載置され、ウェハが載る土台となる部品である。
JP2023000283F 2023-01-11 2023-01-11 サセプタカバーベース Active JP1746404S (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023000283F JP1746404S (ja) 2023-01-11 2023-01-11 サセプタカバーベース
US29/896,279 USD1082730S1 (en) 2023-01-11 2023-06-30 Cover base for susceptors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023000283F JP1746404S (ja) 2023-01-11 2023-01-11 サセプタカバーベース

Publications (1)

Publication Number Publication Date
JP1746404S true JP1746404S (ja) 2023-06-15

Family

ID=86720896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023000283F Active JP1746404S (ja) 2023-01-11 2023-01-11 サセプタカバーベース

Country Status (2)

Country Link
US (1) USD1082730S1 (ja)
JP (1) JP1746404S (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1047884S1 (en) * 2021-10-22 2024-10-22 Nuflare Technology, Inc. Susceptor cover

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5645646A (en) * 1994-02-25 1997-07-08 Applied Materials, Inc. Susceptor for deposition apparatus
US6214122B1 (en) * 1997-03-17 2001-04-10 Motorola, Inc. Rapid thermal processing susceptor
JP2001525997A (ja) * 1997-05-20 2001-12-11 東京エレクトロン株式会社 処理装置
US6155421A (en) * 1998-10-23 2000-12-05 Lincoln Global, Inc. Wire electrode liner
KR100384060B1 (ko) * 2000-12-04 2003-05-14 삼성전자주식회사 반도체장치 애싱설비의 척 플레이트 및 이를 이용한 척조립체
US20050217585A1 (en) * 2004-04-01 2005-10-06 Blomiley Eric R Substrate susceptor for receiving a substrate to be deposited upon
JP4841873B2 (ja) * 2005-06-23 2011-12-21 大日本スクリーン製造株式会社 熱処理用サセプタおよび熱処理装置
USD709536S1 (en) * 2011-09-30 2014-07-22 Tokyo Electron Limited Focusing ring
US20130263779A1 (en) * 2012-04-10 2013-10-10 Memc Electronic Materials, Inc. Susceptor For Improved Epitaxial Wafer Flatness
SG11201608905XA (en) * 2014-05-21 2016-12-29 Applied Materials Inc Thermal processing susceptor
US10000847B2 (en) * 2014-09-24 2018-06-19 Applied Materials, Inc. Graphite susceptor
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
JP1598442S (ja) * 2017-08-09 2018-02-26
JP1598997S (ja) * 2017-08-31 2018-03-05
DE102017222279A1 (de) * 2017-12-08 2019-06-13 Siltronic Ag Verfahren zum Abscheiden einer epitaktischen Schicht auf einer Vorderseite einer Halbleiterscheibe und Vorrichtung zur Durchführung des Verfahrens
USD866491S1 (en) * 2018-03-26 2019-11-12 Veeco Instruments Inc. Chemical vapor deposition wafer carrier with thermal cover
DE102019132933A1 (de) * 2018-12-10 2020-06-10 Showa Denko K.K. Suszeptor und vorrichtung zur chemischen gasphasenabscheidung
US11961756B2 (en) * 2019-01-17 2024-04-16 Asm Ip Holding B.V. Vented susceptor
CN112514077B (zh) * 2019-06-19 2024-08-16 住友电气工业株式会社 碳化硅外延衬底
USD1038049S1 (en) * 2020-11-18 2024-08-06 Applied Materials, Inc. Cover ring for use in semiconductor processing chamber
JP1704964S (ja) * 2021-04-19 2022-01-14 プラズマ処理装置用サセプタリング
JP1711120S (ja) 2021-10-22 2022-03-29 サセプタカバー
JP1711119S (ja) * 2021-10-22 2022-03-29 サセプタリング
USD1055006S1 (en) * 2022-03-18 2024-12-24 Applied Materials, Inc. Support ring for an interlocking process kit for a substrate processing chamber
USD1049067S1 (en) * 2022-04-04 2024-10-29 Applied Materials, Inc. Ring for an anti-rotation process kit for a substrate processing chamber
USD1053230S1 (en) * 2022-05-19 2024-12-03 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD1059312S1 (en) * 2022-08-04 2025-01-28 Applied Materials, Inc. Deposition ring of a process kit for semiconductor substrate processing
JP1733769S (ja) * 2022-08-10 2023-01-06
JP1745873S (ja) * 2022-10-20 2023-06-08 サセプタ
JP1741174S (ja) * 2022-10-20 2023-04-06 サセプタ
JP1741173S (ja) * 2022-10-20 2023-04-06 半導体ウェハ及びサセプタ加熱用ヒータ
JP1741175S (ja) * 2022-10-20 2023-04-06 サセプタ
JP1741176S (ja) 2022-10-20 2023-04-06 サセプタ用カバーベース
JP1746406S (ja) * 2023-01-11 2023-06-15 サセプタユニット
JP1746403S (ja) * 2023-01-11 2023-06-15 サセプタ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1047884S1 (en) * 2021-10-22 2024-10-22 Nuflare Technology, Inc. Susceptor cover

Also Published As

Publication number Publication date
USD1082730S1 (en) 2025-07-08

Similar Documents

Publication Publication Date Title
JP1741176S (ja) サセプタ用カバーベース
JP1741172S (ja) サセプタカバー
JP1741174S (ja) サセプタ
JP1711119S (ja) サセプタリング
JP1746405S (ja) サセプタカバー
JP1711120S (ja) サセプタカバー
JP1745873S (ja) サセプタ
JP1746403S (ja) サセプタ
JP1745924S (ja) サセプタ
JP1746407S (ja) サセプタ
JP1746408S (ja) サセプタ
JP1741175S (ja) サセプタ
JP1746406S (ja) サセプタユニット
JP1766095S (ja) サセプタ
JP1639752S (ja) 基板保持リング
JP1745874S (ja) サセプタカバー
JP1746404S (ja) サセプタカバーベース
JP1717341S (ja) 基板保持リング
JP1745925S (ja) サセプタカバー
JP1746409S (ja) サセプタカバー
JP1773329S (ja) サセプタ
JP1773328S (ja) サセプタ
JP1773327S (ja) サセプタ
JP1643626S (ja) 基板保持リング
JP1743081S (ja) 研磨パッド