JP1766095S - サセプタ - Google Patents

サセプタ

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Publication number
JP1766095S
JP1766095S JP2023024989F JP2023024989F JP1766095S JP 1766095 S JP1766095 S JP 1766095S JP 2023024989 F JP2023024989 F JP 2023024989F JP 2023024989 F JP2023024989 F JP 2023024989F JP 1766095 S JP1766095 S JP 1766095S
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JP
Japan
Prior art keywords
susceptor
wafer
constitutes
article
becomes
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Application number
JP2023024989F
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English (en)
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Priority to JP2023024989F priority Critical patent/JP1766095S/ja
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Publication of JP1766095S publication Critical patent/JP1766095S/ja
Priority to US29/942,796 priority patent/USD1113774S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットを構成する部品であり、サセプタリングの内周上部とサセプタユニット中央部のサセプタ部品の間に載置され、ウェハが載る土台となる部品である。
JP2023024989F 2023-12-01 2023-12-01 サセプタ Active JP1766095S (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023024989F JP1766095S (ja) 2023-12-01 2023-12-01 サセプタ
US29/942,796 USD1113774S1 (en) 2023-12-01 2024-05-17 Susceptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023024989F JP1766095S (ja) 2023-12-01 2023-12-01 サセプタ

Publications (1)

Publication Number Publication Date
JP1766095S true JP1766095S (ja) 2024-03-19

Family

ID=90273593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023024989F Active JP1766095S (ja) 2023-12-01 2023-12-01 サセプタ

Country Status (2)

Country Link
US (1) USD1113774S1 (ja)
JP (1) JP1766095S (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1110977S1 (en) 2024-02-13 2026-02-03 Nuflare Technology, Inc. Susceptor
USD1112119S1 (en) 2024-02-13 2026-02-10 Nuflare Technology, Inc. Susceptor
USD1114752S1 (en) 2024-02-13 2026-02-24 Nuflare Technology, Inc. Susceptor

Family Cites Families (28)

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WO2012142408A2 (en) * 2011-04-14 2012-10-18 Veeco Instruments Inc. Substrate holders and methods of substrate mounting
CN103987234B (zh) * 2013-02-08 2017-08-29 台达电子工业股份有限公司 散热装置
US10269614B2 (en) * 2014-11-12 2019-04-23 Applied Materials, Inc. Susceptor design to reduce edge thermal peak
JP1546800S (ja) * 2015-06-12 2016-03-28
USD810705S1 (en) * 2016-04-01 2018-02-20 Veeco Instruments Inc. Self-centering wafer carrier for chemical vapor deposition
USD797691S1 (en) * 2016-04-14 2017-09-19 Applied Materials, Inc. Composite edge ring
JP1584906S (ja) * 2017-01-31 2017-08-28
USD933725S1 (en) * 2019-02-08 2021-10-19 Applied Materials, Inc. Deposition ring for a substrate processing chamber
JP2022022684A (ja) * 2020-07-01 2022-02-07 株式会社小糸製作所 光照射装置及び情報伝達システム
JP7403398B2 (ja) * 2020-07-01 2023-12-22 日立Ｇｅニュークリア・エナジー株式会社 配管加工装置
JP7618902B2 (ja) * 2020-07-01 2025-01-22 デュプロ精工株式会社 加工装置
USD1038049S1 (en) * 2020-11-18 2024-08-06 Applied Materials, Inc. Cover ring for use in semiconductor processing chamber
US12100579B2 (en) * 2020-11-18 2024-09-24 Applied Materials, Inc. Deposition ring for thin substrate handling via edge clamping
TWI745240B (zh) * 2021-02-22 2021-11-01 天虹科技股份有限公司 晶圓承載固定裝置及應用該晶圓承載固定裝置的薄膜沉積設備
JP1704964S (ja) * 2021-04-19 2022-01-14 プラズマ処理装置用サセプタリング
JP7488796B2 (ja) * 2021-06-10 2024-05-22 日本碍子株式会社 フォーカスリング載置台
JP2023000286A (ja) * 2021-06-17 2023-01-04 キヤノン株式会社 露光装置、および物品の製造方法
JP1711119S (ja) * 2021-10-22 2022-03-29 サセプタリング
JP1711120S (ja) 2021-10-22 2022-03-29 サセプタカバー
USD1049067S1 (en) * 2022-04-04 2024-10-29 Applied Materials, Inc. Ring for an anti-rotation process kit for a substrate processing chamber
KR102711275B1 (ko) * 2022-08-08 2024-09-30 주식회사 디앤씨바이오테크놀로지 소변 검사용 키트를 이용하여 소변을 분석하는 장치
JP1741176S (ja) 2022-10-20 2023-04-06 サセプタ用カバーベース
JP1741173S (ja) * 2022-10-20 2023-04-06 半導体ウェハ及びサセプタ加熱用ヒータ
JP1741172S (ja) 2022-10-20 2023-04-06 サセプタカバー
JP1746408S (ja) * 2023-01-11 2023-06-15 サセプタ
JP1746405S (ja) * 2023-01-11 2023-06-15 サセプタカバー
JP1746403S (ja) * 2023-01-11 2023-06-15 サセプタ
US20240247404A1 (en) * 2023-01-25 2024-07-25 Applied Materials, Inc. Pre-heat rings and processing chambers including black quartz, and related methods

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1110977S1 (en) 2024-02-13 2026-02-03 Nuflare Technology, Inc. Susceptor
USD1112119S1 (en) 2024-02-13 2026-02-10 Nuflare Technology, Inc. Susceptor
USD1114752S1 (en) 2024-02-13 2026-02-24 Nuflare Technology, Inc. Susceptor

Also Published As

Publication number Publication date
USD1113774S1 (en) 2026-02-17

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