JP2000505950A - 多重メタライゼーション層を有する電気的に消去及び書込可能な読出専用メモリ（ｅｅｐｒｏｍ） - Google Patents

多重メタライゼーション層を有する電気的に消去及び書込可能な読出専用メモリ（ｅｅｐｒｏｍ）

Info

Publication number
JP2000505950A
JP2000505950A JP10524452A JP52445298A JP2000505950A JP 2000505950 A JP2000505950 A JP 2000505950A JP 10524452 A JP10524452 A JP 10524452A JP 52445298 A JP52445298 A JP 52445298A JP 2000505950 A JP2000505950 A JP 2000505950A
Authority
JP
Japan
Prior art keywords
eeprom
memory cells
memory
layer
metallization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP10524452A
Other languages
English (en)
Japanese (ja)
Inventor
サティエンドラナス ムケリエー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of JP2000505950A publication Critical patent/JP2000505950A/ja
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels
    • H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
    • H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels

Landscapes

  • Non-Volatile Memory (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
JP10524452A 1996-11-26 1997-09-03 多重メタライゼーション層を有する電気的に消去及び書込可能な読出専用メモリ（ｅｅｐｒｏｍ） Abandoned JP2000505950A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/753,554 1996-11-26
US08/753,554 US5751038A (en) 1996-11-26 1996-11-26 Electrically erasable and programmable read only memory (EEPROM) having multiple overlapping metallization layers
PCT/IB1997/001050 WO1998024127A1 (fr) 1996-11-26 1997-09-03 Memoire morte programmable et effaçable electriquement (eeprom) comportant de multiples couches de metallisation se chevauchant

Publications (1)

Publication Number Publication Date
JP2000505950A true JP2000505950A (ja) 2000-05-16

Family

ID=25031141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10524452A Abandoned JP2000505950A (ja) 1996-11-26 1997-09-03 多重メタライゼーション層を有する電気的に消去及び書込可能な読出専用メモリ（ｅｅｐｒｏｍ）

Country Status (5)

Country Link
US (1) US5751038A (fr)
EP (1) EP0879478A1 (fr)
JP (1) JP2000505950A (fr)
TW (1) TW441040B (fr)
WO (1) WO1998024127A1 (fr)

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FR2772967B1 (fr) * 1997-12-18 2004-01-02 Sgs Thomson Microelectronics Cellule de memoire eeprom protegee
US6002151A (en) * 1997-12-18 1999-12-14 Advanced Micro Devices, Inc. Non-volatile trench semiconductor device
US6011288A (en) * 1997-12-22 2000-01-04 Taiwan Semiconductor Manufacturing Company, Ltd. Flash memory cell with vertical channels, and source/drain bus lines
KR100316060B1 (ko) * 1998-06-16 2002-02-19 박종섭 플래시메모리의레이아웃및그형성방법
US6465836B2 (en) * 2001-03-29 2002-10-15 Taiwan Semiconductor Manufacturing Co., Ltd Vertical split gate field effect transistor (FET) device
US6762092B2 (en) * 2001-08-08 2004-07-13 Sandisk Corporation Scalable self-aligned dual floating gate memory cell array and methods of forming the array
US7132711B2 (en) * 2001-08-30 2006-11-07 Micron Technology, Inc. Programmable array logic or memory with p-channel devices and asymmetrical tunnel barriers
US7068544B2 (en) 2001-08-30 2006-06-27 Micron Technology, Inc. Flash memory with low tunnel barrier interpoly insulators
US7087954B2 (en) * 2001-08-30 2006-08-08 Micron Technology, Inc. In service programmable logic arrays with low tunnel barrier interpoly insulators
US7476925B2 (en) * 2001-08-30 2009-01-13 Micron Technology, Inc. Atomic layer deposition of metal oxide and/or low asymmetrical tunnel barrier interploy insulators
US6963103B2 (en) * 2001-08-30 2005-11-08 Micron Technology, Inc. SRAM cells with repressed floating gate memory, low tunnel barrier interpoly insulators
US6778441B2 (en) * 2001-08-30 2004-08-17 Micron Technology, Inc. Integrated circuit memory device and method
KR20030025315A (ko) * 2001-09-20 2003-03-29 주식회사 하이닉스반도체 플래쉬 메모리 소자 및 그 제조방법
US6894930B2 (en) 2002-06-19 2005-05-17 Sandisk Corporation Deep wordline trench to shield cross coupling between adjacent cells for scaled NAND
KR101110191B1 (ko) * 2002-06-19 2012-02-15 쌘디스크 코포레이션 스케일 낸드용 인접셀들 사이의 크로스 커플링을 실드하기위한 딥 워드라인 트렌치
CN1729558A (zh) * 2002-12-19 2006-02-01 皇家飞利浦电子股份有限公司 垂直分离栅非易失性存储单元及其制造方法
US8330202B2 (en) * 2005-02-23 2012-12-11 Micron Technology, Inc. Germanium-silicon-carbide floating gates in memories
US7572695B2 (en) 2005-05-27 2009-08-11 Micron Technology, Inc. Hafnium titanium oxide films
US7745285B2 (en) 2007-03-30 2010-06-29 Sandisk Corporation Methods of forming and operating NAND memory with side-tunneling
US9461182B2 (en) * 2007-05-07 2016-10-04 Infineon Technologies Ag Memory cell
WO2009014963A1 (fr) * 2007-07-20 2009-01-29 Bp Corporation North America Inc. Procédés et appareils destinés à fabriquer du silicium coulé à partir de germes cristallins

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61127161A (ja) * 1984-11-26 1986-06-14 Fujitsu Ltd 半導体記憶装置
JPH07120717B2 (ja) * 1986-05-19 1995-12-20 日本電気株式会社 半導体記憶装置の製造方法
JP2877462B2 (ja) * 1990-07-23 1999-03-31 株式会社東芝 不揮発性半導体記憶装置
IT1243303B (it) * 1990-07-24 1994-05-26 Sgs Thomson Microelectronics Schieramento di celle di memoria con linee metalliche di connessione di source e di drain formate sul substrato ed ortogonalmente sovrastate da linee di connessione di gate e procedimento per la sua fabbricazione
JP2635810B2 (ja) * 1990-09-28 1997-07-30 株式会社東芝 半導体記憶装置
US5146426A (en) * 1990-11-08 1992-09-08 North American Philips Corp. Electrically erasable and programmable read only memory with trench structure
IT1247654B (it) * 1990-11-16 1994-12-28 Sgs Thomson Microelectronics Memoria flash eprom cancellabile per gruppi di celle mediante doppia mmetal
JPH0567791A (ja) * 1991-06-20 1993-03-19 Mitsubishi Electric Corp 電気的に書込および消去可能な半導体記憶装置およびその製造方法
JP2889061B2 (ja) * 1992-09-25 1999-05-10 ローム株式会社 半導体記憶装置およびその製法
US5661053A (en) * 1994-05-25 1997-08-26 Sandisk Corporation Method of making dense flash EEPROM cell array and peripheral supporting circuits formed in deposited field oxide with the use of spacers

Also Published As

Publication number Publication date
WO1998024127A1 (fr) 1998-06-04
EP0879478A1 (fr) 1998-11-25
TW441040B (en) 2001-06-16
US5751038A (en) 1998-05-12

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