JP2518355Y2 - 浸漬型基板処理装置 - Google Patents

浸漬型基板処理装置

Info

Publication number
JP2518355Y2
JP2518355Y2 JP1990406313U JP40631390U JP2518355Y2 JP 2518355 Y2 JP2518355 Y2 JP 2518355Y2 JP 1990406313 U JP1990406313 U JP 1990406313U JP 40631390 U JP40631390 U JP 40631390U JP 2518355 Y2 JP2518355 Y2 JP 2518355Y2
Authority
JP
Japan
Prior art keywords
substrate
surface treatment
substrate processing
inert gas
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990406313U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0492635U (2
Inventor
敏朗 廣江
賢司 杉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP1990406313U priority Critical patent/JP2518355Y2/ja
Publication of JPH0492635U publication Critical patent/JPH0492635U/ja
Application granted granted Critical
Publication of JP2518355Y2 publication Critical patent/JP2518355Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1990406313U 1990-12-28 1990-12-28 浸漬型基板処理装置 Expired - Fee Related JP2518355Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990406313U JP2518355Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990406313U JP2518355Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理装置

Publications (2)

Publication Number Publication Date
JPH0492635U JPH0492635U (2) 1992-08-12
JP2518355Y2 true JP2518355Y2 (ja) 1996-11-27

Family

ID=31883590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990406313U Expired - Fee Related JP2518355Y2 (ja) 1990-12-28 1990-12-28 浸漬型基板処理装置

Country Status (1)

Country Link
JP (1) JP2518355Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5220641B2 (ja) * 2009-02-03 2013-06-26 東京エレクトロン株式会社 処理装置、処理方法、コンピュータプログラムおよび記憶媒体

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59156457A (ja) * 1983-02-25 1984-09-05 Taikisha Ltd 塗装ブ−ス
JPH0210728A (ja) * 1988-06-29 1990-01-16 Oki Electric Ind Co Ltd 半導体ウエハのウエット処理装置
JPH07111963B2 (ja) * 1988-09-12 1995-11-29 株式会社スガイ 基板の洗浄乾燥装置

Also Published As

Publication number Publication date
JPH0492635U (2) 1992-08-12

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