JP6814789B2 - バイアス電圧及び放出電流の制御及び測定を伴う電離圧力計 - Google Patents

バイアス電圧及び放出電流の制御及び測定を伴う電離圧力計 Download PDF

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Publication number
JP6814789B2
JP6814789B2 JP2018500386A JP2018500386A JP6814789B2 JP 6814789 B2 JP6814789 B2 JP 6814789B2 JP 2018500386 A JP2018500386 A JP 2018500386A JP 2018500386 A JP2018500386 A JP 2018500386A JP 6814789 B2 JP6814789 B2 JP 6814789B2
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Prior art keywords
cathode
electron emission
emission current
bias voltage
current
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Japanese (ja)
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JP2018519528A (ja
JP2018519528A5 (2
Inventor
ハンセン・ダグラス・シー
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MKS Instruments Inc
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MKS Instruments Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
JP2018500386A 2015-07-09 2016-05-12 バイアス電圧及び放出電流の制御及び測定を伴う電離圧力計 Expired - Fee Related JP6814789B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/795,729 2015-07-09
US14/795,729 US9927317B2 (en) 2015-07-09 2015-07-09 Ionization pressure gauge with bias voltage and emission current control and measurement
PCT/US2016/032070 WO2017007531A1 (en) 2015-07-09 2016-05-12 Ionization pressure gauge with bias voltage and emission current control and measurement

Publications (3)

Publication Number Publication Date
JP2018519528A JP2018519528A (ja) 2018-07-19
JP2018519528A5 JP2018519528A5 (2) 2019-06-27
JP6814789B2 true JP6814789B2 (ja) 2021-01-20

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ID=56084395

Family Applications (1)

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JP2018500386A Expired - Fee Related JP6814789B2 (ja) 2015-07-09 2016-05-12 バイアス電圧及び放出電流の制御及び測定を伴う電離圧力計

Country Status (7)

Country Link
US (1) US9927317B2 (2)
EP (1) EP3298374B1 (2)
JP (1) JP6814789B2 (2)
KR (1) KR102228612B1 (2)
CN (1) CN107850506B (2)
DK (1) DK3298374T3 (2)
WO (1) WO2017007531A1 (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
SG11201809453SA (en) * 2016-05-02 2018-11-29 Mks Instr Inc Cold cathode ionization vacuum gauge with multiple cathodes
WO2019244826A1 (ja) * 2018-06-18 2019-12-26 株式会社アルバック 電離真空計及び制御装置
CN108918026B (zh) * 2018-09-11 2020-12-25 北京东方计量测试研究所 一种热阴极电离真空计电参数校准装置及方法
CN116362179B (zh) * 2023-03-24 2023-11-17 深圳京鸿源科技有限公司 一种基于动态调节mosfet电路功耗的控制方法

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JPS60157151A (ja) * 1984-01-25 1985-08-17 Hitachi Ltd 真空排気制御装置
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JP2672950B2 (ja) * 1987-10-20 1997-11-05 株式会社芝浦製作所 エミッションコントロール装置
DE3930699C2 (de) * 1989-09-14 1994-02-03 Perzl Peter Vorrichtung zur Energieeinkopplung in eine durchströmte elektrische Gasentladung
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US6025723A (en) * 1997-08-27 2000-02-15 Granville-Phillips Company Miniature ionization gauge utilizing multiple ion collectors
JP3324522B2 (ja) 1998-09-16 2002-09-17 日本電気株式会社 可変利得増幅回路及び利得制御方法
JP4339948B2 (ja) 1999-02-25 2009-10-07 キヤノンアネルバ株式会社 熱陰極電離真空計
JP4493139B2 (ja) 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
JP4092246B2 (ja) 2002-05-27 2008-05-28 インフィネオン テクノロジーズ アクチエンゲゼルシャフト パワースイッチデバイス
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JP5136892B2 (ja) * 2008-03-03 2013-02-06 株式会社ネットコムセック 電圧制御装置、電源装置、電子管及び高周波回路システム
JP5223497B2 (ja) 2008-06-27 2013-06-26 富士通セミコンダクター株式会社 ピークホールド回路
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JP4636461B2 (ja) 2009-01-13 2011-02-23 セイコーインスツル株式会社 電源電圧監視回路、および該電源電圧監視回路を備える電子回路
JP5054226B2 (ja) 2009-03-18 2012-10-24 株式会社アルバック 酸素の検出方法，空気リークの判別方法，ガス成分検出装置，及び真空処理装置
JP5716346B2 (ja) 2010-10-13 2015-05-13 株式会社リコー 信号バッファ回路とセンサ制御基板と画像読取装置および画像形成装置
JP2014164577A (ja) 2013-02-26 2014-09-08 Sumitomo Electric Ind Ltd 駆動回路
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement

Also Published As

Publication number Publication date
JP2018519528A (ja) 2018-07-19
EP3298374A1 (en) 2018-03-28
US20170010172A1 (en) 2017-01-12
WO2017007531A1 (en) 2017-01-12
KR20180027542A (ko) 2018-03-14
DK3298374T3 (da) 2019-11-11
EP3298374B1 (en) 2019-09-25
CN107850506B (zh) 2020-09-11
CN107850506A (zh) 2018-03-27
KR102228612B1 (ko) 2021-03-16
US9927317B2 (en) 2018-03-27

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