JPH01100431U - - Google Patents

Info

Publication number
JPH01100431U
JPH01100431U JP19507587U JP19507587U JPH01100431U JP H01100431 U JPH01100431 U JP H01100431U JP 19507587 U JP19507587 U JP 19507587U JP 19507587 U JP19507587 U JP 19507587U JP H01100431 U JPH01100431 U JP H01100431U
Authority
JP
Japan
Prior art keywords
reactor
vapor phase
phase growth
growth apparatus
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19507587U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19507587U priority Critical patent/JPH01100431U/ja
Publication of JPH01100431U publication Critical patent/JPH01100431U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る気相成長装置の第１実施
例の縦断面図、第２図は第１図のＡ―Ａ線断面図
、第３図は第２図のＢ―Ｂ線断面図、第４図は第
１図のＣ―Ｃ線断面図、第５図は基板上の膜の層
の深さとドーパント濃度との関係を示す特性図、
第６図は本考案に係る気相成長装置の第２実施例
の縦断面図、第７図は第６図のＡ―Ａ線断面図、
第８図は第６図のＢ―Ｂ線断面図、第９図及び第
１０図は従来の気相成長装置の２種の例を示す縦
断面図である。 １……反応炉、２……ガス導入孔、３……サセ
プタ、４……基板、５……サセプタ駆動軸、１４
……スペーサ、１５……整流用リブ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応炉にガス導入孔からキヤリアガスと共に原
    料ガスを供給し、前記反応炉内に設置されたサセ
    プタ上の基板に薄膜を成長させる気相成長装置に
    おいて、前記反応炉内の上流部に整流用リブが前
    記原料ガスの流れの方向に沿つて設けられている
    ことを特徴とする気相成長装置。
JP19507587U 1987-12-23 1987-12-23 Pending JPH01100431U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19507587U JPH01100431U (ja) 1987-12-23 1987-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19507587U JPH01100431U (ja) 1987-12-23 1987-12-23

Publications (1)

Publication Number Publication Date
JPH01100431U true JPH01100431U (ja) 1989-07-05

Family

ID=31485770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19507587U Pending JPH01100431U (ja) 1987-12-23 1987-12-23

Country Status (1)

Country Link
JP (1) JPH01100431U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357931U (ja) * 1989-10-11 1991-06-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357931U (ja) * 1989-10-11 1991-06-05

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