JPH01129837U - - Google Patents
Info
- Publication number
- JPH01129837U JPH01129837U JP2560388U JP2560388U JPH01129837U JP H01129837 U JPH01129837 U JP H01129837U JP 2560388 U JP2560388 U JP 2560388U JP 2560388 U JP2560388 U JP 2560388U JP H01129837 U JPH01129837 U JP H01129837U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- houses
- carriers
- carrier
- box body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図及び第２図はそれぞれ本考案の実施例を
示す側断面図である。 １，４……箱体、１ａ，４ａ……底部内面、２
……半導体ウエハ、３……キヤリア。
示す側断面図である。 １，４……箱体、１ａ，４ａ……底部内面、２
……半導体ウエハ、３……キヤリア。
Claims (1)
- 半導体ウエハを略等間隔に立てて収容するウエ
ハキヤリアを収納する箱体の底部内面をキヤリア
内の半導体ウエハを配列方向に傾斜させたことを
特徴とするキヤリア収納箱。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560388U JPH01129837U (ja) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560388U JPH01129837U (ja) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129837U true JPH01129837U (ja) | 1989-09-04 |
Family
ID=31246481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2560388U Pending JPH01129837U (ja) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129837U (ja) |
-
1988
- 1988-02-26 JP JP2560388U patent/JPH01129837U/ja active Pending