JPH01137526U - - Google Patents
Info
- Publication number
- JPH01137526U JPH01137526U JP3264088U JP3264088U JPH01137526U JP H01137526 U JPH01137526 U JP H01137526U JP 3264088 U JP3264088 U JP 3264088U JP 3264088 U JP3264088 U JP 3264088U JP H01137526 U JPH01137526 U JP H01137526U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- furnace
- semiconductor substrates
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3264088U JPH01137526U (2) | 1988-03-14 | 1988-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3264088U JPH01137526U (2) | 1988-03-14 | 1988-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137526U true JPH01137526U (2) | 1989-09-20 |
Family
ID=31259189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3264088U Pending JPH01137526U (2) | 1988-03-14 | 1988-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137526U (2) |
-
1988
- 1988-03-14 JP JP3264088U patent/JPH01137526U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01137526U (2) | ||
| JPS60149132U (ja) | 半導体熱処理炉 | |
| JPS6066028U (ja) | 炉芯管 | |
| JPS6361125U (2) | ||
| JPS61153337U (2) | ||
| JPS59169040U (ja) | 半導体製造用の拡散炉 | |
| JPS6416631U (2) | ||
| JPS5981029U (ja) | 炉芯管 | |
| JPH01161326U (2) | ||
| JPH0171439U (2) | ||
| JPS62120340U (2) | ||
| JPS6120038U (ja) | 酸化・拡散炉用炉心管 | |
| JPH0418433U (2) | ||
| JPH0217832U (2) | ||
| JPS6085837U (ja) | 炉芯管用断熱キヤツプ | |
| JPH0430727U (2) | ||
| JPH0438035U (2) | ||
| JPS6393632U (2) | ||
| JPS6361122U (2) | ||
| JPS6439634U (2) | ||
| JPS6422026U (2) | ||
| JPS62112139U (2) | ||
| JPH0235436U (2) | ||
| JPH02146425U (2) | ||
| JPS62116541U (2) |