JPH01146240U - - Google Patents

Info

Publication number
JPH01146240U
JPH01146240U JP4203088U JP4203088U JPH01146240U JP H01146240 U JPH01146240 U JP H01146240U JP 4203088 U JP4203088 U JP 4203088U JP 4203088 U JP4203088 U JP 4203088U JP H01146240 U JPH01146240 U JP H01146240U
Authority
JP
Japan
Prior art keywords
substrate
fixing
edge
lower edge
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4203088U
Other languages
English (en)
Other versions
JPH079152Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988042030U priority Critical patent/JPH079152Y2/ja
Publication of JPH01146240U publication Critical patent/JPH01146240U/ja
Application granted granted Critical
Publication of JPH079152Y2 publication Critical patent/JPH079152Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本実施例の側面図、第２図は本実施例
の正面図、第３図は従来例の現像装置の説明図、
第４図は基板傾斜装置によつて傾けられた基板の
状態を示す側面図である。 １……現像装置、２……基板、３……搬送ロー
ラ、４……現像液、５……支持板、６……現像処
理槽、７……バツフア槽、８……水洗槽、９……
現像装置、１０……保持部材、１１……リンク、
１２……係止片、１３……シリンダ、１４……セ
ンサ、１５……固定片、１６……パイプ、１７…
…端面液切装置、１８……エアナイフ、１９……
ノズル、２０……ブラケツト、２１……ガイドア
ーム、２２……ガイドシヤフト、２３……突出片
。

Claims (1)

  1. 【実用新案登録請求の範囲】 表面に感光部を形成する基板を搬送させ、この
    基板に現像液の散布、定着及び水洗処理を行う現
    像装置において、 ａ 現像液が散布された基板を一定間隔で同一方
    向に搬送する搬送手段。 ｂ 基板の一縁部を固定する固定片と、対向する
    他縁部を昇降させる上下動部材を備えた、搬送手
    段の下方に設けられる基板傾斜手段。 ｃ 基板傾斜手段によつて傾いた基板の下縁部に
    近接するノズルを備え、このノズルから基板下縁
    部に気体を噴射する気体吹付装置。 以上、ａ〜ｃを備えたことを特徴とする端面液
    切装置。
JP1988042030U 1988-03-31 1988-03-31 基板処理装置 Expired - Lifetime JPH079152Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988042030U JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988042030U JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Publications (2)

Publication Number Publication Date
JPH01146240U true JPH01146240U (ja) 1989-10-09
JPH079152Y2 JPH079152Y2 (ja) 1995-03-06

Family

ID=31268457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988042030U Expired - Lifetime JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Country Status (1)

Country Link
JP (1) JPH079152Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366301U (ja) * 1976-11-05 1978-06-03
JPS6324552U (ja) * 1986-08-01 1988-02-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366301U (ja) * 1976-11-05 1978-06-03
JPS6324552U (ja) * 1986-08-01 1988-02-18

Also Published As

Publication number Publication date
JPH079152Y2 (ja) 1995-03-06

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