JPH01147272U - - Google Patents

Info

Publication number
JPH01147272U
JPH01147272U JP1988042831U JP4283188U JPH01147272U JP H01147272 U JPH01147272 U JP H01147272U JP 1988042831 U JP1988042831 U JP 1988042831U JP 4283188 U JP4283188 U JP 4283188U JP H01147272 U JPH01147272 U JP H01147272U
Authority
JP
Japan
Prior art keywords
evaporation source
shutter
growth chamber
opening
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988042831U
Other languages
English (en)
Other versions
JPH057252Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988042831U priority Critical patent/JPH057252Y2/ja
Publication of JPH01147272U publication Critical patent/JPH01147272U/ja
Application granted granted Critical
Publication of JPH057252Y2 publication Critical patent/JPH057252Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本願考案の一実施例を示す断面図、第
２図は本願考案の要部を示す模式図であり、第１
図の―線断面に相当する図、第３図は従来例
の概略構成図である。 ２…成長室、３…基板ホルダ、５…蒸発源、７
…シヤツタ、７ａ…（シヤツタの）軸、７ｂ…シ
ヤツタ板、ａ，ｂ，ｃ…（蒸発源の）軸線、ｄ…
（シヤツタ軸の）軸線。

Claims (1)

  1. 【実用新案登録請求の範囲】 超高真空ポンプにつながる成長室と、この成長
    室の内部に配置した基板ホルダと、成長室の一側
    において軸線が上記基板ホルダを向くように配置
    された複数個の蒸発源と、蒸発源の開口を遮蔽し
    かつ開放するシヤツタとを備える分子線エピタキ
    シー装置において、 上記シヤツタは、上記蒸発源の開口の近傍の成
    長室内壁に回転可能に支持される軸と、この軸の
    先端に閉状態において蒸発源の開口を覆うように
    取付けられたシヤツタ板とを備えており、各隣接
    する蒸発源のシヤツタの軸の軸線をそれぞれ各蒸
    発源の隣接方向の同方向に傾斜させることにより
    各シヤツタ板の回転軌跡が干渉しないようにした
    ことを特徴とする、分子線エピタキシー装置。
JP1988042831U 1988-03-30 1988-03-30 Expired - Lifetime JPH057252Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988042831U JPH057252Y2 (ja) 1988-03-30 1988-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988042831U JPH057252Y2 (ja) 1988-03-30 1988-03-30

Publications (2)

Publication Number Publication Date
JPH01147272U true JPH01147272U (ja) 1989-10-11
JPH057252Y2 JPH057252Y2 (ja) 1993-02-24

Family

ID=31269235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988042831U Expired - Lifetime JPH057252Y2 (ja) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH057252Y2 (ja)

Also Published As

Publication number Publication date
JPH057252Y2 (ja) 1993-02-24

Similar Documents

Publication Publication Date Title
CA2094252A1 (en) Rotating magnetron incorporating a removable cathode
EP1179611A3 (de) Kammer für den Transport von Werkstücken
TW345684B (en) Sputtering apparatus
USD263426S (en) Light transmitting panel
USD258849S (en) Container for tape cassettes
USD268344S (en) Edge casting for soil stabilizer tine
USD261435S (en) Acoustical ceiling panel
JPH01147271U (ja)
USD264348S (en) Control panel for a combined cash register and calculator
JPH01147273U (ja)
USD328737S (en) Front panel for a digital tape drive
JPS60131966A (ja) スパツタ装置
USD249084S (en) Poker aid card
CA2043541A1 (en) Process for preparing high-temperature superconducting thin films
USD324516S (en) Micro-endless tape cartridge
JPS6428372A (en) Substrate holding mechanism
JPH0282767U (ja)
USD303287S (en) Medical instruction plate for an insufflation apparatus
SU547469A1 (ru) Питательна среда дл выращивани хлебопекарных дрожжей
JPH0242062U (ja)
JPH03120555U (ja)
JPS6418148U (ja)
JPS6475677A (en) Film forming device
JPH0448272U (ja)
JPS6217027B2 (ja)