JPH01149468U - - Google Patents
Info
- Publication number
- JPH01149468U JPH01149468U JP1988046325U JP4632588U JPH01149468U JP H01149468 U JPH01149468 U JP H01149468U JP 1988046325 U JP1988046325 U JP 1988046325U JP 4632588 U JP4632588 U JP 4632588U JP H01149468 U JPH01149468 U JP H01149468U
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- single crystal
- quartz boat
- semiconductor single
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988046325U JPH069024Y2 (ja) | 1988-04-06 | 1988-04-06 | 化合物半導体単結晶製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988046325U JPH069024Y2 (ja) | 1988-04-06 | 1988-04-06 | 化合物半導体単結晶製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01149468U true JPH01149468U (2) | 1989-10-17 |
| JPH069024Y2 JPH069024Y2 (ja) | 1994-03-09 |
Family
ID=31272595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988046325U Expired - Lifetime JPH069024Y2 (ja) | 1988-04-06 | 1988-04-06 | 化合物半導体単結晶製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069024Y2 (2) |
-
1988
- 1988-04-06 JP JP1988046325U patent/JPH069024Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069024Y2 (ja) | 1994-03-09 |
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