JPH069024Y2 - 化合物半導体単結晶製造装置 - Google Patents

化合物半導体単結晶製造装置

Info

Publication number
JPH069024Y2
JPH069024Y2 JP1988046325U JP4632588U JPH069024Y2 JP H069024 Y2 JPH069024 Y2 JP H069024Y2 JP 1988046325 U JP1988046325 U JP 1988046325U JP 4632588 U JP4632588 U JP 4632588U JP H069024 Y2 JPH069024 Y2 JP H069024Y2
Authority
JP
Japan
Prior art keywords
single crystal
compound semiconductor
quartz
quartz boat
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988046325U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01149468U (2
Inventor
清治 水庭
三千則 和地
正哉 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP1988046325U priority Critical patent/JPH069024Y2/ja
Publication of JPH01149468U publication Critical patent/JPH01149468U/ja
Application granted granted Critical
Publication of JPH069024Y2 publication Critical patent/JPH069024Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1988046325U 1988-04-06 1988-04-06 化合物半導体単結晶製造装置 Expired - Lifetime JPH069024Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988046325U JPH069024Y2 (ja) 1988-04-06 1988-04-06 化合物半導体単結晶製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988046325U JPH069024Y2 (ja) 1988-04-06 1988-04-06 化合物半導体単結晶製造装置

Publications (2)

Publication Number Publication Date
JPH01149468U JPH01149468U (2) 1989-10-17
JPH069024Y2 true JPH069024Y2 (ja) 1994-03-09

Family

ID=31272595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988046325U Expired - Lifetime JPH069024Y2 (ja) 1988-04-06 1988-04-06 化合物半導体単結晶製造装置

Country Status (1)

Country Link
JP (1) JPH069024Y2 (2)

Also Published As

Publication number Publication date
JPH01149468U (2) 1989-10-17

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