JPH01162240U - - Google Patents
Info
- Publication number
- JPH01162240U JPH01162240U JP1988055506U JP5550688U JPH01162240U JP H01162240 U JPH01162240 U JP H01162240U JP 1988055506 U JP1988055506 U JP 1988055506U JP 5550688 U JP5550688 U JP 5550688U JP H01162240 U JPH01162240 U JP H01162240U
- Authority
- JP
- Japan
- Prior art keywords
- metal layer
- insulating film
- recognition mark
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/981—Auxiliary members, e.g. spacers
- H10W72/983—Reinforcing structures, e.g. collars
Landscapes
- Wire Bonding (AREA)
Description
第１図はこの考案の一実施例の認識マークの断
面図である。第２図は従来の認識マークの断面図
である。 １１……半導体基板、１２……絶縁膜（酸化膜
）、１３……金属層、１３ａ……酸化膜上に残し
た金属層、１４……認識マーク。
面図である。第２図は従来の認識マークの断面図
である。 １１……半導体基板、１２……絶縁膜（酸化膜
）、１３……金属層、１３ａ……酸化膜上に残し
た金属層、１４……認識マーク。
Claims (1)
- 【実用新案登録請求の範囲】 金属層で囲まれた位置に形成された絶縁膜より
なる認識マークにおいて、 前記絶縁膜上に部分的に金属層を残したことを
特徴とする認識マーク。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988055506U JPH01162240U (ja) | 1988-04-25 | 1988-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988055506U JPH01162240U (ja) | 1988-04-25 | 1988-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01162240U true JPH01162240U (ja) | 1989-11-10 |
Family
ID=31281408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988055506U Pending JPH01162240U (ja) | 1988-04-25 | 1988-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01162240U (ja) |
-
1988
- 1988-04-25 JP JP1988055506U patent/JPH01162240U/ja active Pending