JPH01169247U - - Google Patents
Info
- Publication number
- JPH01169247U JPH01169247U JP6634788U JP6634788U JPH01169247U JP H01169247 U JPH01169247 U JP H01169247U JP 6634788 U JP6634788 U JP 6634788U JP 6634788 U JP6634788 U JP 6634788U JP H01169247 U JPH01169247 U JP H01169247U
- Authority
- JP
- Japan
- Prior art keywords
- cup
- coating apparatus
- wafer
- lid body
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案に係るレジスト塗布装置を示す
断面図、第２図は従来のレジスト塗布装置を示す
断面図である。
１……カツプ、１ａ……開口部、２……チヤツ
ク、３……シリコンウエハ、３ａ……レジスト塗
布面、１１……蓋体、１２……温度調節機構。
FIG. 1 is a sectional view showing a resist coating apparatus according to the present invention, and FIG. 2 is a sectional view showing a conventional resist coating apparatus. DESCRIPTION OF SYMBOLS 1...Cup, 1a...Opening, 2...Chuck, 3...Silicon wafer, 3a...Resist coated surface, 11...Lid, 12...Temperature adjustment mechanism.
Claims (1)
在に設けられウエハを吸着保持するチヤツクとを
備えたレジスト塗布装置において、前記カツプの
開口部に温度調節機構によつて表面温度が可変す
る蓋体を設け、この蓋体に前記ウエハのレジスト
塗布面に対向する面を形成したことを特徴とする
レジスト塗布装置。In a resist coating apparatus that includes a cup that opens upward and a chuck that is rotatably provided in the cup and that sucks and holds a wafer, a lid body whose surface temperature can be varied by a temperature control mechanism is provided at the opening of the cup. What is claimed is: 1. A resist coating apparatus, characterized in that the lid body is provided with a surface that faces the resist-coated surface of the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6634788U JPH01169247U (en) | 1988-05-18 | 1988-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6634788U JPH01169247U (en) | 1988-05-18 | 1988-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01169247U true JPH01169247U (en) | 1989-11-29 |
Family
ID=31291754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6634788U Pending JPH01169247U (en) | 1988-05-18 | 1988-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01169247U (en) |
-
1988
- 1988-05-18 JP JP6634788U patent/JPH01169247U/ja active Pending