JPH0122726B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample holding device that is particularly effective for use in an electron beam exposure apparatus.

In electron beam exposure equipment, if the position of the sample surface changes each time the sample is loaded onto the moving body, the size of the figure drawn on the sample changes, making it impossible to draw a highly accurate figure. .

Therefore, several pushers pressed by springs are movably installed on the receiving surface side of the moving body as a reference, and the sample holder is pushed between the receiving surface and each pusher. The structure used is such that the position of the sample surface is always kept constant by being pressed and fixed to the receiving surface. In this case, in order to easily insert the sample holder between the receiving surface and the pusher, a slope is provided on the part of the sample holder that the pusher comes into contact with, and the pusher is pushed in as the sample holder is inserted. are doing.

Here, since the movable body moves at high speed or stops instantaneously, unless the pressing force of the spring is very strong, there is a risk that the sample holder will come off the receiving surface which is the reference of the movable body.

However, if the pressing force of the spring is increased in this way, the sliding friction when the sample holder is attached and detached will increase, which will damage the receiving surface and reduce the accuracy of the position of the sample surface. Furthermore, the force required to pull out or push the sample holder out of the moving body inevitably becomes large, so that an excessive external force is applied to the guide portion of the moving body, resulting in a decrease in movement accuracy. As a result, exposure accuracy will be reduced.

The present invention provides a device capable of fixing a sample holder to a moving body without causing such inconveniences, and will be described in detail below with reference to the drawings.

FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIGS. 2 and 3 are AA and BB sectional views of FIG. At the bottom. Reference numeral 2 denotes a movable body placed on the bottom 1 via several balls 3, and the movable body can be moved in a plane perpendicular to the electron beam optical axis by a sample moving mechanism not shown. There is a notch 4 in the center of the body 2.
is formed. 5a and 5b are reference receiving plates fixed to opposite ends of the movable body 2, respectively, and each of the receiving plates protrudes above the notch 4, and each of the receiving plates has a The bottom surface is processed into a mirror surface,
Moreover, they are placed in the same plane perpendicular to the optical axis.

6 is a sample holder for holding sample 7;
The sample holder is inserted into the cutout 4 of the movable body 2 from the right direction in FIG. 1 by a sample exchange mechanism 8 having a chuck. 9a, 9b, 9c and 9d
is a cylindrical pusher for stably fixing the sample holder 6 inserted into the cutout 4 of the movable body 2 by pressing it against the lower surface of the receiving plates 5a and 5b; Cylindrical bodies 10a, 10b, 10 fixed to 2
The pushing bodies 9a to 9d are held movably in the respective interiors of the push bodies 9a to 9d, and are constantly pressed upward by springs 11a to 11c (11b to 11d are not shown) placed inside. Further, the four pushing bodies are arranged so as to press the four corners of the lower surface of the sample holder 6. Protrusions 12a to 12d (12d is not shown) are provided in portions of the sample holder 6 facing the pushers 9a to 9d, respectively.

13a, 13b, 13c and 13d are rollers interposed between each of the pushing bodies 9a to 9d and the protrusions 12a to 12d, and each roller is connected to the moving body 2.
It is rotatably attached to one end of L-shaped lever bodies 14a to 14d which are rotatably supported by the lever body.
The other ends of the lever bodies 14a, 14b and 14c, 14d are connected to wires 15a, 15b and 15c, 1, respectively.
The pulley 16 is connected to the pulley 16 through the
a and 16b. The pulley 16
a and 16b are rotatably attached to the movable body 2 via support shafts 17a and 17b, and arms 18a and 18b are fixed to both pulleys, respectively. The two arms 18a and 18b are arranged to face each other, as shown in the plan view in FIG.
The rollers 19a and 19b are rotatably attached to the tips of the rollers 19a and 19b, respectively. Furthermore, one ends of both arms 18a, 18b are pulled together by tension springs 20a, 20b. 21a and 21b are the arms 18;
This is a stopper for preventing rotation of a and 18b. In this embodiment, the stoppers 21a, 21b
In order to prevent the arms 18a, 18b from rotating, a slight gap is provided between the rollers 19a, 19b attached to each arm, but both rollers may be brought into contact with each other.

22 is a wedge-shaped member placed to face the rollers 19a and 19b;
It is inserted between a and 19b and serves to spread (rotate) 18a and 18b, and this member is fixed to the sample exchange mechanism 8.

As shown in FIG. 3, 23a and 23b are second push bodies movably installed on the side surface of the moving body 2, and these second push bodies are supported by springs 24a and 2.
4b (24b is not shown) is used to press the side surface of the sample holder 6 against a reference receiving surface P formed on the movable body 2. The other ends of the second presses 23a and 23b are wound around and fixed to a drum 26 rotatably supported on the outer wall of the movable body 2 via wires 25a and 25b.
One end of a wire 25c is further wound around and fixed to the drum 26. The other end of the wire 25c is fixed via a pin 27 to a lever 28 which is rotatably attached to the side surface of the moving member 2. The lever 2
A roller 29 is in contact with a roller 19a attached to the arm 8a at the open end of the arm 8a. 30 is a tension spring for keeping the roller 29 in constant contact with the roller 19a. Note that 31a and 31b are guide rollers for guiding the wires 25a and 25b.

The operation of such a device will now be described. First, when the arms 18a, 18b are in contact with the stoppers 21a, 21b by the tension springs 20a, 20b, as shown in FIG. , 14c, 14d are set so that no tensile force is applied to them.
... is pressed upward, thereby causing roller 1
The sample holder 6 is pressed against the receivers 5a, 5b via 3a, 13b, 13d, 13d. At the same time, the sample holder 6 is also pressed against the receiving surface P provided on the side surface of the movable body 2 by the second pushing bodies 23a and 23b provided on the side wall of the movable body 2, so that the sample holder does not move. Stably fixed to the body. Therefore, in this state, if the movable body 2 is moved to the exposure position by a sample moving mechanism (not shown), the sample 7 can be exposed.

Next, after completion of exposure, when the sample exchange mechanism 8 is brought close to the movable body 2 while the movable body 2 is moved to the sample exchange position as shown in FIG. Dot-dashed line a in the figure
As shown in , the arms 18a and 18b are inserted between rollers 19a and 19b attached to the arms 18a and 18b, so that the arms 18a and 18b are pushed apart.
By pushing this arm apart, the pulley 16
Since a and 16b rotate, the wires 15a,
15b, 15c, and 15d are the pulleys 1, respectively.
6a and 16b, thereby lever body 1
A tensile force is applied to 4a, 14b, 14c, and 14d. As a result, each of the lever bodies 14a to 14d pushes down each of the pushing bodies 9a to 9d against the pressing force of the springs 11a, so that the upward pressing force of the sample holder 6 on the movable body 2 is released. At the same time, as the arm 18a is pushed out, the lever 28 rotates about the pin 27 via the rollers 19a and 29, and the wire 25c fixed to the drum 26 is pulled, so that the drum 2
6 rotates counterclockwise in FIG. As the drum rotates, the wires 25a, 25b are wound around the drum, so that the second pushing bodies 23a, 23b resist the pressing force of the springs 24a, 24b and move to the third pushing body 25a, 25b.
Since the sample holder 6 moves to the left in the figure, the horizontal pressing force of the sample holder 6 on the moving body 2 is also released. When the pressing force from each of the pushing bodies 9a to 9d and 23a, 23b is released, the chuck part of the sample exchange mechanism 8 moves to the grip part 36 provided on the sample holder 6, so that the sample exchange mechanism 9 moves. Stop and hold the grip part with the chuck. Thereafter, by moving the sample exchange mechanism 8 in the opposite direction to that described above, the sample holder can be pulled out from the moving body 2. Here, rollers 13a to 13 are attached to respective protrusions 12a to 12d provided on the lower surface of the sample holder 6.
Since the sample holder 6 is configured to be pressed against the receiving plates 5a and 5b by the pushing bodies 9a to 9d only when the sample exchange mechanism 8 is separated from the movable body 2, the wedge-shaped member 22 is disengaged from the rollers 19a, 19b, and with most of the sample holder 6 remaining inside the moving body 2, the arms 18a, 18b are moved by the tension springs 20a, 20b.
Even if the roller 13 returns to the position shown in FIG.
The sample holder is not pressed against the receiving plate by a to 13d. Furthermore, the protrusions 12a and 12c provided on the sample holder 6 are placed in positions such that they do not come into contact with the rollers 13b and 13d during replacement. Furthermore, a protrusion is similarly provided on the side surface of the sample holder 6.

When a new sample holder 6 is held in the sample exchange mechanism 8 and then moved toward the movable body 2, the wedge-shaped member 22 rotates the arms 18a and 18b again as described above, and each pusher Since 9a to 9d and 23a, 23b are pushed down, the sample holder 6 can be easily inserted into the movable body 2. After that, when the sample exchange mechanism 8 is returned to its original position, the wedge-shaped member 22 is moved to the roller 19a.
and 19b, each pushing body 9a to 9d
The sample holder 6 is pressed and fixed to the movable body 2 by 23a and 23b.

In this embodiment, the lever 28 for releasing the pressing force of the second pushing bodies 23a and 23b is connected to the arm 18a, so the force applied to the arm 18a is equal to the force applied to the other arm 18b. larger than Therefore, in this embodiment, in order to balance the forces applied to both arms, the tension spring 20b attached to the inner arm 18b side of the arm return tension springs 20a, 20b is made larger than 20a.

FIG. 5 is a plan sectional view showing another embodiment of the present invention, in which the same numbers as in FIG. 2 indicate the same components.

That is, this embodiment is characterized in that each lever body 14a to 14d is driven by one arm 18a. The support shaft 17a, which is the center of rotation of the arm 18a, is located approximately at the center of the movable body 2. Further, wires 15a to 15d attached to the lever bodies 14a to 14d are connected to a pulley 16a integrated with the arm 18a.

As the sample exchange mechanism moves, the arm 18a rotates counterclockwise due to the wedge-shaped member 22 coming into contact with the roller 19a, and each wire 15a to 15d is wound around the pulley 16a. The lever bodies 14a to 14d are the push body 9a.
9d to 9d are pressed down, thereby releasing the upward pressing force of the sample holder 6 onto the movable body 2.
At the same time, the lever 2 is moved through rollers 19a and 29.
8 rotate in the same direction, the horizontal pressing force of the sample holder 6 on the movable body 2 is released by the operation described in the previous embodiment.

In the above description, arms 18a, 18b
The rollers 19a, 19b attached to the arms 18a, 18b are rotated by a wedge-shaped member 22, but as shown in FIG.
The same operation can be performed by forming the rollers 32a and 32b respectively and rotatably attaching the roller 33 to the member 22 side.

In addition, the pusher body was configured to be pushed down by further driving the lever body using the force generated by the rotation of the arm, but as shown in Fig. 7, the pusher body was attached to the pulley 16a without using the lever body. The wire 15a may be directly connected to the pusher. In the figure, reference numeral 34 denotes a guide roller rotatably attached to the movable body 2 via a support 35.

Furthermore, four pushers were used to press the sample holder upward against the moving body, but two or three pushers were used.
One or five or more may be used. In this case 2
In this case, the push bodies are arranged diagonally, that is, at positions 9a and 9d or 9b and 9c in FIG. When there are three, 9b, 9c, and 9a are installed at the positions indicated by the two-dot chain line b in FIG.

Furthermore, although the wedge-shaped member is connected to the sample exchange mechanism, it may be separated from the sample exchange mechanism and driven independently.

With the above configuration, when replacing the sample, the pressing force of the sample holder on the moving body can be released by rotating the arm, so the sample holder can be moved without sliding contact. This prevents the receiving surface from being damaged. Furthermore, when the pressing force of the sample holder on the moving body is released, it can be attenuated by the lever action caused by the rotation of the arm and the wedge principle. Since the force applied to the guide portion is also reduced, it is possible to prevent a decrease in movement accuracy.

Also, as shown in Figure 2, when two arms are used, both arms rotate in opposite directions, so
Since the rotational moment applied to the movable body is offset and balanced, distortion of the movable body due to the rotational moment can be prevented, and a decrease in exposure accuracy can be further prevented.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention, FIGS. 2 and 3 are sectional views taken along the lines AA and BB in FIG. 2, and FIG. The perspective views, FIGS. 5 to 7, are views showing other embodiments of the present invention. 1: bottom of sample chamber, 2: moving body, 4: cutout,
5a and 5b: receiving plate, 6: sample holder, 7: sample, 8: sample exchange mechanism, 9a to 9d: pusher, 1
0a to 10d: Cylindrical body, 12a to 12d: Protrusion, 13a to 13d: Roller, 14a to 14
d: Lever body, 15a to 15d: Wire, 16
a and 16b: pulley, 18a and 18b: arm, 19a and 19b: roller, 20a, 20
b and 30: tension spring, 21a and 21b: stopper, 22: wedge-shaped member, 23a and 23
b: second pushing body, 25a, 25b and 25c: wire, 26: drum, 28: lever.

Claims (1)

[Scope of Claims] 1. A movable body having a notch and a receiving surface arranged to protrude above the notch, and a sample holder holding a sample loaded in the notch of the movable body;
a pressing member using an elastic body provided at the bottom of the notch for pressing the sample holder toward the receiving surface and pressing and fixing the upper surface of the sample holder to the receiving surface;
a pressing force release means for moving the pressing body against the elastic force of the elastic body; an arm rotatably attached to the bottom of the notch of the movable body; one end of the arm; and the pressing force releasing means. and a drive body that is provided so as to be able to engage with the other end of the arm and that can be operated from outside the device, and in a state where the drive body and the arm are engaged, the drive body is moved. 1. A sample holding device for an electron beam exposure apparatus or the like, characterized in that the pressing force release means is biased by applying rotation to the arm to release the pressing force on the sample holder. 2. Electron beam exposure according to claim 1, wherein the arm and the driving body are engaged with each other by providing an inclined surface on either side and applying rotational force to the arm by linear movement of the driving body. Sample holding device in equipment, etc. 3. A sample holding device in an electron beam exposure apparatus or the like according to claim 1 or 2, wherein the number of pressing bodies is two or more. 4. In the electron beam exposure apparatus or the like according to any one of claims 1 to 3, the arm is one, and all the pressing bodies are connected to one end of the arm through a pressing force release means. Sample holding device. 5. The arms are two symmetrically arranged arms, each of which has one end connected to one or more pressing bodies via a pressing force release means, and the other end of which is engaged with a single driving body. A sample holding device in an electron beam exposure apparatus or the like according to any one of claims 1 to 3. 6. A sample holding device in an electron beam exposure apparatus or the like according to any one of claims 1 to 5, in which a string-like body or a wire is used to connect the arm and the pressing force release means. 7. A sample holding device in an electron beam exposure apparatus or the like according to any one of claims 1 to 6, wherein the driving body is interlocked with a sample exchange mechanism.