JPH0137870B2 - - Google Patents

Info

Publication number
JPH0137870B2
JPH0137870B2 JP59165331A JP16533184A JPH0137870B2 JP H0137870 B2 JPH0137870 B2 JP H0137870B2 JP 59165331 A JP59165331 A JP 59165331A JP 16533184 A JP16533184 A JP 16533184A JP H0137870 B2 JPH0137870 B2 JP H0137870B2
Authority
JP
Japan
Prior art keywords
layer
semiconductor substrate
cladding layer
upper cladding
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59165331A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142984A (ja
Inventor
Masahito Mushigami
Haruo Tanaka
Hayamizu Fukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP59165331A priority Critical patent/JPS6142984A/ja
Publication of JPS6142984A publication Critical patent/JPS6142984A/ja
Publication of JPH0137870B2 publication Critical patent/JPH0137870B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Semiconductor Lasers (AREA)
JP59165331A 1984-08-06 1984-08-06 半導体レ−ザの製造方法 Granted JPS6142984A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59165331A JPS6142984A (ja) 1984-08-06 1984-08-06 半導体レ−ザの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59165331A JPS6142984A (ja) 1984-08-06 1984-08-06 半導体レ−ザの製造方法

Publications (2)

Publication Number Publication Date
JPS6142984A JPS6142984A (ja) 1986-03-01
JPH0137870B2 true JPH0137870B2 (cs) 1989-08-09

Family

ID=15810301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59165331A Granted JPS6142984A (ja) 1984-08-06 1984-08-06 半導体レ−ザの製造方法

Country Status (1)

Country Link
JP (1) JPS6142984A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0196897B1 (en) * 1985-04-02 1992-01-22 Fujitsu Limited Thermal etching of a compound semiconductor
JPS62141796A (ja) * 1985-12-17 1987-06-25 Matsushita Electric Ind Co Ltd 半導体レ−ザ装置
JPS6370587A (ja) * 1986-09-12 1988-03-30 Sharp Corp 半導体レ−ザ
JP2585230B2 (ja) * 1986-09-16 1997-02-26 株式会社日立製作所 半導体レ−ザ装置

Also Published As

Publication number Publication date
JPS6142984A (ja) 1986-03-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term