JPH0160754B2 - - Google Patents

Info

Publication number
JPH0160754B2
JPH0160754B2 JP23073884A JP23073884A JPH0160754B2 JP H0160754 B2 JPH0160754 B2 JP H0160754B2 JP 23073884 A JP23073884 A JP 23073884A JP 23073884 A JP23073884 A JP 23073884A JP H0160754 B2 JPH0160754 B2 JP H0160754B2
Authority
JP
Japan
Prior art keywords
deionized water
heater
tank
outer tube
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP23073884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61107046A (ja
Inventor
Tatsuhiko Hatsutori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Bellows Co Ltd
Original Assignee
Fuji Bellows Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Bellows Co Ltd filed Critical Fuji Bellows Co Ltd
Priority to JP59230738A priority Critical patent/JPS61107046A/ja
Publication of JPS61107046A publication Critical patent/JPS61107046A/ja
Publication of JPH0160754B2 publication Critical patent/JPH0160754B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00—Details
    • F24H9/20—Arrangement or mounting of control or safety devices
    • F24H9/2007—Arrangement or mounting of control or safety devices for water heaters
    • F24H9/2014—Arrangement or mounting of control or safety devices for water heaters using electrical energy supply
    • F24H9/2021—Storage heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
    • F24H1/102—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply with resistance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/20—Control of fluid heaters characterised by control inputs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/30—Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/355—Control of heat-generating means in heaters
    • F24H15/37—Control of heat-generating means in heaters of electric heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/30—Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/395—Information to users, e.g. alarms

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Heat-Pump Type And Storage Water Heaters (AREA)
JP59230738A 1984-10-31 1984-10-31 脱イオン化水の加熱装置 Granted JPS61107046A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59230738A JPS61107046A (ja) 1984-10-31 1984-10-31 脱イオン化水の加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59230738A JPS61107046A (ja) 1984-10-31 1984-10-31 脱イオン化水の加熱装置

Publications (2)

Publication Number Publication Date
JPS61107046A JPS61107046A (ja) 1986-05-24
JPH0160754B2 true JPH0160754B2 (fr) 1989-12-25

Family

ID=16912525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59230738A Granted JPS61107046A (ja) 1984-10-31 1984-10-31 脱イオン化水の加熱装置

Country Status (1)

Country Link
JP (1) JPS61107046A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105674457B (zh) * 2016-01-28 2018-08-24 温州医科大学 基于蜗牛状加热轨道的可回收式医用加湿方法及加湿器

Also Published As

Publication number Publication date
JPS61107046A (ja) 1986-05-24

Similar Documents

Publication Publication Date Title
TW546465B (en) Apparatus for conditioning the temperature of a fluid
US7476291B2 (en) High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation
US20030102304A1 (en) Method and apparatus for heating a gas-solvent solution
EP0570586A1 (fr) Dispositif de chauffage de fluide
EP1312429B1 (fr) Procede et dispositif destines a empecher des produits solides d'adherer a la surface interieure d'un tuyau d'echappement, dispositif de traitement de gaz d'echappement avec le dispositif
JPH05317843A (ja) 超純水加熱装置および超純水加熱方法
US20050225937A1 (en) Cooling device and heat treating device using the same
US5224998A (en) Apparatus for oxidation treatment of metal
TW529073B (en) Exhaust heat utilization system and exhaust heat utilization method for a semiconductor manufacturing device, and heat exchanger used in exhaust heat utilization for a semiconductor manufacturing device
JPS61107046A (ja) 脱イオン化水の加熱装置
KR102791520B1 (ko) 히팅 파이프 모듈
JPH07294000A (ja) 純水加熱装置
US6736150B2 (en) Fluid heating system for processing semiconductor materials
JP2000121153A (ja) 流体加熱装置およびそれを用いた基板処理装置
JP2000161779A (ja) 流体加熱装置
JP3180920B2 (ja) 薬液の高温加熱装置
JPH05228465A (ja) 超純水加熱装置
JP2000304353A (ja) 液体加熱装置
JPH08501020A (ja) プロセスガス用ガスヒーター
JPH0342030A (ja) 流体供給装置
CN212694304U (zh) 温度流量控制装置
CN111495226A (zh) 混液装置及其在超纯水的混合中的应用、在腐蚀性液体的混合中的应用
JPH0674557A (ja) 純水加温装置
JP3749824B2 (ja) 強透過性薬液加熱装置
JPH1183176A (ja) 超純水加熱装置