JPH0163132U - - Google Patents
Info
- Publication number
- JPH0163132U JPH0163132U JP1987157486U JP15748687U JPH0163132U JP H0163132 U JPH0163132 U JP H0163132U JP 1987157486 U JP1987157486 U JP 1987157486U JP 15748687 U JP15748687 U JP 15748687U JP H0163132 U JPH0163132 U JP H0163132U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- ring
- sealing device
- gas
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の実施例を示す真空シール装置
の要部断面図、第２図はその真空シール装置のシ
ール状態を示す要部断面図、第３図は従来の真空
シール装置の断面図である。
１…エツチングチヤンバ、２…シリンダ、３…
ウエハ、４…ステージ、７…ベローズ、９…ガス
、１１…Ｏリング。
Fig. 1 is a sectional view of essential parts of a vacuum sealing device showing an embodiment of the present invention, Fig. 2 is a sectional view of essential parts showing the sealing state of the vacuum sealing device, and Fig. 3 is a sectional view of a conventional vacuum sealing device. It is. 1...Etching chamber, 2...Cylinder, 3...
Wafer, 4... Stage, 7... Bellows, 9... Gas, 11... O-ring.
Claims (1)
を行う反応槽中に大気側から半導体ウエハが載置
するステージの往復動作を行う部分をシールする
真空シール装置において、 前記ステージと反応槽との間にＯリングを配置
し、ガスにより半導体ウエハの処理を行う時には
前記ステージを前記Ｏリングへ押付けて、該Ｏリ
ングによりシールすることを特徴とする真空シー
ル装置。[Claims for Utility Model Registration] In a vacuum sealing device for sealing a reciprocating portion of a stage on which a semiconductor wafer is placed from the atmosphere side in a reaction tank in which semiconductor wafers are processed in a reduced pressure atmosphere using gas, A vacuum sealing device characterized in that an O-ring is disposed between a stage and a reaction tank, and when semiconductor wafers are processed with gas, the stage is pressed against the O-ring and sealed by the O-ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157486U JPH0163132U (en) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157486U JPH0163132U (en) | 1987-10-16 | 1987-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163132U true JPH0163132U (en) | 1989-04-24 |
Family
ID=31436972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987157486U Pending JPH0163132U (en) | 1987-10-16 | 1987-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163132U (en) |
-
1987
- 1987-10-16 JP JP1987157486U patent/JPH0163132U/ja active Pending
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