JPH0165867U - - Google Patents

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Publication number
JPH0165867U
JPH0165867U JP1987159713U JP15971387U JPH0165867U JP H0165867 U JPH0165867 U JP H0165867U JP 1987159713 U JP1987159713 U JP 1987159713U JP 15971387 U JP15971387 U JP 15971387U JP H0165867 U JPH0165867 U JP H0165867U
Authority
JP
Japan
Prior art keywords
solution
substrate
liquid phase
epitaxial growth
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987159713U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987159713U priority Critical patent/JPH0165867U/ja
Publication of JPH0165867U publication Critical patent/JPH0165867U/ja
Pending legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図は本考案の液相エピタキシヤル成長装置
の一実施例を示す説明図、第２図は他の実施例を
示す説明図、第３図は従来装置の説明図である。 １……スライドボート、２……基板、４……ス
ライダー、５Ａ，５Ｂ……溶液、６……溶液溜り
、８……溶媒液、９……溶媒液溜り、１０……ダ
ミー基板。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) スライド式液相成長用ボートの中に基板と
    原料の溶液とを入れて両者を接触させ、前記基板
    に半導体の結晶を成長させる液相エピタキシヤル
    成長装置において、前記溶液を複数個所に具え該
    溶液と隣接する個所には前記基板と前記溶液との
    接触時に前記基板上に残留する溶液を溶解させる
    溶媒液が配置してあることを特徴とする液相エピ
    タキシヤル成長装置。 (2) 前記基板の周囲に前記残留溶液を付着させ
    るダミー基板を配置するようにした実用新案登録
    請求の範囲第１項記載の液相エピタキシヤル成長
    装置。
JP1987159713U 1987-10-19 1987-10-19 Pending JPH0165867U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987159713U JPH0165867U (ja) 1987-10-19 1987-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987159713U JPH0165867U (ja) 1987-10-19 1987-10-19

Publications (1)

Publication Number Publication Date
JPH0165867U true JPH0165867U (ja) 1989-04-27

Family

ID=31441151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987159713U Pending JPH0165867U (ja) 1987-10-19 1987-10-19

Country Status (1)

Country Link
JP (1) JPH0165867U (ja)

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