JPS535569A - Liquid-phase epitaxial growth method - Google Patents

Liquid-phase epitaxial growth method

Info

Publication number
JPS535569A
JPS535569A JP8049476A JP8049476A JPS535569A JP S535569 A JPS535569 A JP S535569A JP 8049476 A JP8049476 A JP 8049476A JP 8049476 A JP8049476 A JP 8049476A JP S535569 A JPS535569 A JP S535569A
Authority
JP
Japan
Prior art keywords
liquid
epitaxial growth
growth method
phase epitaxial
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8049476A
Other languages
Japanese (ja)
Other versions
JPS5514530B2 (en
Inventor
Tatsuhiko Niina
Takao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP8049476A priority Critical patent/JPS535569A/en
Publication of JPS535569A publication Critical patent/JPS535569A/en
Publication of JPS5514530B2 publication Critical patent/JPS5514530B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE: To have a continuous growth of different epitaxial layers without taking in and out of the substrate by dividing the growth boat in the upper, middle and lower parts with two upper and lower sliding plates containing small holes.
COPYRIGHT: (C)1978,JPO&Japio
JP8049476A 1976-07-05 1976-07-05 Liquid-phase epitaxial growth method Granted JPS535569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8049476A JPS535569A (en) 1976-07-05 1976-07-05 Liquid-phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8049476A JPS535569A (en) 1976-07-05 1976-07-05 Liquid-phase epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS535569A true JPS535569A (en) 1978-01-19
JPS5514530B2 JPS5514530B2 (en) 1980-04-17

Family

ID=13719844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8049476A Granted JPS535569A (en) 1976-07-05 1976-07-05 Liquid-phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS535569A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717127A (en) * 1980-07-04 1982-01-28 Mitsubishi Electric Corp Boat for liquid-phase epitaxial growth
JPS5912633U (en) * 1982-07-14 1984-01-26 日本写真印刷株式会社 Transfer foil feeding device
JPS61227054A (en) * 1985-04-02 1986-10-09 Chuo Tsusho Kk Controller for supply and feed of marking material in marking machine
JPS6273625A (en) * 1985-09-26 1987-04-04 Mitsubishi Electric Corp Liquid-phase epitaxial growth device
US5326716A (en) * 1986-02-11 1994-07-05 Max Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Liquid phase epitaxial process for producing three-dimensional semiconductor structures by liquid phase expitaxy

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49121462U (en) * 1973-02-16 1974-10-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49121462U (en) * 1973-02-16 1974-10-17

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717127A (en) * 1980-07-04 1982-01-28 Mitsubishi Electric Corp Boat for liquid-phase epitaxial growth
JPS5912633U (en) * 1982-07-14 1984-01-26 日本写真印刷株式会社 Transfer foil feeding device
JPS61227054A (en) * 1985-04-02 1986-10-09 Chuo Tsusho Kk Controller for supply and feed of marking material in marking machine
JPS6273625A (en) * 1985-09-26 1987-04-04 Mitsubishi Electric Corp Liquid-phase epitaxial growth device
US5326716A (en) * 1986-02-11 1994-07-05 Max Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Liquid phase epitaxial process for producing three-dimensional semiconductor structures by liquid phase expitaxy
US5397736A (en) * 1986-02-11 1995-03-14 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften Liquid epitaxial process for producing three-dimensional semiconductor structures

Also Published As

Publication number Publication date
JPS5514530B2 (en) 1980-04-17

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