JPH0326047U

JPH0326047U -

Info

Publication number: JPH0326047U
Application number: JP8506289U
Authority: JP
Priority date: 1989-07-21
Filing date: 1989-07-21
Publication date: 1991-03-18

Description

[Brief explanation of drawings]

第１図は本案の一実施例の試料全方位傾斜装置
の縦断面図、第２図は試料ホールダ付近の詳細縦
断面図、第３図は第１図の−線断面図である
。１……真空室、２……対物レンズの上部磁極、
３……対物レンズの下部磁極、４……回転体、４
ａ……第１の回転部材、４ｂ……第２の回転部材
、５……電子光軸、６……真空シール、７……側
壁、８……真空シール、９……気密端子、１０…
…真空シール、１１……リード線、１２……受け
台、１３……ヒータ、１４……バイメタル、１４
ａ……熱膨張係数の大きい金属板、１４ｂ……熱
膨張係数の小さい金属板、１５……試料、１６…
…試料押え、１７……試料ホールダ、１８……ピ
ポツト、１９……ピポツト、２０……試料位置づ
け棒、２１……接続子、２２……リード線、２３
……電源、２４……コントローラ、２５……切換
スイツチ、２６……電流計、２７……リード線。 FIG. 1 is a longitudinal sectional view of an omnidirectional sample tilting device according to an embodiment of the present invention, FIG. 2 is a detailed longitudinal sectional view of the vicinity of the sample holder, and FIG. 3 is a sectional view taken along the line -- in FIG. 1... Vacuum chamber, 2... Upper magnetic pole of objective lens,
3... Lower magnetic pole of objective lens, 4... Rotating body, 4
a...first rotating member, 4b...second rotating member, 5...electron optical axis, 6...vacuum seal, 7...side wall, 8...vacuum seal, 9...hermetic terminal, 10...
...Vacuum seal, 11... Lead wire, 12... Rest, 13... Heater, 14... Bimetal, 14
a...Metal plate with a large coefficient of thermal expansion, 14b...Metal plate with a small coefficient of thermal expansion, 15...Sample, 16...
...Sample holder, 17...Sample holder, 18...Pivot, 19...Pivot, 20...Sample positioning rod, 21...Connector, 22...Lead wire, 23
...Power source, 24...Controller, 25...Selector switch, 26...Ammeter, 27...Lead wire.

Claims

[Scope of utility model registration request]

a rotating body that extends from the outside of the vacuum chamber to the inside thereof in a vacuum-proof manner and is rotatable around a first central axis that is substantially orthogonal to the electron optical axis in the vacuum chamber; The rotating body includes a sample holder that holds the sample so as to be positioned substantially at the intersection of the first central axis and the electron optical axis; Street,
The sample holder is supported so as to be rotatable around a second central axis that is substantially directly aligned with the first central axis, and the sample is rotated around the second axis. In a sample omnidirectional tilting device such as an electron microscope that supports a mechanism for rotating the sample holder so as to move the sample holder, a bimetallic switch is provided on the rotating body so that the other end contacts the sample holder, Through the bimetallic switch,
An omnidirectional sample tilting device for an electron microscope or the like, characterized in that the holder is configured to rotate around the second central axis.